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+Software Manual
+SmartFIB
+Application Software
+for Crossbeam Workstations
+2
+ZEISS SmartFIB
+Application Software for Crossbeam Workstations
+Original instructions
+Carl Zeiss Microscopy GmbH
+Carl-Zeiss-Promenade 10
+07745 Jena
+Germany
+microscopy@zeiss.com
+www.zeiss.com/microscopy
+Carl Zeiss Microscopy GmbH
+Carl-Zeiss-Straße 22
+73447 Oberkochen
+Germany
+Document name: ZEISS SmartFIB Software Manual
+Revision: en01 
+Effective from: Februars 2015
+© Oberkochen 2015 by Carl Zeiss Microscopy GmbH - all rights reserved
+This document or any part of it must not be translated, reproduced, or transmitted in any form or by any means, electronic or mechanical, including
+photocopying, recording, or by any information or retrieval system. Violations will be prosecuted.
+The use of general descriptive names, registered names, trademarks, etc. in this document does not imply, even in the absence of a specific
+statement, that such names are exempt from the relevant protective laws and regulations and therefore free for general use. Software programs will
+fully remain the property of ZEISS. No program, documentation, or subsequent upgrade thereof may be disclosed to any third party, unless prior
+written consent of ZEISS has been procured to do so, nor may be copied or otherwise duplicated, even for the customer's internal needs apart from
+a single back-up copy for safety purposes.
+ZEISS reserves the right to make modifications to this document without notice.
+Table of Contents
+Table of Contents
+4
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Table of Contents
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+5
+1
+Glossary
+ 11
+2
+About this Document
+ 21
+2.1
+Introduction
+ 21
+2.2
+Conventions Used in this Document
+ 22
+2.3
+Safety Instructions in this Document
+ 22
+2.4
+Related Documents
+ 23
+3
+About SmartFIB
+ 27
+3.1
+Important Terms
+ 27
+3.2
+SmartFIB Program Suite
+ 28
+3.3
+Operating Modes
+ 30
+3.4
+Exposure Parameters
+ 31
+3.4.1
+Hierarchy of Exposure Parameter Assignment
+ 31
+3.4.2
+Conversion Factors of Units
+ 32
+3.5
+SmartFIB File Formats
+ 33
+4
+User Interface
+ 37
+4.1
+Tools Toolbar
+ 38
+4.2
+Working Area
+ 41
+4.2.1
+Context Menus
+ 42
+4.3
+Menu Bar
+ 42
+4.3.1
+File Menu
+ 43
+4.3.2
+Edit Menu
+ 43
+4.3.3
+View Menu
+ 44
+4.3.4
+Sample Menu
+ 45
+4.3.4.1 Sample Settings
+ 46
+4.3.4.2 Sample Adjustment
+ 47
+4.3.4.3 Sample Focus Plane
+ 49
+4.3.5
+Image Menu
+ 50
+4.3.6
+Settings Menu
+ 50
+4.3.6.1 Preferences
+ 51
+4.3.7
+Help Menu
+ 55
+4.4
+Standard Toolbar
+ 55
+4.5
+Control Panel
+ 58
+4.5.1
+Import
+ 60
+4.5.2
+Process List
+ 61
+4.5.3
+Attributes (Live Mode)
+ 64
+4.5.3.1 Recipe
+ 66
+4.5.3.2 Drift Correction
+ 87
+4.5.3.3 Common
+ 90
+Table of Contents
+6
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+4.5.3.4 Element Type
+ 92
+4.5.4
+Settings (Sample Mode)
+ 129
+4.5.5
+Move
+ 130
+4.5.6
+Clipping
+ 132
+4.5.7
+Offset
+ 134
+4.5.8
+Image Capture
+ 134
+4.5.9
+Stage
+ 138
+4.5.10 Exposure
+ 140
+4.6
+Status Bar
+ 143
+5
+Working with the Software
+ 147
+5.1
+General Assumptions
+ 147
+5.2
+General Operation
+ 147
+5.2.1
+Performing a Basic Exposure/Milling process
+ 148
+5.2.1.1 Acquiring an Image
+ 148
+5.2.1.2 Creating Shapes/Elements to be Exposed/Milled
+ 149
+5.2.1.3 Setting the Exposure/Milling Parameters
+ 150
+5.2.1.4 Using a Drift Correction
+ 151
+5.2.1.5 Starting the Exposure/Milling Process
+ 152
+5.2.2
+Performing a Multi-Site Exposure/Milling Workflow
+ 153
+5.3
+Working in Live Mode
+ 154
+5.3.1
+Acquiring an Image
+ 154
+5.3.2
+Creating Shapes/Elements to be Exposed/Milled
+ 155
+5.3.3
+Importing Layouts
+ 156
+5.3.4
+Saving Images and Layouts
+ 156
+5.3.5
+Using the Edge Tool
+ 157
+5.3.6
+Using the Image Tool
+ 158
+5.3.7
+Using the Select-by-ID Feature
+ 158
+5.3.8
+Transferring Layouts to Sample Mode
+ 159
+5.4
+Working in Sample Mode
+ 159
+5.4.1
+Performing a Sample Adjustment
+ 160
+5.4.2
+Using the Process List
+ 161
+5.5
+Task-Oriented Workflows
+ 162
+5.5.1
+Creating a Simple Cross Section
+ 162
+5.5.2
+Creating a Cross Section
+ 164
+5.5.3
+Creating a TEM Lamella
+ 165
+5.5.4
+Obtaining Serial Section Images
+ 168
+5.5.5
+Creating a Text
+ 170
+5.6
+Working with the Gas Injection System
+ 170
+5.6.1
+Gas-Assisted Deposition
+ 170
+5.6.1.1 Performing Gas Assisted Deposition
+ 171
+5.6.2
+Gas-Assisted Etching
+ 172
+5.6.2.1 Performing Gas Assisted Etching
+ 174
+5.6.3
+Electron Beam Deposition
+ 175
+5.6.3.1 Performing Electron Beam Deposition
+ 175
+Table of Contents
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+7
+5.7
+Working with Recipes
+ 176
+5.7.1
+Using Existing Recipes
+ 176
+5.7.2
+Creating/Editing Recipes
+ 176
+5.7.3
+Creating a Recipe with Exclusive Function
+ 177
+Index
+ 181
+Table of Contents
+8
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+1
+Glossary
+1. Glossary
+10
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+1 Glossary
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+11
+1 Glossary
+Term
+Description
+Active layer
+The editable and insertable layer in SmartFIB.
+Adjustment points
+After loading the specimen to the microscope, the absolute position and the angle
+between specimen system and stage system are undefined. An Adjustment
+procedure makes it possible to find out the coordinate transformation from the
+specimen-system to the stage-system, which allows you to navigate on your
+specimen by means of specimen coordinate (using for instance the virtual specimen).
+For this process some points with well known coordinates in the specimen system
+are needed, they are called adjustment points. Of course the accuracy of the
+adjustment cannot be better than the accuracy of the used stage. In fact there are a
+lot of variations for choosing the points and the specimen adjustment tool is aimed
+at attaining as much information as possible of your chosen set of adjustment points
+and avoiding overdetermination.
+Alignment accuracy
+The alignment accuracy indicates the variation between the actual position and the
+target position. This procedure is referred to as Alignment process. Approaching the
+target by means of correcting the beam deflection (digital shift and rotation)
+according to the mismatch between actual and target position can achieve an
+accuracy of less than some ten nanometers.
+Alignment marks
+For the execution of an Alignment process one needs to take an image which
+exhibits some structure characteristics with well known coordinates. This can be
+either specially structured adjusting aids or some distinctive features of the already
+patterned structures, both are referred to as Alignment marks (or simply marks) here
+in general.
+Alignment process
+It is a common challenge for a lithography task to place new elements in the correct
+positional arrangement with respect to some already existing structures on a sample.
+eLitho offers a capable method to execute the positioning procedure which is
+referred to as Alignment process. The basic steps of an Alignment process and also a
+lot of additional information concerning this matter can be found in the section:
+Alignment settings tab. In many cases a single-step Alignment process is sufficient to
+achieve the required alignment accuracy. In some cases however when a very high
+accuracy is claimed there is the necessity to execute more than one cycle of the
+procedure. eLitho allows you to set up these multi-step Alignment processes clearly
+and gives you the opportunity to configure the procedure adequately for nearly every
+alignment task occurring. Please do not mix up the Alignment process described here
+with the sample adjustment, which is used to determine the position and the
+orientation of the sample system according to the stage system.
+1 Glossary
+12
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Term
+Description
+Area dose
+The area dose is defined as electric charge per area in micro-Coulomb per square-
+centimeter: Beside its general meaning as a dose value for exposure (see: Exposure
+tab) the area dose is also relevant for the image capture during an Alignment process
+(see: Capture area tab) ). Image capture causes some undesirable background dose
+within the capture area. Hence it is necessary to incorporate this area dose for the
+following exposure process. On the one hand the overall background dose must not
+exceed a certain critical value. For resist processes the capture area ought to be not
+dissolved by the developer and for beam induced processes the deposition or
+removal of material should be minimized. The area dose rises with the resolution for
+a fixed Pixel time.
+Area element
+Rectangles, circles, ellipses, arcs, and polygons are normally drawn as (filled) area
+elements. They are scanned as laminar elements and therefore they are treated with
+the Area settings made in the eLitho Exposure settings tab.
+Backlash
+The backlash feature is a common method to compensate the mechanical tolerance
+of a mechanical drive gear. The sample stage on a SEM for example implements this
+feature by always approaching the end point of the stage movement from the same
+direction of motion. This means that for motion in the opposite direction the stage
+exceeds the aimed target position by a certain distance (the backlash) and finally
+approaches the position by moving back with the intended direction of motion.
+Beam Blanker
+In order to avoid unintended exposure during standby times and beam settling times,
+which are necessary after large jumps (e.g. delay between elements, see: Exposure
+tab) it is recommended that the SEM is equipped with a fast electrostatic Beam
+Blanker. This devices create an electric field in the microscope column for dumping
+the beam somewhere in the column. The advantage of an electrostatic blanker with
+respect to an electromagnetic one is that the beam can be switched on and off very
+fast.
+Cycles
+The cycles determine an amount of identical iterations to achieve the required dose.
+Prevention of redeposition (deposits of etch/mill waste) during milling or layer-by-
+layer deposition.
+Dose
+The dose determines the cumulative intensity (depth or deposition height) within a
+patterning element.
+1 Glossary
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+13
+Term
+Description
+Dose value
+The term dose is of crucial meaning for the lithography-process. It is defined as
+charge per dimension unit and describes in principle the ammount of electrons (or
+ions) that are hitting the surface of the sample in normalized values. For example
+when writing area elements applying an positive resist process, the amount of
+lectrons needed for breaking up enough chemical bonds of the resist in the exposed
+area to make the resist solvable for the devolopper is given as an area dose in units
+of charge per area [µC/cm²]. The dose value in this definition does neither take the
+energy of the electrons into account nor does it include their temporal distributiion.
+The relevant dose values for an adequate exposure is depending on many
+parameters, e.g. the resist or the substrate. But of the the most decisive influence for
+resist processes (at least for some substrates) originates from the Proximity effect,
+which causes a non-uniform dose-background within the range of some micrometers
+around exposed regions. Due to the different dimesionality eLitho differntiates
+between pixel dose, line dose and area dose .
+Dwell time
+The dwell time describes how long the charged particle beam remains at one point
+of the scanning area. The scanning mode, the dose and the spacing influence the
+dwell time.
+Element
+An element represents the lowest level in the hierarchy of a layout. An element can
+be a single point, a single line, a poly-line, a filled or outlined rectangle, a filled or
+outlined circle, a filled or outlined ellipse, a filled or outlined arc or a filled or outlined
+polygon. Each element is assigned to exactly one layer.
+Exposure
+Process during which patterning elements are being transferred to the specimen by
+interaction with the charged particle beam.
+Exposure parameters
+To be able to fulfill various process requirements, the exposure parameters describe
+the temporal and regional sequence of the exposure process.
+Exposure parameters are settings for controlling the exposure of an entity and
+comprise settings including doses, dwell times, pixel spacings, and microscope
+probes. Entity in this context may refer to: graphical elements (lines, rectangles,
+raster images, etc.), layers (also the implicit live mode layer), or positions.
+Faraday cup
+A Faraday cup is a special device for precisely measuring the specimen beam current .
+The electron beam is dumped into a sink for electrons (cup), which means that as
+many electrons as possible from the incident primary electron beam are collected
+thereby producing as little as possible secondary electrons. Thus a measurement of
+the current from the Faraday cup to the electrical ground reflects the actual beam
+current which would expose the specimen under similar conditions. The exact
+knowledge of the specimen beam current is necessary to precisely determine the
+dwell time for the beam in order to achieve a given dose value.
+1 Glossary
+14
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Term
+Description
+Focus plane
+This plane matches the unintentional tilt of the sample. It is calculated from several
+positions where the focus is adjusted correctly (see: Setup of a focus plane). A least
+mean square fit is used to do this. So, whenever eLitho moves the stage and a focus
+plane is set up, the focus will be updated according to the focus plane. If you want
+to use this tool when navigating the stage by means of the Stage tab in the control
+panel, the Focus tracking feauture must be activated.
+GIS
+The Gas Injection System (GIS) is used to support etching processes chemically (by
+injecting reactive gases) or to provide material for beam induced deposition (by
+injecting precursor gases).
+Image mode
+Working with eLitho covers two different operational modes: the image mode and
+the sample mode. In image mode some of the menu entries and tools are adapted to
+the work with the capturing and administration of images. The main difference with
+respect to sample mode is however, that the working area is used for displaying the
+images instead of the virtual sample and the structure-assembly.
+Layer
+A layer is an abstract definition of a collection of certain properties which can be
+attributed in the Designer to the elements by assigning the elements to the layer
+(see: Layer Attributes and Layer Manager ). All the elements of a structuremare that
+are assinged to the same layer constitute a writing position. The employment of
+layers is often used to distinguish the different process steps of a sample. This can be
+on the one hand just a different size of the scanning area and on hte other hand it
+can be a totally different patterning process (e.g. etching or deposition of material).
+In some cases it may be also useful to assign the certain elements to a writing
+position to a seperate layer because they should not be written at all and are used
+only to assist the design process or for administrative purposes (e.g. id- numbers or
+background images). Designer offers sophisticated possibilities to display the layers in
+different coulors, so that it is obvious to recognize to which layers the respective
+elements are assigned to.
+Layout
+Geometric arrangement of patterning elements (e.g. in arrays or other functional
+units) within scanning areas grouped in process steps and process parameters. This
+arrangement can be saved in CAD format. Various foreign formats are supported in
+addition to the native *.ely format.
+Layout files
+A Layout-files is the computer file in which a layout is saved. There is a broad variety
+of different file formats which are used in the field of lithography. Very common files
+are GDS, GDSII, CIF and DXF or even bitmaps (BMP, TIFF, ...). Although eDraw eLitho
+are able to support all this mentioned formats, nanonic offers a native file format for
+layouts which is called eLayout-file. The file extension of the eProcessing-files is *.epr.
+This format supports hierarchical multi-layer multi structure layouts. Even more it is
+able to handle lithography specific information such as scanning area dose factors
+and scanning methods.
+Line dose
+Line elements are exposed as a chain of single pixels along the direction of a line.
+Therefore this "one dimensional" elements are also called "single pixel line". The line
+dose specifies the electric charge per length unit in pico-Coulomb per centimeter:.
+1 Glossary
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+15
+Term
+Description
+Mask layer
+For alignment processes it is necessary to capture images from the region of interest
+in order to find characteristic orientation features. Capturing a "normal" image will
+expose the complete image area to the electron beam. eLitho offers a versatile way
+to avoid unintentional exposure of especially critical regions within the image frame.
+This is achieved by allowing to subdivide the image area in regions where the beam
+is switched on and regions where the beam is switched off during the image
+capture. The different regions are determined by combining a writing position
+designed with edraw that contains rectangle elements exclusively with the image
+frame (see: Alignment tab). Thus the beam is switched on only inside the rectangles
+and will be blaked outside this areas during the image capture process. The writing
+positions that are used to screen out certain reagions of the capturing area are called
+Mask layer.
+Milling
+Milling stands for the local removal of surface material by means of the focused ion
+beam. For instance, you can mill cross sections which allows you to get a 2D view
+into the specimen. Milling is done by processing individual milling objects. The milling
+object defines the area to be scanned by the focused ion beam. Milling objects are
+geometrical patterns such as line, rectangle, and trapezoid. Moverover, several
+milling parameters such as milling mode, milling current, width, and height
+characterize a milling object.
+Orientation grid
+In the working area as well as in the drawing area it is necessary to position
+geometrical objects. In order to support this process eLitho and eDraw are offering
+an adjustable backgrond grid. This grid can be used on the one hand just as a means
+of orientation or on the other hand when it is switched to "magnetic" it discretizes
+the positioning area in steps of the grid pacing. See: eLitho Standard toolbar eDraw
+Standard toolbar.
+Patterning element
+Geometric object that shall be transferred to the specimen by means of particle
+beam processes.
+Pixel time
+Every object that is scanned during the lithography process is composed of discrete
+single pixels. Thus the signal is integrated for every pixel of an image and the
+elements that are patterned are also composed of discrete pixels. In case of
+patterning the dwell time (in combination with the spacing of the pixels) determines
+the dose that is achieved by the exposure. Speaking of the Pixel-time therefore is not
+only sensible for a point element but also for every scanned object.
+Pixel dose
+For Point elements the Dose: is just the electric charge per point in femto-Coulomb
+Preview
+The Preview window displays resulting exposure parameters (mixture of entered and
+calculated) for the current selection. the purpose of this window is to give an
+overview of current parameter groups and to see if there are any discrepancies.
+While setting any exposure parameters, the Preview window can remain open. This
+provides immediate feedback for the selected parameters. This function is especially
+useful when creating new recipes (one can see immediately, why something is not
+working).
+1 Glossary
+16
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Term
+Description
+Proximity effect
+Mainly the secondary electrons are resposnible for the exposure i.e. the cracking of
+the polymere chains of the resist in an lithography process. Those secondary
+electrons do not only leave the sample surface exactly at the spot where the incident
+primary electron beam hits the surface but also a large distance from that spot away.
+In general the distribution of the secondary electrons leads to a core region around
+every scanned point (some ten nanometers) where the dose is rather high and a very
+extensive region where some kind of background dose is deposited. Because of this
+rather wide ranging (several microns) background exposure the dose at a certain
+point is also determined by the number of pixels that are exposed in a wider
+proximity of the very pixel. This effect leads to a nonlocal dependency of the dose
+within a pattern and can cause massive influence on the resulting dose distribution.
+This so called Proximity effect often makes it difficult to determine the necessary dose
+ditribution for complex geometric structures. There are computer programs which
+can assist the user with this process by simulating the exposure process and
+calculating the necessary dose distribution using iterative algorithms. In some cases
+however the Proximity effect effect makes it impossible to expose a geometric
+structure.
+Quick navigation
+For large layouts it is not always easy to navigate in the working area or the drawing
+area when working at an adequate zoom level. To assist the user in such situations
+eLitho and eDraw offer the quick navigation tool in the bottom right corner of the
+respective area on the GUI. Clicking at this symbol opens a small overview window in
+which you can navigate the displayed area in the working area or the drawing area
+by means of the mouse by shifitng the non shaded area in the navigation window.
+The size of the non shaded area is automatically adjusted to the actual zoom level.
+Sample mode
+Working with eLitho covers two different operational modes: the sample mode and
+the image mode. In sample mode some of the menu entries and tools are adapted to
+the work with the structure-assembly on the virtual sample and the administration of
+layouts and lithography parameters. The main difference in comparison to image
+mode is however, that the working area is used for displaying the virtual sample
+instead of the images.
+Sample system
+The sample system is the coordinate system which is used to describe the positions
+of writing position in native corrdinates of the ideal system of the virtual sample. The
+unit used in the sample system is micrometers (µm).
+Scanning area
+The scanning area describes a quadratic field. The beam can be deflected inside of
+this field during the writing process or the image capture procedure. The scanning
+area is defined either in eDraw (individually for each layer) or in eLitho for image
+capturing (see: Image Capture). It can be shifted and rotated with respect to the
+standard scan-system of the microscope. The scanning area determines the
+magnification which is chosen at the microscope. The exact value of the chosen
+magnification depends on the microscope and if so of the settings of the alignment
+process.
+Scanning mode
+The scanning mode determines the fill pattern during the exposure process.
+1 Glossary
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+17
+Term
+Description
+Spacing
+Spacing determines the step size along the scanning path.
+1 Glossary
+18
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+2
+About this Document
+2. About this Document
+20
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+2 About this Document  |  2.1 Introduction
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+21
+2 About this Document
+About this Document  | 
+2.1 Introduction
+Welcome to the Software Manual of SmartFIB.
+Content
+This Software Manual contains descriptions of control elements and instructions
+about how to perform basic operation sequences.
+The Software Manual contains the following chapters:
+Chapter
+Content
+About this Document
+Explains function and structure of this Software
+Manual
+About the Software
+Describes the concept behind SmartFIB
+Description of the
+Software
+Summarizes a detailed software description
+Working with the
+Software
+Explains basic operation sequences.
+Conversion Factors of
+Units
+Summarizes formulas for calculating conversion
+factors of units
+Glossary
+Alphabetical list of important technical terms
+This Software Manual is part of the SmartFIB software. Read the instructions
+carefully.
+This Software Manual is designed for operators who have been trained to operate
+the microscope by a Zeiss service representative. Basic operator training and safety
+instructions will be provided within the scope of initial start up by ZEISS. Operators
+of the microscope must not deviate from the instructions provided in this Software
+Manual.
+2 About this Document  |  2.2 Conventions Used in this Document
+22
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+About this Document  | 
+2.2 Conventions Used in this Document
+The following conventions are used in this Software Manual:
+Convention
+Meaning
+¢
+Click Start
+¢
+Push the STANDBY button
+¢
+Press Enter on the keyboard
+The name of a control element is
+written in bold letters.
+Press <Ctrl+Alt+Del>
+Press multiple buttons on the
+keyboard at the same time.
+Select Tools > Goto Control Panel >
+Airlock
+Follow a path in the software.
+Input text
+Output text
+The font Courier highlights
+¢
+text to be entered by the user
+¢
+text that is displayed by the
+system
+see Conventions in this Manual
+Link to further information
+About this Document  | 
+2.3 Safety Instructions in this Document
+The safety instructions in this Software Manual follow a system of risk levels that
+are defined as follows:
+¢
+NOTICE indicates a property damage message.
+¢
+ NOTICE  Besides the NOTICE above, an embedded NOTICE also
+indicates a property damage message.
+Example:
+NOTICE
+Risk of property damage
+If the specimen stage is at a short working distance, microscope or specimen
+could be damaged when opening the chamber door.
+u Always move the specimen stage to a long working distance before
+opening the chamber door.
+2 About this Document  |  2.4 Related Documents
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+23
+ NOTICE  Fingerprints can lead to vacuum deterioration and prolonged
+pumping times. Always wear lint-free gloves when touching specimen,
+sample holder or stage.
+Tips
+Tips are indicated as follows:
+TIP
+A TIP indicates useful additional information. Tips can help you to make your
+daily work easier, but they are all optional. There is no risk for health or property
+involved.
+About this Document  | 
+2.4 Related Documents
+Instruction Manual
+For detailed information on working with the HIM-FIB refer to the respective
+instruction manual.
+Product Specification
+For details on technical data refer HIM-FIB Product Specification.
+2 About this Document  |  2.4 Related Documents
+24
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+3
+About SmartFIB
+3. About SmartFIB
+26
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+3 About SmartFIB  |  3.1 Important Terms
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+27
+3 About SmartFIB
+About SmartFIB  | 
+3.1 Important Terms
+The following terms are used in SmartFIB. Understanding these terms gives you a
+better understanding of the SmartFIB software.
+Term
+Description
+Cycles
+When milling the cycles determine the number of identical iterations to achieve
+the required dose. Larger numbers of cycles reduce redeposition.
+Dose
+The dose represents the cumulated charge per area unit of a patterning
+element.
+Dwell time
+The dwell time describes how long the charged particle beam remains at one
+point of the scanning area for each scanned pixel in one passage..
+Exposure
+Process during which patterning elements are being transferred to the specimen
+by interaction with the charged particle beam.
+Exposure parameters
+To be able to fulfill various process requirements, the exposure parameters
+describe the temporal and regional sequence of the exposure process.
+Exposure parameters are settings for controlling the exposure of an entity and
+comprise settings including doses, dwell times, pixel spacings, microscope
+probes, cycles, GIS settings, precision settings.
+These parameters combined determine the milling depth or deposition height,
+and their quality.
+Entity in this context may refer to: graphical elements (lines, rectangles, raster
+images, etc.), layers (also the implicit live mode layer), or positions.
+GIS
+The Gas Injection System (GIS) is used to support etching processes chemically
+(by injecting reactive gases) or to provide material for beam-induced deposition
+(by injecting precursor gases).
+Layout
+Geometric arrangement of patterning elements (e.g. in arrays or other
+functional units) within scanning areas grouped in process steps and process
+parameters. This arrangement can be saved in CAD format. Various foreign
+formats are supported in addition to the native *.ely format.
+Patterning element
+Geometric object that shall be transferred to the specimen by means of particle
+beam processes.
+Pixel Spacing/ Track Spacing
+Spacing determines the step size along the scanning path.
+3 About SmartFIB  |  3.2 SmartFIB Program Suite
+28
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Term
+Description
+Preview
+The Preview window displays the exposure parameters previously entered,
+along with the remaining parameters calculated from them for the current
+selection. In particular, the Preview window resolves parameters by considering
+parameters of different entities. The purpose of this window is to give an
+overview of current parameter groups and to see if there are any discrepancies.
+While setting any exposure parameter, the Preview window can remain open.
+This provides immediate feedback for the selected parameters. This function is
+especially useful when creating new recipes (e.g. you can see immediately, why
+a parameter combination is not valid).
+Scanning area
+The scanning area describes a quadratic field. The beam can be deflected inside
+of this field during the writing process or the image capture procedure. It can
+be shifted and rotated with respect to the standard scan-system of the
+microscope. The scanning area determines the magnification which is chosen at
+the microscope. The exact value of the chosen magnification depends on the
+microscope and if so of the settings of the alignment process.
+Scanning mode
+The scanning mode determines the fill pattern during the exposure process.
+About SmartFIB  | 
+3.2 SmartFIB Program Suite
+The main purpose of the SmartFIB program suite is to transfer geometric elements
+to a specimen with the help of a particle beam. This process is referred to as
+"Exposure".
+SmartFIBprogram suite consists of two main programs: SmartFIB itself and
+Designer.
+Each of these programs has a different field of use. The following bullet points give
+you an overview of typical applications.
+SmartFIB
+¢
+Main tool for online/live work on the microscope.
+¢
+Milling/etching/deposition of patterning elements.
+¢
+Provides Sample Mode (mainly used for recurring/automated workflows) and
+Live Mode (mainly used for circuit editing and creating recipes).
+Designer (requires the licence CREATOR):
+¢
+Offline creation of layouts (arrangement of elements in the scanning area).
+¢
+Interaction with Sample Mode (used as a drawing tool for Sample Mode).
+3 About SmartFIB  |  3.2 SmartFIB Program Suite
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+29
+An exposure session contains all the necessary information such as various process
+parameters and a layout. Subsequently, the exposure starts and the process can be
+monitored and documented.
+You can create layouts in the Designer and/or in Live Mode based on a
+microscope image.
+Layouts can be created hierarchically from multiple layers. During the creation of
+the layouts, different stage positions and scanning area sizes can already be taken
+into consideration. Process-specific attributes can be assigned to the layout such as
+scanning strategy, drift correction and exposure parameters. These attributes can
+either be assigned on element level to whole layers or to whole positions.
+Attributes and hierarchy levels of a layout can be saved conveniently and thus
+enable easy reusability. By creating your own toolbox, this allows you to accelerate
+recurring workflows.
+Sample Mode allows you to arrange the created layouts on a graphical
+representation of a specimen. You can use this arrangement for navigating the real
+specimen during the exposure and during process validation.
+You can arrange scanning areas on the specimen either based on coordinates in
+Sample Mode or by retrieving regions of interest on microscope images acquired
+in Live Mode.
+The geometrical elements comprise standard shapes, such as circles, rectangles and
+polygons, as well as predefined elements created for specific tasks. This includes
+elements for cross sections and TEM lamellas. The attributes of these elements are
+already customized for specific tasks. This allows you to completely perform tasks
+with a small amount of parameters.
+The microscope controls are fully integrated into all workflows such as creating
+layouts, as well as during the exposure process.
+Especially on CrossBeam systems, this allows you to carry out complex processes
+combining the imaging capabilities of the microscope and the patterning
+functionalities of SmartFIB.
+3 About SmartFIB  |  3.3 Operating Modes
+30
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+About SmartFIB  | 
+3.3 Operating Modes
+Live Mode 
+¢
+Limited to one scanning area
+¢
+The background image obtained with the charged particle beam serves as
+orientation
+Mainly used for
+¢
+Circuit editing or creating recipes
+¢
+Target preparation at a Point Of Interest (POI) / Region Of Interest (ROI) (e.g.
+TEM-lamella preparation at a specific point of the specimen)
+¢
+Analysis of one specific point of the specimen
+Sample Mode 
+¢
+Allows you to process multiple scanning areas e.g. of different size and to
+position them on the specimen
+¢
+The focus is on the layout-oriented approach
+Mainly used for
+¢
+Recurring/automated workflows
+¢
+Combination of different structuring processes: If the specimen has been
+modified before, there is also information given (e.g. Lithography)
+¢
+CAD layout navigation
+¢
+Documentation of processes and specimens (which steps were carried out?
+Repeatability)
+Simulation of complex processes also possible in offline mode
+3 About SmartFIB  |  3.4 Exposure Parameters
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+31
+About SmartFIB  | 
+3.4 Exposure Parameters
+3.4.1 Hierarchy of Exposure Parameter Assignment
+Exposure parameters are settings for controlling the exposure of an entity and
+comprise settings including doses, dwell times, pixel spacings, and microscope
+probes. Entity in this context may refer to:
+¢
+graphical elements (lines, circles, polygons, etc.),
+¢
+layers (also the implicit live mode layer), or
+¢
+positions (in Sample Mode).
+In order to specify exposure parameters for a given entity, the respective entity
+must be selected by the user. Graphical elements (Designer and SmartFIB Live
+Mode only) are selected using the mouse. Positions (SmartFIB only) are selected
+using the mouse or by selecting the respective entry in the Process List tab. Layers
+(Designer and SmartFIB Live Mode) are implicitly selected via the empty selection by
+clicking an empty region. Exposure parameters of graphical elements and layers are
+specified in the Exposure Parameters tab located in the Attributes tab (Designer
+and SmartFIB Live Mode) or the Exposure Parameters tab in the Settings tab
+(SmartFIB Sample Mode). Exposure parameter sets are always complete, i.e. it is not
+possible for an entity to partially use a set of exposure parameters. It is, however,
+possible for an entity to inherit exposure parameters which means that exposure
+parameters required for the actual exposure of an entity can be defined either
+directly via explicit specification or indirectly via inheritance.
+Exposure parameters are resolved by applying the following rules:
+1
+If a position specifies exposure parameters then every graphical element in the
+position uses these exposure parameters.
+2
+If a graphical element specifies exposure parameters and the associated
+position does not then the graphical element’s exposure parameters are used.
+3
+If neither the position nor the graphical element specifies exposure parameters
+then the exposure parameters of the graphical element’s layer are used.
+3 About SmartFIB  |  3.4 Exposure Parameters
+32
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+3.4.2 Conversion Factors of Units
+The following equations can be used to calculate parameters for exposure
+processes.
+Equation
+Description
+The area dose is defined as electric charge
+per area in micro-Coulomb per square-
+centimeter. Beside its general meaning as
+a dose value for exposure (see: Exposure
+tab) the area dose is also relevant for the
+image capture during an Alignment
+process (see: Capture area tab) ). Image
+capture causes some undesirable
+background dose within the capture area.
+Hence it is necessary to incorporate this
+area dose for the following exposure
+process. On the one hand the overall
+background dose must not exceed a
+certain critical value. For resist processes
+the capture area ought to be not disolved
+by the developer and for beam induced
+processes the deposition or removal of
+material should be minimized. The area
+dose rises with the resolution for a fixed
+Pixel time.
+Line elements are exposed as a chain of
+single pixels along the direction of a line.
+Therefore these "one dimensional"
+elements are also called "single pixel line".
+The line dose specifies the electric charge
+per length unit in pico-Coulomb per
+centimeter.
+For point elements, the dose is just the
+electric charge per point in femto-
+Coulomb
+3 About SmartFIB  |  3.5 SmartFIB File Formats
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+33
+About SmartFIB  | 
+3.5 SmartFIB File Formats
+SmartFIB uses a variety of file formats for different fields of use.
+Some of these formats are only available in Designer, Live Mode or Sample Mode
+.
+File Format
+Ending
+Description
+Designer
+Sample
+Mode
+Live
+Mode
+Exposure
+Parameters
+*.epm
+Format for saving exposure
+parameters and recipes.
+x
+x
+x
+e Layout
+*.ely
+Layout exchange format between
+Designer and SmartFIB. Geometric
+data is saved in this format.
+x
+Import only
+x
+Auto Sample
+Preparation
+*.esp
+Data obtained with Auto Sample
+Preparation are saved in this
+format (cross sections and
+lamellas).
+x
+e Processing
+*epr
+Format for saving processes
+(positions arranged on the virtual
+sample).
+x
+e Drift Correction
+*.edc
+Format for saving drift correction
+data.
+x
+Tagged Image
+File Format
+*.tif
+Format for saving background
+images.
+3 About SmartFIB  |  3.5 SmartFIB File Formats
+34
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+4
+User Interface
+4. User Interface
+36
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+4 User Interface 
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+37
+4 User Interface
+1
+3
+4
+5
+2
+6
+Fig. 1: SmartFIB main window
+1
+Tools Toolbar [} 38]
+The Tools Toolbar contains tools for the Working Area. Some of them
+are universal and others are mode specific.
+2
+Working Area [} 41]
+In the Working Area, the virtual specimen and any drawn shapes are
+displayed and can be edited.
+Sample Mode: virtual specimen and positions
+Live Mode: captured image and drawn elements. Editing of elements is
+possible only inLive Mode.
+3
+Menu Bar [} 42]
+The menus on the Menu Bar contain basic commands that you need to
+work with SmartFIB. The functionality of some of items in the menu are
+different for sample mode and Live Mode.
+4
+Standard Toolbar [} 55]
+The Standard Toolbar contains various buttons for quickly accessing a
+subset of the commands contained in the Menu Bar.
+Additionally, there are various exclusive functions, such as previews and
+mode switching.
+4 User Interface  |  4.1 Tools Toolbar
+38
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+5
+Control Panel [} 58]
+Some of the commands on the Menu Bar or the Standard Toolbar do
+not open dialog windows to obtain user input. Instead, they will open
+tabs in this Control Panel.
+6
+Status Bar [} 143]
+The Status Bar informs you e.g. about the current mouse position in the
+Working Area (left hand side).
+The status bar also allows for controlling some properties of the working
+area (right hand side).
+User Interface  | 
+4.1 Tools Toolbar
+The Tools Toolbar contains tools for the Working Area. Some of them are
+universal and others are mode specific.
+In Sample Mode, the following tools are available:
+Icon
+Tool Tip Text
+Description
+Tool: Select
+Enables selecting elements in the working area. This can be
+done by clicking with the left mouse-button directly at the
+element or drawing a rubber band around the structure with
+the left mouse-button pressed. The selected elements will be
+indicated by a bounding box consisting of eight white squares
+ordered in a rectangle around the selection (dotted line in
+sample mode).
+In some cases it might be useful to switch off the magnetic
+orientation grid in order to select the elements more easily.
+This is also affected by multi-session/multi-layer selection
+state.
+Tool: Order
+Enables showing the order or to reorder the sequence of the
+items to be patterned.
+Tool: Zoom
+Allows enlarging a certain part of the working area.
+For this, you have to draw a rubber band around the region
+of interest. This region will be fitted into the working area.
+Alternatively, you can also use the mouse wheel for zooming
+in and out.
+4 User Interface  |  4.1 Tools Toolbar
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+39
+Icon
+Tool Tip Text
+Description
+Tool: Pan
+Enables navigating the displayed region of the working area.
+This can be carried out by clicking at a given point in the area
+and move the mouse with the left button pressed. The
+navigation can also be executed with the scroll bars and the
+quick navigation feature of the working area.
+Alternatively, you can also press the mouse wheel and move
+the mouse for panning.
+Tool: Measuring
+Allows measuring distances and angles in the working area.
+In Live Mode, the following tools are added:
+Icon
+Tool Tip Text
+Description
+Tool: Edge Select
+Allows selecting the edge of an element, such as rectangles,
+trapezoids and polygons which will define the scan direction
+so that it will be scanned last.
+Tool: Vertex
+Allows changing the geometric properties of elements.
+Tool: Simple Cross Section
+Requires the licence AUTOPREP.
+Allows preparing a simple cross-section for SEM imaging and
+analysis.
+Tool: Cross Section
+Requires the licence AUTOPREP.
+Allows preparing a cross-section for SEM imaging and
+analysis.
+Tool: Lamella
+Requires the licence AUTOPREP.
+Allows preparing a TEM lamella.
+A TEM lamella is a small slice which is milled out of the
+specimen to be imaged and analyzed at high resolution in a
+TEM (transmission electron microscope).
+Tool: Point
+Allows creating point elements
+Tool: Line
+Allows creating line elements.
+Tool: Polyline
+Allows drawing a line element with angled segments.
+Tool: Spiral
+Allows creating a spiral element.
+4 User Interface  |  4.1 Tools Toolbar
+40
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Icon
+Tool Tip Text
+Description
+Tool: Rectangle
+Allows drawing a rectangle element.
+Tool: Circle
+Allows drawing a circle element.
+Tool: Ellipse
+Allows drawing an ellipse element.
+Tool: Arc
+Allows drawing an arc element.
+Tool: Polygon
+Allows drawing a polygon element.
+Tool: Trapezoid
+Allows drawing a trapezoid element.
+Tool: Parallelogram
+Allows drawing a parallelogram element.
+Tool: Text
+Opens the Text Tool dialog.
+You can adjust the font, the text size and enter text to be
+exposed.
+Tool: Image
+Allows loading bitmaps (greyscale, black, white).
+These images can then be exposed.
+Create solid / outline
+elements
+Allows you to switch between solid and outlined elements.
+This function is not available for all elements (e.g. not for ASP
+elements).
+4 User Interface  |  4.2 Working Area
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+41
+User Interface  | 
+4.2 Working Area
+1
+3
+4
+2
+Fig. 2: Working Area control elements
+1
+Rulers
+There are rulers for the X- and the Y- axes.
+These rulers change depending on the applied zoom factor.
+2
+Image area (Live Mode)
+This area shows the microscope image and elements to be milled /
+exposed.
+Virtual Smaple Area (Sample Mode)
+This area shows the positions and the virtual sample.
+3
+Slider
+There are sliders for the X- and the Y- axes.
+These sliders change depending on the applied zoom factor.
+4 User Interface  |  4.3 Menu Bar
+42
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+4
+Navigation icon (quick navigation)
+To be able to navigate within the image area/virtual sample area, click and
+hold this icon.
+A small preview image opens that shows the current field of view of the
+image area/virtual sample area.
+This function is especially helpful when a large zoom factor is applied.
+4.2.1 Context Menus
+Context menus provide direct access to related functions and features.
+User Interface  | 
+4.3 Menu Bar
+The menus on the Menu Bar contain basic commands that you need to work with
+SmartFIB. The functionality of some items in the menu are different for sample
+mode and Live mode.
+Menu item
+Description
+File
+Contains general commands for working with
+SmartFIB documents such as New, Open and Save.
+Edit
+Contains commands for editing elements to be
+exposed.
+View
+Contains parameters to set the display properties of
+the working area.
+Sample [} 45]
+Contains sample specific commands e.g. Sample
+Adjustment or setting up of a Focus plane.
+Image
+Contains specific commands for capturing images and
+the display properties for the images.
+Extra
+Contains commands to activate/deactivate the
+different tabs in the control panel and to edit the
+preferences.
+Help
+Provides access to the Software Manual and the
+About window.
+The About window contains useful information, i.e.
+data relevant when reporting bugs to the Zeiss service
+representative.
+4 User Interface  |  4.3 Menu Bar
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+43
+4.3.1 File Menu
+Access: Menu bar > File
+1
+New
+2
+Open...
+3
+Save
+4
+Save As...
+5
+Import
+6
+Quit
+4.3.2 Edit Menu
+Access: Menu bar > Edit
+1
+Undo: Shift
+2
+Redo
+3
+Cut
+4
+Copy
+5
+Paste
+4 User Interface  |  4.3 Menu Bar
+44
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+6
+Delete
+7
+Copy exposure parameters
+8
+Paste exposure parameters
+9
+Select All
+10
+Convert to Polygon/-line
+11
+Convert to Instance/Array
+12
+Explode to Elements
+13
+Attributes...
+14
+Move...
+15
+Clip...
+16
+Offset...
+17
+Align...
+18
+Distribute...
+4.3.3 View Menu
+Access: Menu bar > View
+The View menu allows to show or hide tools such as rulers or scrollbars.
+1
+Axes
+2
+Grid
+3
+Layout
+4
+Rulers
+5
+Scrollbars
+6
+Position Info
+7
+Position Content
+8
+Snap to Grid
+9
+Color by exposure parameters status
+10
+Color by z-extent
+11
+Fit image to window
+4 User Interface  |  4.3 Menu Bar
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+45
+4.3.4 Sample Menu
+Fig. 3: Menu Bar > Sample Menu
+Menu item
+Description
+Switch Mode
+Allows you to toggle between Live Mode and Sample
+Mode.
+Alternatively, press F7 on the keyboard
+Settings...
+Opens the Sample Settings dialog.
+Adjustment...
+Opens the Sample Adjustment dialog.
+Focus Plane...
+Opens the Sample Focus Plane dialog.
+Expose...
+Starts the exposure with the current settings.
+4 User Interface  |  4.3 Menu Bar
+46
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+4.3.4.1
+Sample Settings
+Fig. 4: Menu Bar > Sample Menu > Sample Settings
+Section
+Control Element
+Description
+-
+Sample:/User:/Comment:
+input fields
+Allow you to enter details about a sample.
+Size
+Width: input field and arrow
+buttons
+Allow you to enter the width of the sample. You can enter
+values manually or use the arrow buttons to change the value
+in increments of 1 mm.
+Height: input field and
+arrow buttons
+Allow you to enter the height of the sample. You can enter
+values manually or use the arrow buttons to change the value
+in increments of 1 mm.
+Edges: drop-down menu,
+input fields and arrow
+buttons
+These controls allow you to enter details about the coordinate
+system of the sample. In general, the values define the
+distance between the center of the sample and its top/bottom
+and left/right edges.
+-
+OK button
+Confirms the current settings and closes the dialog.
+Cancel button
+Discards the current settings and closes the dialog.
+4 User Interface  |  4.3 Menu Bar
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+47
+4.3.4.2
+Sample Adjustment
+Fig. 5: Menu Bar > Sample Menu > Sample Adjustment
+4 User Interface  |  4.3 Menu Bar
+48
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Section
+Control Element
+Description
+Positions
+List
+Current stage position:
+readout
+Shows the current X and Y stage coordinates.
+These icons allow you to define the type of the adjustment
+point you are about to use.
+X:/Y: input fields
+Allow you to enter coordinates.
+Pick button
+Offers a convenient approach to acquire the sample
+coordinates of a certain point on the virtual sample. When
+pressing the button, the Sample Adjustment window is
+hidden and the mouse pointer changes to cross hairs. You
+can click at a certain point in the structure-assembly and the
+Sample Adjustment window is displayed again with the
+corresponding coordinates inserted in the X:/Y: input fields.
+You can click a region of interest and its coodinates will be
+automatically transferred to the X: and Y: input fields.
+Use focus checkbox
+If activated, the current focus settings are added when saving
+a stage position using the Add button. For related
+information see Sample Focus Plane [} 49].
+Delete button
+Allows you to delete selected positions from the list.
+Add button
+Adds the current X and Y coordinates to the list. This button is
+only available if both X and Y values are determined.
+-
+Sample-stage system:
+readout
+Shows if the Sample-stage system is connected or not.
+Stage angle correction:
+readout
+Focus plane tilt: readout
+Sample size: readout
+Edges: readout
+Displays the edges defined using the 
+ icons.
+Delete all button
+Deletes all positions.
+Close button
+Closes the dialog.
+4 User Interface  |  4.3 Menu Bar
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+49
+4.3.4.3
+Sample Focus Plane
+Fig. 6: Menu Bar > Sample Menu > Sample Focus Plane
+Section
+Control Element
+Description
+Focus Points
+X:/Y:/ Objective voltage:
+readout
+Displays the current X and Y coordinates and Objective
+voltage (or working distance for SEM).
+Delete button
+Allows you to delete selected stage positions from the list.
+This button is only available if a stage position has been
+added.
+Add button
+Adds the current X and Y coordinates and Objective voltage
+to the list.
+Delete all button
+Deletes all positions.
+-
+Close button
+Closes the dialog.
+Plane tilt: readout
+4 User Interface  |  4.3 Menu Bar
+50
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+4.3.5 Image Menu
+Access: Menu bar > Image
+1
+Switch mode
+Switches between Live mode and sample mode.
+2
+Capure
+Captures an image: Continues scanning until the end of the frame is
+reached and then stops it. This equals Freeze on = End Frame in
+SmartSEM.
+For more information refer to Image Capture [} 134].
+3
+Infobar
+Allows to show or hide the infobar.
+4
+Normalize
+4.3.6 Settings Menu
+Access: Menu bar > Settings
+The Settings menu allows to show or hide tabs of the Control Panel and to show
+the Preferences dialog.
+1
+Import File Selection
+2
+Process List
+3
+Settings...
+4
+Attributes
+5
+Move
+4 User Interface  |  4.3 Menu Bar
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+51
+6
+Clipping
+7
+Offset
+8
+Image Capture
+9
+Stage Control
+10
+Preferences...
+4.3.6.1
+Preferences
+Access: Menu bar > Settings > Preferences...
+Main
+Section
+Section
+Control Element
+Description
+Application
+Localization
+Language drop-down
+list
+Allows to select the desired language of
+all numbers displayed.
+Language
+Language drop-down
+list
+Allows to select the desired language of
+all displayed texts in offline mode.
+4 User Interface  |  4.3 Menu Bar
+52
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Main
+Section
+Section
+Control Element
+Description
+Application
+Sample View > Axes
+Show axes checkbox
+Allows to show/hide the axes.
+Sample View > Grid
+Xand Y text fields with
+arrow buttons
+Allows to define the grid size.
+Show grid checkbox
+Allows to show/hide the Grid.
+Snap to grid checkbox
+Allows to enable/disable the Snap to Grid
+feature.
+The Snap to Grid feature is used to draw
+elements with a proper angle and
+alignment by snapping the mouse
+position with the help of the magnetic
+Grid during element creation or
+reposition.
+Live View > Magnify
+Magnify radiobuttons
+Allows to select between none and
+bilinear in order to display the magnified
+image acordingly.
+Live View > Minimize
+Minimize radiobuttons
+Allows to select between none, bilinear
+and trilinear in order to display the
+maminimized image.
+Live View > Font
+Font checkbox
+Allows to enable/disable the use of
+texture in order to display the text in the
+Data Zone.
+Live View > Color
+Color radiobuttons
+Allows to select the color by Exposure
+Status, Z-Extent or Layer in order to
+display the drawn elements.
+Live View > Axes
+Show axes checkbox
+Allows to show/hide the axes.
+Live View > Grid
+Xand Y text fields with
+arrow buttons
+Allows to define the grid size.
+Show grid checkbox
+Allows to show/hide the Grid.
+Snap to grid checkbox
+Allows to enable/disable the Snap to Grid
+feature.
+The Snap to Grid feature is used to draw
+elements with a proper angle and
+alignment by snapping the mouse
+position with the help of the magnetic
+Grid during element creation or
+reposition.
+Tools
+Refer to table below.
+4 User Interface  |  4.3 Menu Bar
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+53
+Main
+Section
+Section
+Control Element
+Description
+Document
+Sample View > Axes
+Show axes checkbox
+Allows to show/hide the axes.
+Sample View > Grid
+Xand Y text fields with
+arrow buttons
+Allows to define the grid size.
+Show grid checkbox
+Allows to show/hide the Grid.
+Snap to grid checkbox
+Allows to enable/disable the Snap to Grid
+feature.
+The Snap to Grid feature is used to draw
+elements with a proper angle and
+alignment by snapping the mouse
+position with the help of the magnetic
+Grid during element creation or
+reposition.
+Live View > Axes
+Show axes checkbox
+Allows to show/hide the axes.
+Live View > Grid
+Xand Y text fields with
+arrow buttons
+Allows to define the grid size.
+Show grid checkbox
+Allows to show/hide the Grid.
+Snap to grid checkbox
+Allows to enable/disable the Snap to Grid
+feature.
+The Snap to Grid feature is used to draw
+elements with a proper angle and
+alignment by snapping the mouse
+position with the help of the magnetic
+Grid during element creation or
+reposition.
+4 User Interface  |  4.3 Menu Bar
+54
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+Application Tools
+Section
+Control Element
+Description
+Scroll-zoom
+Zoom-in center: mouse radiobutton
+Allows to choose between Mouse
+and View in order to to apply and
+display the zoom-in feature.
+Zoom-in center: view radiobutton
+Zoom-out center: mouse radiobutton
+Allows to choose between Mouse
+and View in order to to apply and
+display the zoom-out feature.
+Zoom-out center: view radiobutton
+Tab opened upon element
+creation
+memorize radiobutton
+Allows to choose between Memorize,
+Geometry and Recipe dialog in order
+to apply accordingly in the Live Mode
+when an element is being drawn or
+created.
+geometry radiobutton
+recipe radiobutton
+Tool activated upon element
+creation
+keep radiobutton
+Allows to choose bewteen Keep,
+Vertex tool and Selection tool in order
+to apply accordingly in the Live Mode
+when an element is being drawn or
+created.
+vertex tool radiobutton
+selection radiobutton
+Serial-Section
+Serial section path text field
+Allows to enter a valid path to save
+the Images grabbed during Serial
+Section Imaging.
+Exposure parameters
+Show exposure parameters dialog
+checkbox
+Allows to show/hide the Exposure
+Parameters dialog.
+4 User Interface  |  4.4 Standard Toolbar
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+55
+TIP
+¢ Settings within the Document section that are confirmed by clicking OK
+would be applied instantaneously (for the current document only) and
+would be reflected to the user when the respective documents are saved or
+when saved and loaded back.
+¢ Settings within the Application section that are confirmed by clicking OK are
+saved and reloaded for the next session.
+4.3.7 Help Menu
+Access: Menu bar > Help
+1
+SmartFIB Help
+Opens the SmartFIB Electronic Help.
+2
+About SmartFIB
+Shows information about the software version, copyright and more.
+User Interface  | 
+4.4 Standard Toolbar
+The Standard Toolbar contains various buttons for quickly accessing a subset of
+the commands contained in the Menu Bar. It also offers some additional
+functionality for instance Zoom Control and Grid Activation.
+The appearance of the Standard Toolbar is different for sample mode and Live
+Mode. You can change the mode with the buttons on the rightmost side of the
+Standard Toolbar.
+4 User Interface  |  4.4 Standard Toolbar
+56
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+The following icons are available in Sample Mode:
+Icon
+Tool Tip Text
+Description
+Undo: 
+Undoes the last action.
+Redo: 
+Restores the last action that was made undone.
+Cut
+Deletes the selected entity from the layout and adds them to
+the clipboard.
+Copy
+Sample Mode: Copies the position or layout to the clipboard.
+Live Mode: Copies the selected elements to the clipboard.
+Paste
+Pastes the contents of the clipboard to the structure assembly.
+Multi session selection mode
+If activated, you can select positions of all sessions with the
+Select Tool.
+If deactivated, you can select only the positions of editable
+session with the Select Tool.
+Select the current session
+from the process list
+Selects the current session from the process list.
+Expose
+Switches to the Exposure tab of the Control Panel.
+Process "Name of active
+process"
+Displays current positions and overall dwell time.
+Select a microscope
+Allows column selection such as FIB, SEM, Disconnect etc.
+Switch to Live Mode
+Sample Mode only: Switches to Live Mode.
+The following icons are only available in Live Mode:
+Icon
+Tool Tip Text
+Description
+Center stage
+Moves the stage to the position defined by clicking with the
+crosshair cursor within the image.
+Reduced raster
+Switches between reduced scan and normal full frame mode.
+4 User Interface  |  4.4 Standard Toolbar
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+57
+Icon
+Tool Tip Text
+Description
+Resolution:, Scanspeed: 
+By default: 1k Res., Scan speed 3, pixel
+average, capture mode: cycle
+Link to Image
+Capture tab,
+which allows to
+change the
+parameters for
+the shortcut.
+Resolution:, Scanspeed: 
+1k Res., Scan speed 5, pixel average,
+capture mode: cycle
+Resolution:, Scanspeed: 
+1k Res., Scan speed 9, pixel average,
+capture mode: capture
+Freeze / Unfreeze
+Stops/stats image capture.
+Live process
+Shows the total number of elements in the layout and --
+separated by an arrow -- the number of elements to be
+exposed.
+Difference comes from ignore and element outside of
+scanning area.
+Transfer to sample mode
+Requires the licence AUTOPREP.
+Transfers the current layout to Sample Mode.
+Switch to sample mode
+Live Mode only: Switches to Sample Mode.
+4 User Interface  |  4.5 Control Panel
+58
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+User Interface  | 
+4.5 Control Panel
+Fig. 7:  Control Panel tabs
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+59
+1
+Import [} 60]
+2
+Process List [} 61]
+3
+Stage [} 138]
+4
+Attributes (Live Mode) [} 64] / Settings (Sample Mode) [} 129]
+5
+Move [} 130]
+6
+Clipping [} 132]
+7
+Offset
+8
+Image Capture [} 134]
+9
+Exposure [} 140]
+4 User Interface  |  4.5 Control Panel
+60
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+4.5.1 Import
+4 User Interface  |  4.5 Control Panel
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+61
+Section
+Control Element
+Description
+-
+Replace button
+Sample Mode: Replace currently selected positions in the
+working area by selecting Structures or Layers in the treeview.
+In Live Mode only positions can be used for replacing, the live
+position is automatically selected.
+Alternatively, you can drag & drop positions or structures.
+Import File tab
+Up button
+Goes up one folder in the directory.
+Refresh button
+Updates the current directory. This might be helpful if there
+have been changes that are not yet visible.
+All switch
+Shows all entries in a directory.
+Volume: drop-down list
+Allows you to select a directory or drive.
+Location: input field
+Allows you to enter a path to a directory.
+Intern tab
+Replace button
+Sample Mode only: The list contains all previously imported
+positions that have been transferred from Live Mode to
+Sample Mode as individual layers. The button allows you to
+replace selected positions or structures of the intern list.
+4.5.2 Process List
+TIP
+To be able to use the full functionality of the Process List, the licence
+AUTOPREP is required.
+It allows you to transfer shapes/elements to Sample Mode and to return to
+previously processed steps and positions. Positions can also be saved even along
+with Drift Correction.
+SmartFIB offers a Process List. This list helps you to keep track of any steps you
+made during your work with SmartFIB. This allows you to backtrack your steps
+easily and to increase repeatability.
+All positions and parameters are saved in the Process List (without drift correction).
+In Sample Mode, you can also go back to previously processed positions by and
+the Process list is represented graphically. Basically, once you click Expose, a
+position is added to the list.
+4 User Interface  |  4.5 Control Panel
+62
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+Fig. 8: Process List in Sample Mode
+4 User Interface  |  4.5 Control Panel
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+63
+Section
+Control Element
+Description
+List
+Exposable check box
+The user will not have control over marking of exposable
+check box. But it would be automatically marked / unmarked
+based on valid exposure parameter values.
+Adjusted check box
+Informs the user if the process has a valid sample adjustment
+at the moment.
+Context menu
+By right-clicking an entry, you can open a context menu
+containing the following menu items:
+¢
+Active: Activates/deactivates the currently selected
+process.
+Deactivation is done by activating another process.
+¢
+Expose: Switches to the Exposure tab and sets the
+selected process to active..
+¢
+Visible: Shows/hides the currently selected process
+¢
+Editable: Enables/disables editiing of the currently
+selected process.
+¢
+Rename: Allows you to rename the currently selected
+process.
+The Visible and Editable entries can also be toggled by
+directly clicking at the icons.
+-
+Add button
+Adds a process to the list.
+Remove button
+Removes a selected process from the list.
+Expose button
+Switches to the Expose tab for the selected process.
+Go to button
+Sample Mode only: Returns to the selected process.
+Go and show button
+Moves stage to the selected position and restores layout.
+4 User Interface  |  4.5 Control Panel
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+4.5.3 Attributes (Live Mode)
+4 User Interface  |  4.5 Control Panel
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+65
+Section
+Control Element
+Description
+-
+Selection: readout
+Shows the selected number of elements or layers.
+In-Layer Id: input field and
+arrow buttons
+Shows the identification of an element within the layer. This
+identification can be changed using the Order Tool.
+Entering a value or using the buttons selects the respective
+element.
+Layer drop-down menu
+Allows you to select a layer.
+4 User Interface  |  4.5 Control Panel
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+4.5.3.1
+Recipe
+This tab is used to assign exposure parameters which are determining the details of
+the process for the exposure. The dialog consists of a common section which is
+always displayed as it is holding the parameters which are of interest for standard
+usage of SmartFIB. Besides this it contains several expandable sections that you can
+show optionally when you have to perform a specific task such as creating a new
+recipe.
+Fig. 9: Attributes tab > Recipe tab
+1
+Common [} 67] section
+2
+Topmost Expander button
+These expandable sections provide detailed information about assigned
+recipes or in case of Exclusive mode they are allowing the adaptation of
+the exposure parameters in a very comprehensive way.
+The topmost expander button allows you to expand or collapse all
+expandable section at once.
+With the dedicated expander buttons you can expand or collapse each
+section individually.
+4 User Interface  |  4.5 Control Panel
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+67
+3
+Description [} 73] expandable section
+4
+Details [} 74] expandable section
+5
+Scanning [} 81] expandable section
+6
+GIS [} 84] expandable section
+7
+Precision [} 86] expandable section
+4.5.3.1.1
+Common Section
+The common section contains the following control elements:
+Control Element
+Description
+Selection: readout
+The recipes are assigned to either a position
+(in Sample Mode), a layer or an element (Live
+Mode and Designer). The Selection informs
+you with which of this entities your recipe
+assignment is dealing at the moment. This is
+especially important as it is possible to use
+multi sections (of the same entity) also.
+Ignore checkbox
+When your current selection holds elements,
+than you are able to check the Ignore flag.
+This will prevent the elements from exposure
+even when the exposure is carried out for the
+corresponding process (see also context menu
+for right click on element selections). The
+status of ignored elements is indicated by a
+stippled filling pattern for the elements.
+Material: drop-down list
+Allows you to assign recipes to the Selection
+directly or if so to decide about other
+modalities of the exposure parameter
+assignment.
+4 User Interface  |  4.5 Control Panel
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+Control Element
+Description
+Create Recipe button
+The Create Recipe button 
+ allows to edit
+a recipe.
+Save button
+The Save button 
+ allows to save a recipe.
+Purpose: drop-down list
+In SmartFIB it is obligatory to state a purpose
+for each recipe (FIB Milling, FIB deposition,
+SEM Lithography or SEM Deposition). For
+assigned recipes this purpose is displayed just
+for informing the user. Whereas when you
+edit a recipe (in Exclusive Mode) changing the
+purpose by means of the drop-down list will
+adapt the appearance of the Recipe dialog for
+editing recipes for the chosen purpose. This is
+achieved by setting certain default values and
+offering only a subset of relevant parameters
+for editing in the particular sections (details
+see below).
+Gauging: drop-down list
+Indicates if the current set of exposure
+parameters or the used recipe is “gauged” or
+“not gauged” i.e. if the set of parameters is
+calibrated for a certain height or depth.
+For more information refer to the Info section
+at the end of this topic.
+Probe: drop-down list
+Allows you to quickly change the used probe
+for the recipe. Please be aware that although
+the scanning parameters such as spacing and
+dwell-time are recalculated for the new probe
+there might be significant changes in the
+result of the exposure. For SEM-purposes this
+drop-down menu is not available.
+Dose factor: input field and
+arrow buttons
+Only for element selections. This user input
+field allows you to scale the overall dose for
+the recipe by means of a factor.
+4 User Interface  |  4.5 Control Panel
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+69
+Control Element
+Description
+Depth: input field and arrow
+buttons
+Only for element selections. For gauged
+recipes you can set a Depth or a Height (or in
+case of SEM Lithography a scaling Value) to
+scale the overall dose for the entity. SmartFIB
+calculates automatically the necessary changes
+in the exposure parameters in order to reach
+the stated result. You can control the
+calculation by choosing the “computed
+parameter” (see also: Dwell time and Cycles in
+the Details section). For non-gauged sets of
+exposure parameters the Depth/Height user
+input field is deactivated.
+Preview: button
+Only active in Exclusive mode. When clicking
+the Preview button the Exposure Preview
+dialog opens.
+Material Drop-down list
+1
+2
+3
+4
+Fig. 10: Recipe types
+4 User Interface  |  4.5 Control Panel
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+1
+¢
+Inconsistent
+A selection can contain more than one entity of the same type
+(elements, layers or positions). If the assigned recipe is not the same
+for all entities of the Selection this is indicated by the entry:
+inconsistent in the Materials drop-down list.
+¢
+None
+As the layer is the lowest entity in the assignment hierarchy layers
+cannot take exposure parameters from another entity. Therefore
+when you do not directly assign a recipe to a layer this is indicated by
+the entry: None in the Materials drop-down list.
+¢
+From Layer
+Whenever you have not directly assigned a recipe to an element
+selection the Material drop-down list is indicating this by the entry:
+from Layer. This means that the element exposure parameters are
+taken from the Layer settings. Assigning a recipe to the layer and
+leaving the element Material settings: from Layer is a convenient way
+to assign the same recipe to a larger number of elements.
+¢
+From Layout
+Sample Mode
+Whenever you have not directly assigned a recipe to a position
+selection the Material drop-down list is indicating this by the entry:
+from Layout. This means that the exposure parameters are taken from
+the Layout settings, i.e. from the layers or the elements according to
+the assignment hierarchy.
+¢
+Exclusive
+Assigned recipes can be adapted by changing a few special
+parameters (see below). For more flexibility or in order to create new
+recipes Exposure parameters can also be assigned to entities
+independent from saved recipes.
+This allows you to edit all the individual parameters directly. To
+achieve this you can either choose the entry: Exclusive in the Material
+drop-down list or click at the (Create Recipe) Pen button next to the
+Material drop-down list.
+If there are any previously assigned parameters they will be used as
+default when changing to Exclusive Mode. Doing so the Pen button
+changes to the Save Changes button. By pressing this button the
+user is offered a possibility to save the edited set of exposure
+parameters as a new recipe. Apart from user saving the edited recipe
+as a new recipe / can even overwrite the existing recipe as well.
+4 User Interface  |  4.5 Control Panel
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+71
+2
+User Defined Recipes
+Shows recipes defined by the user.
+When you move the mouse over one of the entries a tooltip will be shown
+which shows a summary of the parameters of the recipe. You can choose
+a recipe by clicking at the entry in the drop down list. The chosen recipe
+will be displayed in the collapsed drop-down menu after doing so.
+3
+Factory Defined Recipes
+Shows pre-defined recipes by ZEISS.
+When you move the mouse over one of the entries a tooltip will be shown
+which shows a summary of the parameters of the recipe. You can choose
+a recipe by clicking at the entry in the drop down list. The chosen recipe
+will be displayed in the collapsed drop-down menu after doing so.
+4
+Import
+By left clicking at the Import entry in the Material drop-down list you can
+add existing recipes from any file path to the user defined recipe section
+of the list. If applicable the file will be copied to the user recipe folder
+when doing so.
+Materials Context Menu
+1
+2
+3
+4
+5
+6
+1
+Default for Layer
+When one Layer is selected this entry is active in the menu. It allows you
+to set the current recipe asignement (excluding Exclusive) as default
+setting for layer recipe assignment. This is especially usefull when you are
+working with the same recipe frequently.
+2
+Remove Recipe
+With this menu item you can remove a currently assigned user recipe from
+the drop down list.
+3
+Remove All User Recipes
+With this menu item you can remove all the user recipes from the drop
+down list.
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+4
+Delete Recipe
+With this menu item you can remove a currently assigned user recipe from
+the drop down list and delete it from the recipe folder.
+5
+Import Recipe
+With this menu item you can add existing recipes from any file path to the
+user defined recipe section of the list. If applicable the file will be copied
+to the user recipe folder when doing so.
+6
+Import all User Recipes
+With this menu item you can add all recipes that are stored in the user
+recipe folder to the user defined section of the list.
+Info: The Basic Idea of
+Gauging
+The general assumption for the idea of gauging recipes is that a process which is
+controlled by a set of exposure parameters delivers matchable results with respect
+to milling depth or deposition height for repeated usage when basic conditions for
+the process (such as used substrate or beam energy) are kept unchanged.
+Furthermore it is assumed that the achieved milling depth or deposition height can
+be scaled over a wide range by just scaling the overall-dose. This is surely not true
+for all set of exposure parameters and of course there are limits for the simple
+assumed scaling behavior.
+Nevertheless there are many situations where the implementation of this simple
+paradigm provides practical results for the used processes. Eventually this amounts
+to the concept of scaling the milling depth or deposition height directly by
+inserting the desired depth or height in units of length. This can be achieved by
+measuring the resulting depth or height once for the process and insert the value
+as reference value for the recipe. When this is done the recipe can be reused for
+different depth or height by just entering the desired value in the Depth/Height user
+input field of the common section of the recipe tab.
+The user does not need to care about dose scaling or such things when he reuses
+the recipe. In fact he normally does not even look into the Details section of the
+Recipe tab at all. He rather chooses the recipe, states the desired depth or height
+and starts the exposure. It is recommended therefore to create and use gauged
+recipes for everyday work whenever it is possible as this reduces the complexity of
+parameter assignment enormously. This is also the reason why the parameter
+assignment for ASP elements works with gauged recipes only.
+4.5.3.1.1.1
+Exposure Preview
+Exposure parameters may be defined in complex procedures for graphical
+elements, for layers and for positions. Taking full advantage of these possibilities
+makes it increasingly difficult to judge the validity of an element’s exposure
+parameters with respect to a given microscope. 
+4 User Interface  |  4.5 Control Panel
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+73
+The Preview dialog can be used to alleviate the situation. They show the exposure
+parameters resulting from the currently edited exclusive exposure parameters and
+also display values that may be accompanied or replaced by informational texts in
+case of errors. Previews can be applied to multi-selections as well. If a parameter’s
+value is consistent across the selected entities, a single value will be shown, if it is
+ambiguous, a range of values with lower and upper bounds is computed and
+displayed.
+The Preview dialog is not modal and is updated when the exposure parameters are
+manipulated. It is therefore possible for the user to gradually approach dwell time
+limits, etc. As unchanged probes are not resolved by the system, previews are
+unsupported if at least one selected set of selected exposure parameters uses the
+unchanged probe. In this case, the Preview button is insensitive.
+4.5.3.1.2
+Description
+4 User Interface  |  4.5 Control Panel
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+Control Element
+Description
+Description: input field
+Allows to comment on a newly created recipe
+to provide useful information when the recipe
+is used later.
+4.5.3.1.3
+Details
+The expandable section Details is a rather comprehensive and varied dialog which
+allows the user to control the exposure process in detail. In order to avoid
+unneccesary complexity the apperance of the dialog is adapted to the specific
+situation. Depending on the Selection and the purpose of the recipe for example
+the dialog consists of different fields for stating values for Points, Lines and Areas.
+When you have selected entities with inconsistent values the corresponding field
+are left blank or “not valid”.
+4 User Interface  |  4.5 Control Panel
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+75
+Section
+Control Element
+Description
+Points
+This field is only available for SEM Lithography and SEM deposition when the Selection is either
+Layers, Positions or in case of element Selection when it contains Point elements.
+Dose: input field with arrow
+buttons
+Indicates the overall dose for Point elements (unit: nC) which was
+set for the recipe either directly for non-gauged exposure
+parameters or for gauged recipes via the Depth/Height entry in
+the common section.
+Dwell time: input field with
+arrow buttons
+Indicates the duration of the dwell for each individual raster point
+for a separate cycle. Depending on the selection and the chosen
+computed parameter (for SEM deposition) this sub-field is
+showing either the computed Dwell time, the stated Dwell time
+for the recipe or “not valid” in case of a Selection that results in
+inconsistent values for the Dwell time.
+Cycles: input field with arrow
+buttons
+This sub-field is only displayed for SEM deposition.
+For SEM Lithography the value is set implicitly to 1 and the
+computed parameter is therefore always the Dwell time. For
+points the number of Cycles being not 1 only makes sense in
+case of very high dose values so that the maximum Dwell time
+for one Cycle is exceeded or when you want to expose the point
+in intervals with inserted cycle delay, see Precision [} 86].
+4 User Interface  |  4.5 Control Panel
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+Section
+Control Element
+Description
+Lines
+This field is available only for SEM Lithography and SEM deposition when the Selection is either
+Layers, Positions or in case of element Selection when it contains Line elements.
+Dose: input field with arrow
+buttons
+Indicates the overall dose for Line elements (unit: µC/cm) which
+was set for the recipe either directly for non-gauged exposure
+parameters or for gauged recipes via the Depth/Height entry in
+the common section.
+Pixel spacing: input field with
+arrow buttons
+Allows to define the step width for the individually scanned pixels
+along the line. The unit for the Pixel spacing of Lines is always
+stated directly in nm (as the Lines section is only shown for
+electron beam processes where no beam diameter is available for
+the probe).
+Note that for a given Dose changes in the Pixel Spacing
+automatically will adapt the Dwell time or the number of Cycles
+depending on the actual computed parameter.
+Dwell time: input field with
+arrow buttons
+When you have chosen SEM deposition for the Purpose of the
+recipe than you can set the duration of dwell for the individually
+scanned pixels along the line in units of µs by means of this input
+field. When you change the value the number of Cycles will be
+automatically set as the computed parameter. If on the other
+hand the Purpose of the recipe is chosen to be SEM lithography
+the Dwell time field informs you about the calculated duration of
+dwell for the individually scanned pixels as a result of the other
+parameters of the recipe. In this case the number of cycles is set
+implicitly to one and the computed parameter is therefore always
+the Dwell time.
+Cycles: input field with arrow
+buttons
+This sub-field is only displayed for SEM deposition and is used to
+set the number of repeats for the scan, see Scanning [} 81].
+For SEM Lithography the value is set implicitly to 1 and the
+computed parameter is therefore always the Dwell time. .
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+77
+Section
+Control Element
+Description
+Areas
+Dose: input field with arrow
+buttons
+Indicates the overall dose forArea elements (unit: mC/cm2) which
+was set for the recipe either directly for non-gauged exposure
+parameters or for gauged recipes via the Depth/Height entry in
+the common section.
+Pixel spacing: input field with
+arrow buttons
+Allows to define the step width for the individually scanned pixels
+along the fast direction of the scan (pixel feed). The unit for the
+Pixel spacing of Areas is stated directly in nm for electron beam
+processes as there is no beam diameter available for the probe in
+this cases. For FIB processes on the other hand the default unit
+for the Pixel spacing is percentage of the probe diameter but
+nevertheless the user has the possibility to select the unit to be
+nm for the Pixel spacing by using the unit drop down menu.
+Note that independent of the chosen unit the resulting filling
+pattern is schematically displayed in the expandable section:
+Scanning for FIB processes. Please note also that for a given Dose
+changes in the Pixel spacing automatically will adapt the Dwell
+time or the number of Cycles depending on the actual computed
+parameter.
+Track spacing: input field with
+arrow buttons
+Allows to define step width for the individually scanned tracks
+along the slow direction of the scan (line feed). The Track spacing
+is synchronized (locked) to the Pixel spacing by default. In order
+to choose the value and/or the unit for the Track spacing
+independently you have to unlock the synchronization of the two
+parameters by means of the lock button. The unit for the Track
+spacing of Areas is stated directly in nm for electron beam
+processes as there is no beam diameter available for the probe in
+this cases. For FIB processes on the other hand the default unit
+for the Track spacing is percentage of the probe diameter but
+nevertheless the user has the possibility to select the unit to be
+nm for the Track spacing by using the unit drop down menu.
+Please note that independent of the chosen units the resulting
+filling pattern is schematically displayed in the expandable
+section: Scanning for FIB processes.
+Note also that for a given Dose changes in the Track spacing
+automatically will adapt the Dwell time or the number of Cycles
+depending on the actual computed parameter.
+4 User Interface  |  4.5 Control Panel
+78
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Section
+Control Element
+Description
+Areas
+Dwell time: input field with
+arrow buttons
+Unless you have not chosen SEM lithography for the Purpose of
+the recipe you can set the duration of dwell for the individually
+scanned pixels of the Area in units of µs by means of this input
+field. When you change the value the number of Cycles will be
+automatically set as the computed parameter. If on the other
+hand the Purpose of the recipe is chosen to be SEM lithography
+the Dwell time field informs you about the calculated duration of
+dwell for the individually scanned pixels as a result of the other
+parameters of the recipe. In this case the number of cycles is set
+implicitly to one and the computed parameter is therefore always
+the Dwell time.
+Cycles: input field with arrow
+buttons
+For SEM Lithography this field is not displayed at all but the value
+is set implicitly to 1 and the computed parameter is therefore
+always the Dwell time. For the other purposes the Cycles input
+fields is used to set the number of repeats for the scan.
+Depending on the scan mode (see: Expandable section Scanning)
+the Cycle number has a different. In any case apart from
+scanning images it describes how often each individual scanning
+point is touched by the beam during the exposure.
+Ref-Height: input field with
+arrow buttons
+Whenever you are using a gauged recipe this field informs you
+about the reference value which was inserted for gauging (see
+Gauge/Regauge button). Please note for non-gauged recipes the
+displayed value is 0.000 nm.
+Gauge / Regauge button
+Depending on the status of the recipe (gauged or non-gauged)
+the label of the button changes between Gauge and Regauge
+(see also Gauging in the Common [} 67] section of the Recipe
+tab). In both cases following Gauging dialog opens.
+Gauging Dialog
+Enables the user to gauge, regauge or remove an existing gauging of a recipe or
+the current set of exposure parameters.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+79
+Control Element
+Description
+Depth / Height input field
+with arrow buttons
+Allows to enter the measured depth / height
+of the structures after exposure for gauging
+the actual set of exposure parameters.
+Cancel button
+Quits the dialog without applying any changes
+to the gauging.
+Reset button
+removes the gauging from the current set of
+exposure parameters and quits the dialog.
+OK button
+Gauges or regauges the current set of
+exposure parameters to the depth/height
+stated in the user input field and quits the
+dialog.
+Info: Deriving Values From
+Area Settings for FIB Purposes
+Recipes for applying the FIB (purpose: FIB Milling or FIB deposition) do not involve
+separate fields for Points, Lines and Areas but rather offer the Area field only for all
+situations. This is because in such cases a mechanism to derive the Line and Point
+values is implicitely utilized. The basic idea is to take into account the nonzero
+diameter of the FIB probe which results in an exposed Area (2-dimensional) also
+for Lines (in principle 1-dim) and Points (in principle 0-dim). The following
+equations are applied:
+¢
+DosePoint = (DoseArea * beam diameter2 * pi)/4
+¢
+DoseLine = DoseArea * beam diameter
+¢
+Pixel SpacingLine = Pixel SpacingArea
+The values for Cycles and Dwell times for Lines and Points are synchronized to the
+corresponding Area parameters.
+Info: Computed Parameter
+The values for the individual fields of Point, Line or Area are also not completely
+independent. In order allow for full flexibility and to avoid overdetermination there
+is the concept of the computed parameter.
+This concept allows for keeping the set of parameters consistent by making either
+the number of Cycles or the Dwell time dependent on the other parameters. This
+dependent parameter is indicated by the label (computed) behind the user input
+field. Whenever you change one of the other parameters the computed parameter
+is calculated automatically to keep the complete set of exposure parameters
+consistent. If you change the value of the momentarily computed parameter the
+role of the computed parameter is shifted to the other possibility (fom Cycles to
+Dwell time or vice versa) and the just changed value will be kept constant from
+now on when changing other parameters than Cycles or Dwell time.
+For the purpose beeing SEM Lithography the computed parameter is always the
+Dwell time and the number of cycles is set to 1 implicitly.
+4 User Interface  |  4.5 Control Panel
+80
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Info: Changing the Dose
+Value for Gauged Recipes
+When applying gauged recipes the scaling factor for the dose is based on the Area
+Dose value which was used during gauging the recipe. Therefore whenever you
+change the Area dose value for an already gauged recipe the following dialog
+pops up:
+Clicking the Yes button removes the gauging from the current set of exposure
+parameters and quits the dialog.
+Clicking the No button will restore the Area Dose value which was used during
+gauging the recipe and quits the dialog.
+Info: Gauging for Different
+Element Types
+The dose for gauged recipes is scaled uniformly for Point, Line and Area elements.
+When you are working with area elements exclusively the gauging process is
+straightforward. It just relates the Area dose to the Ref-Depth/Height and scales
+the dose according to the stated Depth/Height and Probe. For Recipes applying the
+FIB (purpose: FIB Milling or FIB deposition) the dose for Points and Lines is then
+also scaled as the values are derived from the Area parameters. However this
+deriving will not work well enough under all circumstances. Therefore if you notice
+a big discrepancy between the Depth/Height for Points, Lines and Areas when
+using the same gauged recipe you should gauge the recipe for each element type
+seperately and save them (with a hint to the element type in the recipe name).
+Thus you can apply the recipes independently for the different element types. The
+situation is slightly mor complex for electron beam purposes as one has to state
+the dose values for the three element types individually as there is no deriving of
+dose values for Points and Lines. Here too the easiest way to deal with this
+situation is to create separate gauged recipes for each element type. If you like
+you can combine the recipes to one later on.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+81
+4.5.3.1.4
+Scanning
+The expandable section Scanning allows you to control the sequence of the
+individually scanned pixels of the elements
+Control Element
+Description
+Mode Fast: drop-down
+menu
+Offers three entries which describe the relative orientation of two subsequent scanning
+tracks (lines) of the filling pattern (thin black arrows in the illustration on the right hand
+side of the drop down menu).
+¢
+Unidirectional: All subsequent tracks are scanned in the same direction.
+¢
+Bidirectional: The tracks are alternately scanned in opposite direction.
+¢
+By purpose: The relative orientation of two subsequent tracks is determined by
+the purpose of the recipe, see also Common Section [} 67], which is bidirectional
+for the four momentarily used purposes (FIB Milling, FIB Deposition, SEM
+Lithography or SEM Deposition).
+4 User Interface  |  4.5 Control Panel
+82
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Control Element
+Description
+Cycle Mode: drop-
+down menu
+Allows to specify how the number of Cycles is used to affect the sequence of the
+scanning tracks on a global view (light grey arrows in the illustration on the right hand
+side of the drop-down menu).
+¢
+Loop: The element is filled by scanning each track only once in the first pass. The
+scan is continued in identical repetitions of the first pass. The total number of
+repeats is determined by the number of Cycles stated in the Details section. This
+scan mode is normally used for milling processes when a uniform depth of the
+milled area has to be achieved.
+¢
+Back-and-forth: The element is filled by scanning each track only once in the first
+pass. The second pass is scanned by retracing the first pass with reversed
+orientation regarding track sequence and direction of the individual tracks. The
+scan is continued by identical repetitions of the first pass for odd pass numbers
+and identical repetitions of the second pass for even pass numbers alternatingly.
+The total number of passes is determined by the number of Cycles stated in the
+Details section. This scan mode is normally used for deposition processes.
+¢
+Cross-section:Before moving on to the next track each individual track is scanned
+again and again until the the total number of repetions is reached. For the Mode
+Fast beeing bidirectional every second repetion of the track will be scanned with
+reversed orientation. The total number of repetions for each track is determined
+by the number of Cycles stated in the Details section. Thus the subsequent tracks
+are finished completely one after the other before the next track is touched at all.
+This scan mode is used normally to reach high milling rates whenever a
+pronounced redeposition of material can be tolerated.
+¢
+Serial-section:Same scan style as when choosing cross-section but additionally
+allows to choose a number of Tracks after which a SEM-image can be grabbed
+automatically during the milling process, see also Obtaining Serial Section Images [
+} 168].
+¢
+By purpose: The Cycle Mode is determined by the purpose of the recip, see also
+Common Section [} 67].
+Tracks input field with
+arrow buttons
+Allows to set the number of tracks to be scanned between grabbing the SEM-images.
+The following attribution is applied:
+FIB Milling
+cross-section
+FIB Deposition
+Back-and-forth
+SEM Lithography
+loop
+SEM Deposition
+back-and-forth
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+83
+Scanning Combinations
+On the right hand side of the drop-down menus the resulting combination of
+Mode Fast and Cycle Mode are illustrated. Overall there are the following
+possibilities:
+Loop
+Back-and-forth
+Cross Section/
+Serial Section
+Uni-drictional
+Bi-directional
+Track Spacing
+For FIB recipes on the right side of the expandable section Scanning the filling
+pattern is sketched. It takes into account the relative dimensions of probe diameter
+(diameter of the circles), Pixel spacing (horizontal distance of the circles) and Track
+spacing (vetical distance of the circles). The following example illustrates the
+situation for 100% Pixel spacing and 50%
+Track spacing:
+Info: Element Specific
+Geometry of the Scanning
+Tracks
+The exact geometry of the scanning tracks and therefore the resulting filling
+pattern depends on both the settings of the expandable section Scanning of the
+Recipe tab and the element specific scanning settings of the Element Type tab.
+4 User Interface  |  4.5 Control Panel
+84
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+4.5.3.1.5
+GIS
+Allows to define recipes that make use of gas-injection systems (GIS) for the
+processes such as beam induced deposition or gas assisted milling.
+Control Element
+Description
+Use Gas: checkbox
+Allows to set if the recipe will utilize a GIS at
+all.
+When the box is not checked then the other
+user input fields of this section are disabled.
+Gas: drop-down menu
+Allows to select a precursor.
+¢
+Unchanged: The GIS setup will not be
+changed by SmartFIB during the process.
+It rather keeps the GIS settings which
+were choosen elsewhere unchanged.
+Acknowledge: checkbox
+If activated, the user has to confirm or reject
+every scheduled movement of the GIS
+microstage. For this reason a dialog is opened
+before the GIS microstage is moved, see
+description below.
+Auto park: checkbox
+If activated, the GIS will be atomatically
+retracted to the parking position once the
+exposure is finished.
+SmartFIB GIS System Message
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+85
+Control Element
+Description
+Yes button
+Confirms the scheduled GIS microstage
+movement and the process will continue after
+the movement is finished.
+No button
+Rejects the scheduled GIS microstage
+movement and the process will be ended
+without moving the microstage at all.
+Stopps the Exposure process.
+Info: Do not Use the
+Acknowledge Checkbox in
+Unattended Processes
+When the checkbox Acknowledge: is activated a user action is required to
+continue with the actual process. Therefore make sure that the recipes which are
+used for unattended processes e.g. overnight runs do not have the corresponding
+checkbox activated.
+4 User Interface  |  4.5 Control Panel
+86
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+4.5.3.1.6
+Precision
+Allows to insert time delays in the sequence of the exposure process in order to
+avoid artefacts of your pattern caused by settling delays.
+Control Element
+Description
+Delay: drop-down menu
+Allows you to control the time delay between
+successive elements of a position. The Delay
+can help to minimize blurry deges and
+distortions of the elements to be exposed. The
+actual delay is calculated automatically
+according to the distance between the last
+scanned pixel of the previous element and the
+first scanned pixel of the next element.
+¢
+None: No delay between successive
+elements at all.
+¢
+Short: Only a small delay between
+successive element.
+¢
+Medium: Is the default setting for the
+delay between successive elements and
+should be sufficient for most applications.
+¢
+Long: A long delay between successive
+elements.
+¢
+Maximum: A very long delay between
+successive elements.
+Cycle delay: drop-down
+menu
+Allows you to set a delay time between the
+individual cycles of an element to be exposed.
+This is especially useful for elements that are
+scanned in Cycle Mode: loop or when working
+with gas assisted processes.
+Info: Expanded Exposure Time
+due to Delays
+Setting Delay other than none as well as setting a nonzero Cycle delay can lead to
+much longer overall exposure times.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+87
+4.5.3.2
+Drift Correction
+A drift correction is assigned to a position in Live mode by pressing the Add button
+on the Drift Correction tab.
+Drift Correction parameters are tranferred to Sample Mode when exposing the
+structure or clicking on the Transfer button. In Sample Mode the values can be
+edited and the Drift Correction can be removed.
+The following dialog allows for setting up the parameter for a Drift Correction.
+Fig. 11: Attributes tab > Drift Correction tab
+4 User Interface  |  4.5 Control Panel
+88
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Section
+Control Element
+Description
+-
+Size: input field and arrow
+buttons
+Allows you to change the size of the drift correction mill mark.
+You can enter values manually or change the size with the
+arrow buttons in increments of 1 µm (width and height are
+linked).
+Correction Interval: input
+field and arrow buttons
+Allows you to change the correction interval. A drift
+correction will be applied each time the interval has expired.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 1 s.
+(In case of serial section imaging the interval is specified in
+number of sections.)
+Skip Pos on Error checkbox
+If drift correction fails for the position the process is continued
+by exposing the next position of the process list.
+Mark
+Preparation
+Depth: input field and arrow
+buttons
+Allows you to change the depth of the drift correction mill
+mark. You can enter values manually or change the depth
+with the arrow buttons in increments of 0.01 µm.
+Exposure: readout and
+Select ... button
+Allows you to load exposure files (*.epm)
+No Mark Milling checkbox
+If activated, an existing pattern will be used as reference for
+the drift correction.
+Changes to Stop when activated.
+Mill Mark button
+Mills a mark in order to define a feature for performing Drift
+Correction..
+Continuous checkbox
+If active, milling of the Drift Correction mark will continue
+until you click the Stop button.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+89
+Section
+Control Element
+Description
+Image
+Acquisition
+Resolution: drop-down list
+Allows you to select a resolution for the reference and the
+correction image.
+Dwell Time: drop-down list
+Allows you to change the dwell time for the Drift correction
+image.
+Probe: drop-down list
+Allows you to select the probe current used for the Drift
+correction image. The value unchanged takes the Imaging
+Probe of SmartFIB.
+Auto BC checkbox
+If activated, contrast and brightness will be set automatically.
+For this purpose, multiple images will be captured.
+Full Frame Search checkbox
+If activated, the full frame will be scanned ti find the reference
+position.
+Acquire Reference button
+Starts acquiring a reference image based on the current
+settings.
+Changes to Stop when activated.
+-
+Remove button
+Completely removes the drift correction. All drift correction
+settings for the selected position will be lost.
+Export... button
+Allows you to export drift correction parameters as *.edc files.
+Import... button
+Allows you to import drift correction parameters from *.edc
+files.
+Test button
+Starts a test for drift correction using the current drift
+correction settings.
+Advance
+The following advanced settings are used when the drift corretion is used to follow a position
+during stage tilt e.g. when tilting a cut-out for TEM lamella.
+Tilt Step Small: input field
+and arrow buttons
+Allows you to change the small tilt step. The stage is tilted in
+steps. The tilting starts with four large steps and finally n small
+steps. These must be set by an expert depending on the stage
+and sample.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.5 steps.
+Tilt Step Large: input field
+and arrow buttons
+Allows you to change the large tilt step. The stage is tilted in
+steps. The tilting starts with four large steps and finally n small
+steps. These must be set by an expert depending on the stage
+and sample.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.5 steps.
+4 User Interface  |  4.5 Control Panel
+90
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Section
+Control Element
+Description
+Reference Angle: input field
+and arrow buttons
+Allows you to set the start angle for the drift correction.
+This angle is taken into account whenever a stage tilt is
+involved during exposure with drift correction.
+4.5.3.3
+Common
+This tab contains sections that are only available if the respective geometric
+element is currently selected.
+Support for every element and also multi-selections. Not visible if a layer is selected.
+Fig. 12: Attributes tab > Common tab
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+91
+Section
+Control Element
+Description
+Dose factors
+Point: input field and arrow
+buttons
+(Only available if a point is selected) Allows you to apply a
+dose factor. This is to define the multiplication factor (of
+applied dose) for the various element types.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 units.
+Line: input field and arrow
+buttons
+(Only available if a line is selected) Allows you to apply a dose
+factor. This is to define the multiplication factor (of applied
+dose) for the various element types.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 units.
+Area: input field and arrow
+buttons
+(Only available if a two-dimensional object is selected) Allows
+you to apply a dose factor. This is to define the multiplication
+factor (of applied dose) for the various element types.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 units.
+Image: input field and arrow
+buttons
+(Only available if an image is selected) Allows you to apply a
+dose factor. This is to define the multiplication factor (of
+applied dose) for the various element types.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 units.
+-
+Ignore checkbox
+If activated, the currently selected geometric element or
+image becomes hidden.
+4 User Interface  |  4.5 Control Panel
+92
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+4.5.3.4
+Element Type
+4.5.3.4.1
+Simple Cross Section
+Fig. 13: Attributes Tab > Simple Cross Section
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+93
+Section
+Control Element
+Description
+-
+Explanatory drawing
+Shows how the various parameters influence the simple cross
+section.
+The drawing changes according to the selected parameter
+section by clicking the information symbol or by changing a
+parameter.
+Geometry
+Width: input field and arrow
+buttons
+Allows you to change the width of the cross section.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Depth: input field and arrow
+buttons
+Allows you to change the depth of the cross section.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Angles: Expandable section
+Opening Angle: input field
+and arrow buttons
+Allows you to change the opening angle of the cross section.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 1 °.
+SEM perspective: input
+field, arrow buttons and
+readout
+Allows you to change the SEM perspective angle.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 °.
+The readout hight of the trapezoid changes accordingly.
+Milling Steps
+Material: drop-down list and
+browse button
+Allows you to select a milling recipe (gauged only).
+FIB Probe drop-down list
+Allows you to select a FIB probe. Unchanged uses the current
+FIB probe setting.
+Loops text field with arrow
+buttons
+Allows you to set a number of repetitions for each milling
+step.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 1 loop.
+Time readout
+Displays the required time for the milling step (loops are not
+shown). The value changes according to the selected
+parameters for the milling step.
+-
+Load / Save / Delete buttons
+Allows you to load, save and delete default cross section
+parameter sets.
+-
+Import... / Export... buttons
+Allows you to import and export ASP parameters(*.esp).
+4 User Interface  |  4.5 Control Panel
+94
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+4.5.3.4.2
+Cross Section
+Fig. 14: Attributes tab >Cross Section tab
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+95
+Section
+Control Element
+Description
+-
+Explanatory drawing
+Shows how the various parameters influence the cross
+section.
+The drawing changes according to the selected parameter
+section by clicking the information symbol or by changing a
+parameter.
+Geometry
+Width: input field and arrow
+buttons
+Allows you to change the width of the cross section.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Depth: input field and arrow
+buttons
+Allows you to change the depth of the cross section.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Angles: Expandable section
+Opening Angle: input field
+and arrow buttons
+Allows you to change the opening angle of the cross section.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 1 °.
+SEM perspective: input
+field, arrow buttons and
+readout
+Allows you to change the SEM perspective angle.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 °.
+The readout hight of the trapezoid changes accordingly.
+Deposition
+Deposition checkbox
+Allows you to create a cross section with or without
+depositing material.
+Material: drop-down list and
+browse button
+Allows you to select a recipe for deposition (gauged only).
+Milling Steps
+Milling Steps checkbox,
+input field and arrow buttons
+Allows you to activate / deactivate any milling involved in
+creating a cross section. Only deposition steps will be
+performed if the checkbox is deactivated.
+The order of the milling steps from top to bottom in the list
+reflects the order from rough to fine.
+Material: drop-down list and
+browse button
+Allows you to select a milling recipe (gauged only).
+-
+Automatic Proximity and
+Overlap checkbox
+Enables the automatic proximity and overlap calculation.
+-
+Polishing Tilt text field with
+arrow buttons
+Allows you to set a stage tilt angle for the last milling step in
+order to achieve the perpendicular flank.
+4 User Interface  |  4.5 Control Panel
+96
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Section
+Control Element
+Description
+-
+Load / Save / Delete buttons
+Allows you to load, save and delete default cross section
+parameter sets.
+Import... / Export... buttons
+Allows you to import and export ASP parameters(*.esp).
+-
+Defaults: drop-down list
+Allows you to switch between the regular dialog or a
+simplified version with less parameters.
+Expandable Sections
+Fig. 15: Cross Section tab >Expandable Section >Angles
+Section
+Control Element
+Description
+Angles
+Opening Angle: input field
+and arrow buttons
+Allows you to change the opening angle of the cross section.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 1 °.
+SEM perspective: input
+field, arrow buttons and
+readout
+Allows you to change the SEM perspective angle.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 °.
+The readout hight of the trapezoid changes accordingly.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+97
+Deposition
+Fig. 16: Cross Section tab >Expandable Section >Deposition
+Section
+Control Element
+Description
+Deposition
+Probe: drop-down list
+Allows you to select a FIB probe. Unchanged uses the current
+FIB probe setting.
+Time: readout
+The readout shows the required time according to the
+selected deposition parameters.
+Margin Height: input field
+and arrow buttons
+Allows you to change the margin height of the deposition.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Margin Width: input field
+and arrow buttons
+Allows you to change the margin width of the deposition.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Thickness: input field and,
+arrow buttons
+Allows you to set the deposition thickness.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+4 User Interface  |  4.5 Control Panel
+98
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+Milling Steps
+Fig. 17: Cross Section tab >Expandable Section >Milling Steps
+Section
+Control Element
+Description
+Milling Steps
+Active checkbox
+Allows you to activate / deactivate each step of the milling
+process individually. The number of entries on the list depends
+on the number of milling steps selected with the input field
+and arrow buttons above the list.
+FIB Probe drop-down list
+Allows you to select a FIB probe for the respective milling
+step. Unchanged uses the current FIB probe setting.
+Proximity input field and
+arrow buttons
+Allows you to change the safety gap of the corresponding
+milling step with respect to the final edge of the cross section.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Overlap input field and
+arrow buttons
+Allows you to change the overlap to the previous milling step.
+You cannot set an overlap for the first milling step.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+DC Interval input field and
+arrow buttons
+Allows you to set a drift correction interval for the respective
+milling step.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 1 s.
+Loops input field and arrow
+buttons
+Allows you to set a number of repetitions for each milling
+step.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 1 loop.
+Time readout
+Displays the required time for each milling step (loops are not
+shown). The value changes according to the selected
+parameters for the milling step.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+99
+4.5.3.4.3
+Lamella
+Fig. 18: Attributes tab >Lamella
+4 User Interface  |  4.5 Control Panel
+100
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Section
+Control Element
+Description
+-
+Explanatory drawing
+Shows how the various parameters influence the lamella.
+The drawing changes according to the selected parameter
+section by clicking the information symbol or by changing a
+parameter.
+Geometry
+Thickness: input field and
+arrow buttons
+Allows you to change the thickness of the lamella.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Width: input field and arrow
+buttons
+Allows you to change the width of the lamella.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Depth: input field and arrow
+buttons
+Allows you to change the depth of the lamella.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Angles: Expandable section
+Opens an expandable section. For details, see below.
+Deposition
+Deposition checkbox
+Allows you to create a lamella with or without depositing
+material.
+Material: drop-down list and
+browse button
+Allows you to select a recipe used for deposition (gauged
+only).
+Milling Steps
+Milling Steps checkbox,
+input field and arrow buttons
+Allows you to activate / deactivate any milling involved in
+creating a lamella. Only milling steps will be performed if the
+checkbox is activated.
+Material: drop-down list and
+browse button
+Allows you to select a milling recipe (gauged only).
+-
+Load / Save / Delete buttons
+Allows you to load, save and delete default lamella parameter
+sets.
+Import... / Export... buttons
+Allows you to import and export ASP parameters(*.esp).
+Cut Out
+Probe drop-down list
+Allows you to select a FIB probe. Unchanged uses the current
+FIB probe setting.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+101
+Fig. 19: Lamella > Angles
+Section
+Control Element
+Description
+Angles
+Opening Angle: input field
+and arrow buttons
+Allows you to change the opening angle of the lamella.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 1 °.
+FIB Cut-Out: input field,
+arrow buttons and readout
+Allows you to change the FIB cut-out angle.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 °.
+The readout hight of the trapezoid changes accordingly.
+SEM perspective: input
+field, arrow buttons and
+readout
+Allows you to change the SEM perspective angle.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 °.
+The readout hight of the trapezoid changes accordingly.
+4 User Interface  |  4.5 Control Panel
+102
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+Deposition
+Fig. 20: Lamella > Deposition
+Section
+Control Element
+Description
+Deposition
+Probe: drop-down list
+Allows you to select a FIB probe. Unchanged uses the current
+FIB probe setting.
+Time: readout
+The readout shows the required time according to the
+selected deposition parameters.
+Margin Height: input field
+and arrow buttons
+Allows you to change the margin height of the deposition.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Margin Width: input field
+and arrow buttons
+Allows you to change the margin width of the deposition.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Thickness: input field and,
+arrow buttons
+Allows you to set the deposition thickness.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+103
+Milling Steps
+Fig. 21: Lamella >Expandable Section >Milling Steps
+Section
+Control Element
+Description
+Milling Steps
+Active checkbox
+Allows you to activate / deactivate each step of the milling
+process individually. The number of entries on the list depends
+on the number of milling steps selected with the input field
+and arrow buttons above the list.
+FIB Probe drop-down list
+Allows you to select a FIB probe for the respective milling
+steps. Unchanged uses the current FIB probe setting.
+Proximity input field and
+arrow buttons
+Allows you to change the proximity value for the respective
+milling steps.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Overlap input field and arrow
+buttons
+Allows you to change the overlap of any subsequent milling
+steps. You cannot set an overlap for the first milling step.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+DC Interval input field and
+arrow buttons
+Allows you to set a drift correction interval for the respective
+milling steps.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 1 s.
+Loops input field and arrow
+buttons
+Allows you to set a number of repetitions for each milling
+step.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 1 loop.
+Time readout
+Displays the required time for each milling step (loops are not
+shown). The value changes according to the selected
+parameters for the milling step.
+4 User Interface  |  4.5 Control Panel
+104
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+Fig. 22: Lamella > Cut Out
+Section
+Control Element
+Description
+Cut Out
+Width of cut: input field
+and, arrow buttons
+Allows you to set the width of the cutout shape.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Link size: input field and,
+arrow buttons
+Allows you to set a width for the link to the substract of the
+lamella after cutout.
+Side margin: input field and
+arrow buttons
+Allows you to adjust the distance between cutout and sides of
+the lamella.
+Bottom margin: input field
+and arrow buttons
+Allows you to adjust the distance between cutout and the
+bottom of the lamella.
+Depth tuning factor: input
+field and arrow buttons
+Allows you to change the depth tuning factor, which is a dose
+factor for the cutout milling process.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1.
+Link position: left / right
+radiobutton
+Allows you to decide whether the link of the lamella after cut
+out remains on the left or right side.
+4.5.3.4.4
+Point
+Fig. 23: Attributes tab > Point tab
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+105
+Section
+Control Element
+Description
+Position
+X: input field and arrow
+buttons
+Allows you to change the X position of the point.
+You can enter values manually or use the arrow buttons to
+move the point in increments of 0.1 µm.
+Y: input field and arrow
+buttons
+Allows you to change the Y position of the point.
+You can enter values manually or use the arrow buttons to
+move the point in increments of 0.1 µm.
+4.5.3.4.5
+Line
+Fig. 24: Attributes tab > Line tab
+Section
+Control Element
+Description
+Start Point
+X: / Y: input field and arrow
+buttons
+Allows you to define the line's starting point.
+You can enter values manually or use the arrow buttons to
+change the X and Y coordinates in increments of 0.1 µm.
+4 User Interface  |  4.5 Control Panel
+106
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+Section
+Control Element
+Description
+End Point
+X: / Y: input field and arrow
+buttons
+Allows you to define the line's end point.
+You can enter values manually or use the arrow buttons to
+change the X and Y coordinates in increments of 0.1 µm.
+Angle: input field and arrow
+buttons
+Allows you to rotate the line around its starting point.
+You can enter values manually or use the arrow buttons to
+change the angle in increments of 1°.
+Length: input field and
+arrow buttons
+Allows you to change the length of the line.
+This value only influences the line's end point.
+You can enter values manually or use the arrow buttons to
+change the lenght in increments of 0.1 µm.
+Line Width
+Width: input field and arrow
+buttons
+Allows to convert the line to a polygon with a defined width.
+If line width is not zero, the Angle section appears. It offers
+the possibility to adapt the scan geometry. For more
+information refer to Polygon [} 118], Angle section.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+107
+4.5.3.4.6
+Polyline
+Fig. 25: Attributes tab > Polyline tab
+Section
+Control Element
+Description
+-
+Points list
+This list shows the X and Y coordinates of the successive
+points along the polyline (but not the last).
+Add button
+Adds a point to the line. This button is only active if an entry
+on the list is selected.
+Remove button
+Removes a point from the polyline. This button is only active if
+an entry on the list is selected and there are more than two
+points.
+4 User Interface  |  4.5 Control Panel
+108
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+Section
+Control Element
+Description
+Point position
+X: input field and arrow
+buttons
+Allows you to change the X position of the selected point on
+the line.
+You can enter values manually or use the arrow buttons to
+move the point in increments of 0.1 µm.
+Y: input field and arrow
+buttons
+Allows you to change the Y position of the selected point on
+the line.
+You can enter values manually or use the arrow buttons to
+move the point in increments of 0.1 µm.
+Line Width
+Width: input field and arrow
+buttons
+Allows to convert the line to a polygon with a defined width.
+If line width is not zero, the Angle section appears. It offers
+the possibility to adapt the scan geometry. For more
+information refer to Polygon [} 118], Angle section.
+4.5.3.4.7
+Spiral
+Fig. 26: Attributes tab > Spiral tab
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+109
+Section
+Control Element
+Description
+Center
+X: input field and arrow
+buttons
+Allows you to change the X position of the center of the
+spiral.
+You can enter values manually or use the arrow buttons to
+move the spiral in increments of 0.1 µm.
+Y: input field and arrow
+buttons
+Allows you to change the Y position of the center of the
+spiral.
+You can enter values manually or use the arrow buttons to
+move the spiral in increments of 0.1 µm.
+Dimensions
+Arm distance: input field
+and arrow buttons
+Allows you to change the arm distance of the spiral.
+This parameter affects the size of the spiral.
+You can enter values manually or use the arrow buttons to
+change the arm distance in increments of 0.1 µm.
+Revolutions: input field and
+arrow buttons
+Allows you to change the number of revolutions of the spiral.
+You can enter values manually or use the arrow buttons to
+change the number of revolutions in increments of 0.001
+revolution.
+Length: readout
+Displays the total length of the spiral. It is influenced by the
+arm distance and the revolutions.
+Transformation
+Rotation: input field and
+arrow buttons
+Allows you to rotate the spiral around its origin. Angles are
+measured against the positive X-axis. Counter-clockwise
+rotation is indicated by positive rotation angles.
+You can enter values manually or use the arrow buttons to
+rotate the spiral in increments of 0.1°.
+Mirror: checkbox
+If activated, the spiral is mirrored.
+Line Width
+Width: input field and arrow
+buttons
+Allows to convert the spiral to a polygon with a defined
+width.
+If line width is not zero, the Angle section appears. It offers
+the possibility to adapt the scan geometry. For more
+information refer to Polygon [} 118], Angle section.
+4 User Interface  |  4.5 Control Panel
+110
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+4.5.3.4.8
+Rectangle
+Fig. 27: Attributes tab > Rectangle tab
+Section
+Control Element
+Description
+-
+Outline checkbox
+If activated, the rectangle will not be filled and becomes an
+line type element instead.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+111
+Section
+Control Element
+Description
+Position
+X: input field and arrow
+buttons
+Allows you to change the X position of the rectangle.
+You can enter values manually or use the arrow buttons to
+move the rectangle in increments of 0.1 µm.
+When not rotated the value indicates the top left corner of
+the rectangle.
+Y: input field and arrow
+buttons
+Allows you to change the Y position of the rectangle.
+You can enter values manually or use the arrow buttons to
+move the rectangle in increments of 0.1 µm.
+Dimensions
+Width: input field and arrow
+buttons
+Allows you to change the width of the rectangle.
+You can enter values manually or use the arrow buttons to
+move the rectangle in increments of 0.1 µm.
+A negative value is also possible.
+Height: input field and
+arrow buttons
+Allows you to change the height of the rectangle.
+You can enter values manually or use the arrow buttons to
+move the rectangle in increments of 0.1 µm.
+A negative value is also possible.
+Prototype
+Reference image
+The reference image shows the assignment of the axes and
+the dimensions.
+The image is not freely rotated (only flips and rotations by
++/-90° are accounted for).
+Angles
+For information refer to Polygon [} 118], Angle section.
+4 User Interface  |  4.5 Control Panel
+112
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+4.5.3.4.9
+Circle
+Fig. 28: Attributes tab > Circle tab
+Section
+Control Element
+Description
+-
+Outline checkbox
+If activated, only the outline of the circle is shown.
+Center
+X: input field and arrow
+buttons
+Allows you to change the X position of the circle's center
+point.
+You can enter values manually or use the arrow buttons to
+move the point in increments of 0.1 µm.
+Y: input field and arrow
+buttons
+Allows you to change the Y position of the circle's center
+point.
+You can enter values manually or use the arrow buttons to
+move the point in increments of 0.1 µm.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+113
+Section
+Control Element
+Description
+Radius
+Radius: input field and arrow
+buttons
+Allows you to change the radius of the circle.
+You can enter values manually or use the arrow buttons to
+change the radius increments of 0.1 µm.
+Start angle: input field and
+arrow buttons
+Allows you to change the starting angle of the circle (only
+relevant for scanning).
+You can enter values manually or use the arrow buttons to
+move the angle in increments of 1°.
+Prototype
+Reference image
+The reference image shows the assignment of the parameters.
+Arc scanning
+Start:
+outside/inside radio buttons
+Selects either the outside or the inside of the shape as starting
+point for the scan.
+Start:
+counter-clockwise/
+clockwise radio button
+Selects either clockwise or counter-clockwise orientation for
+the scan.
+4 User Interface  |  4.5 Control Panel
+114
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+4.5.3.4.10
+Ellipse
+Fig. 29: Attributes tab > Ellipse tab
+Section
+Control Element
+Description
+-
+Outline checkbox
+If activated, only the outline of the ellipse is shown.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+115
+Section
+Control Element
+Description
+Center
+X: input field and arrow
+buttons
+Allows you to change the X position of the ellipse's center
+point.
+You can enter values manually or use the arrow buttons to
+move the point in increments of 0.1 µm.
+Y: input field and arrow
+buttons
+Allows you to change the Y position of the ellipse's center
+point.
+You can enter values manually or use the arrow buttons to
+move the point in increments of 0.1 µm.
+Radii
+a: input field and arrow
+buttons
+Allows you to change radius a of the ellipse.
+This semi-axis determines the width of the non-rotated ellipse.
+You can enter values manually or use the arrow buttons to
+change the radius increments of 0.1 µm.
+b: input field and arrow
+buttons
+Allows you to change radius b of the ellipse.
+This semi-axis determines the height of the ellipse.
+You can enter values manually or use the arrow buttons to
+change the radius increments of 0.1 µm.
+Transformation
+Rotation: input field and
+arrow buttons
+Allows you to change the starting angle of the ellipse.
+You can enter values manually or use the arrow buttons to
+move the angle in increments of 1°.
+Prototype
+Reference image
+The reference image shows the assignment of the parameters.
+Angles
+Mode:
+manual radio button
+This function is not available.
+Mode:
+automatic radio button
+This function is not available.
+Fast: input field and arrow
+buttons
+Allows you to change the angle of the fast scan direction
+along the scan lines.
+Angles are measured against the positive X-axis. Counter-
+clockwise rotation is indicated by positive rotation angles.
+You can enter values manually or use the arrow buttons to
+move the currently loaded image in increments of 1°.
+Slow: left / right
+radiobuttons
+Allows you to change the slow direction of the scan
+perpendicular to the scan lines.
+4 User Interface  |  4.5 Control Panel
+116
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+4.5.3.4.11
+Arc
+Fig. 30: Attributes tab > Arc
+Section
+Control Element
+Description
+-
+Outline checkbox
+If activated, the arc will not be filled, only the contour will be
+scanned as line element.
+Center
+X: input field and arrow
+buttons
+Allows you to change the X position of the arc's center point.
+You can enter values manually or use the arrow buttons to
+move the point in increments of 0.1 µm.
+Y: input field and arrow
+buttons
+Allows you to change the Y position of the arc's center point.
+You can enter values manually or use the arrow buttons to
+move the point in increments of 0.1 µm.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+117
+Section
+Control Element
+Description
+Angles
+1: input field and arrow
+buttons
+Allows you to change angle 1 of the arc's opening.
+You can enter values manually or use the arrow buttons to
+change the radius in increments of 0.1 µm.
+2: input field and arrow
+buttons
+Allows you to change angle 2 of the arc's opening.
+You can enter values manually or use the arrow buttons to
+change the radius in increments of 0.1 µm.
+Radii
+1: input field and arrow
+buttons
+Allows you to change the first radius a of the arc.
+You can enter values manually or use the arrow buttons to
+change the radius in increments of 0.1 µm.
+2: input field and arrow
+buttons
+Allows you to change the second radius a of the arc.
+You can enter values manually or use the arrow buttons to
+change the radius in increments of 0.1 µm.
+Prototype
+Reference image
+The reference image shows the assignment of the parameters.
+Arc scanning
+Start:
+outside/inside radio buttons
+Selects either the outside or the inside of the shape as starting
+point for the scan.
+Start:
+counter-clockwise/
+clockwise radio button
+Selects either clockwise or counter-clockwise orientation for
+the scan.
+4 User Interface  |  4.5 Control Panel
+118
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+4.5.3.4.12
+Polygon
+Fig. 31: Attributes tab > Polygon tab
+Section
+Control Element
+Description
+-
+Outline checkbox
+If activated, only the contour of the polygon will be scanned
+as line element.
+Points list
+This list shows the X and Y coordinates of the polygon's
+starting and end point.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+119
+Section
+Control Element
+Description
+-
+Add button
+Adds a point to the polygon. This button is only active if an
+entry on the list is selected.
+The point will be added after the selected point. It will be
+placed between the selected and the subsequent point of the
+polygons contour.
+The selected point is/the selected points are indicated as solid
+white square in the working area when the Vertex tool is
+activated.
+Remove button
+Removes a point from the polygon. This button is only active
+if an entry on the list is selected. The polygon will disappear if
+less than three points are present.
+User is not allowed to remove the points of a Polygon if the
+total number of points are less than three.
+The selected point is/the selected points are indicated as solid
+white square in the working area when the Vertex tool is
+activated.
+Point position
+X: input field and arrow
+buttons
+Only available if a single point is selected: Allows you to
+change the X position of a point on the polygon.
+You can enter values manually or use the arrow buttons to
+move the polygon in increments of 0.1 µm.
+The selected point is/the selected points are indicated as solid
+white square in the working area when the Vertex tool is
+activated.
+Y: input field and arrow
+buttons
+Only available if a single point is selected: Allows you to
+change the Y position of a point on the polygon.
+You can enter values manually or use the arrow buttons to
+move the polygon in increments of 0.1 µm.
+The selected point is/the selected points are indicated as solid
+white square in the working area when the Vertex tool is
+activated.
+4 User Interface  |  4.5 Control Panel
+120
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+Section
+Control Element
+Description
+Angles
+Mode:
+manual radio button
+If activated, the manual angles settings will be enabled.
+¢
+Fast: input field and arrow buttons
+Allows you to change the angle of the fast scan direction
+along the scan lines.
+Angles are measured against the positive X-axis. Counter-
+clockwise rotation is indicated by positive rotation angles.
+You can enter values manually or use the arrow buttons
+to move the currently loaded image in increments of 1°.
+¢
+Slow: left / right radiobuttons
+Allows you to change the slow direction of the scan
+perpendicular to the scan lines.
+Mode:
+automatic radio button
+If activated, the angles settings will be set to automatic.
+Once you have selected an edge, the angle will be
+automatically computed from the given edge information. The
+angle is selected implicitly rather than explicitly.
+¢
+Edge text field with arrow buttons
+Allows to select the edge which determines the scan
+directions.
+The selected edge indicates the end of the scan, see also
+Tools Toolbar [} 38] Tool: Edge Select.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+121
+4.5.3.4.13
+Trapezoid
+Fig. 32: Attributes tab > Trapezoid tab
+Section
+Control Element
+Description
+-
+Outline checkbox
+If activated, only the contour of the trapezoid is scanned as
+line element.
+4 User Interface  |  4.5 Control Panel
+122
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+Section
+Control Element
+Description
+Position
+X: input field and arrow
+buttons
+Allows you to change the X position of the trapezoid.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Y: input field and arrow
+buttons
+Allows you to change the Y position of the trapezoid.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+-
+Symmetric checkbox
+If activated, you can only create symmetrical trapezoids.
+Asymmetrical trapezoids will automatically change to a
+symmetrical shape if you activate the checkbox later.
+Dimensions
+Width (a):/Width (b): input
+fields and arrow buttons
+Allows you to change width a and b of the trapezoid.
+If the Symmetric checkbox is activated, both widths are linked.
+Otherwise, you can change the widths independently to
+create asymmetrical trapezoids.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Offset (c): input field and
+arrow buttons
+Allows you to change the offset between width a and b.
+Width b will change according to the offset value.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Height (h): input field and
+arrow buttons
+Allows you to change the height of the trapezoid.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Transformation
+Rotation: input field and
+arrow buttons
+Allows you to rotate the trapezoid.
+You can enter values manually or use the arrow buttons to
+rotate the trapezoid in increments of 0.1°.
+Prototype
+Reference image
+The reference image shows the assignment of the axes and
+the dimensions.
+Angles
+For information refer to Polygon [} 118], Angle section.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+123
+4.5.3.4.14
+Parallelogram
+Fig. 33: Attributes tab > Parallelogram tab
+Section
+Control Element
+Description
+-
+Outline checkbox
+If activated, only the contour of the parallelogram is scanned
+as a line element.
+4 User Interface  |  4.5 Control Panel
+124
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+Section
+Control Element
+Description
+Position
+X: input field and arrow
+buttons
+Allows you to change the X position of the parallelogram.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Y: input field and arrow
+buttons
+Allows you to change the Y position of the parallelogram.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Dimensions
+Width (a): input fields and
+arrow buttons
+Allows you to change the width a of the parallelogram.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Offset (c): input field and
+arrow buttons
+Allows you to change the offset c of the parallelogram.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Height (h): input field and
+arrow buttons
+Allows you to change the height h of the parallelogram.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Transformation
+Rotation: input field and
+arrow buttons
+Allows you to rotate the parallelogram. The center of rotation
+is the center of the bounding box.
+You can enter values manually or use the arrow buttons to
+rotate the parallelogram in increments of 0.1°.
+Prototype
+Reference
+The reference shows the assignment of the axes and the
+dimensions.
+Angles
+For information refer to Polygon [} 118], Angle section.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+125
+4.5.3.4.15
+Text
+Fig. 34: Attributes tab >Text
+4 User Interface  |  4.5 Control Panel
+126
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Section
+Control Element
+Description
+-
+Outline checkbox
+If activated, only the outlines of the text will be milled/
+exposed.
+If deactivated, the full letters will be milled/exposed.
+Position
+X: input field and arrow
+buttons
+Allows you to change the X position of the Text.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Y: input field and arrow
+buttons
+Allows you to change the Y position of the Text.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Dimensions
+Height: input field and
+arrow buttons
+Allows you to change the text height.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Font
+Font: drop-down list
+You can select the desired font.
+Text
+Text field
+Shows the currently entered text. You can use this text field to
+enter additional text or to edit or remove already entered
+words.
+To be able to edit the text, click into the text field once.
+Transformation
+Rotation: input field and
+arrow buttons
+Allows you to rotate the text around its center. You can enter
+values manually or use the arrow buttons to move the
+currently loaded image in increments of 0.1°.
+Angles
+For information refer to Ellipse [} 114], Angle section.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+127
+4.5.3.4.16
+Image
+Fig. 35: Attributes tab >Image
+4 User Interface  |  4.5 Control Panel
+128
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Section
+Control Element
+Description
+-
+File: readout
+Displays the file name of the currently loaded image file.
+Save absolute filename
+checkbox
+If activated, the absolute file name will be saved. This makes it
+harder to copy layouts that include files to other machines.
+Position
+X: input field and arrow
+buttons
+Allows you to change the X position of the image.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Y: input field and arrow
+buttons
+Allows you to change the Y position of the image.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Dimensions
+Width: input field and arrow
+buttons
+Allows you to change the width of the image.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Height: input field and
+arrow buttons
+Allows you to change the height of the image.
+You can enter values manually or use the arrow buttons to
+change the value in increments of 0.1 µm.
+Preserve aspect ratio:
+checkbox
+If activated, the aspect ratio of the image will be preserved if
+either the width or the height are changed.
+Transformation
+Rotation: input field and
+arrow buttons
+Allows you to rotate the image around its origin. You can
+enter values manually or use the arrow buttons to move the
+currently loaded image in increments of 0.1°.
+Color
+Preserve colors checkbox
+If activated, the original colors of the image will be displayed.
+Inverse checkbox
+If activated, the image colors will be inverted.
+Spacing
+X-direction/y-direction
+readout
+Informs you about the distance of the scan pixel, which is
+given by the resolution of the image and its scaling.
+Image
+Mode: bi-directional / uni-
+directional radiobutton
+Allows to set if the subsequent lines are scanned in the same
+direction or in the meander style.
+Direction: horizontal /
+vertical radiobutton
+Allows to set the orientation of the subsequent lines.
+Orientation radiobuttons
+Allows you to set the start point of the scan.
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+129
+Section
+Control Element
+Description
+Fragmentation
+Mode: pixel-by-pixel / slice-
+by-slice radiobutton
+Allows you to set the scan style for the image. In pixel-by-pixel
+style the full dose is applied to the individual pixels in one
+iteration.
+In slice-by-slice style there will be several iterations and for
+each of them it is decided if a certain pixel will be exposed so
+that finally the full dose is applied.
+Sub-slices text field with
+arrow buttons
+Only available if slice-by-slice is selected.
+Determines the number of sub-iterations.
+4.5.4 Settings (Sample Mode)
+Section
+Control Element
+Description
+-
+Selection: readout
+Shows the selected number of elements or layers.
+The Settings tab contains the following tabs:
+¢
+Recipe [} 66]
+¢
+Drift Correction [} 87]
+4 User Interface  |  4.5 Control Panel
+130
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+4.5.5 Move
+Section
+Control Element
+Description
+-
+Selection: readout
+Live Mode: Displays the number of currently selected
+geometrical elements.
+Sample Mode: Shows the number of currently selected
+positions.
+4 User Interface  |  4.5 Control Panel
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+131
+Section
+Control Element
+Description
+Shift tab
+Absolute radio button
+Allows you to move the element position in absolute values.
+Relative radio button
+Allows you to move the element/layer relative to the current
+position.
+X:/ Y: input field and arrow
+buttons
+Allows you to change the X and Y position of the currently
+selected geometrical element(s)/ position (s). You can enter
+values manually or use the arrow buttons to change the
+values in increments of 0.1 µm.
+Rotate tab
+Angle: input field and arrow
+buttons
+Allows you to rotate the currently selected geometrical
+element(s)/ position (s) around its/their origin. Angles are
+measured against the positive X-axis. Counter-clockwise
+rotation is indicated by positive rotation angles. You can enter
+values manually or use the arrow buttons to change the
+values in increments of 0.1°.
+Scale tab: Live
+Mode only
+Units: radio buttons
+Allows you to switch between the units µm and percent.
+X:/ Y: input field and arrow
+buttons
+Allows you to change the X and Y dimensions of the currently
+selected geometrical element(s). You can enter values
+manually or use the arrow buttons to change the values in
+increments of 0.1 µm.
+Proportional checkbox
+If ticked, any change of one dimension will automatically
+affect the other dimension in order to maintain the original
+proportions.
+-
+Apply button
+Applies the movement, rotation or scaling according to the
+entered values.
+4 User Interface  |  4.5 Control Panel
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+4.5.6 Clipping
+4 User Interface  |  4.5 Control Panel
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+133
+Section
+Control Element
+Description
+-
+Selection readout
+Shows the selected amount of elements.
+Clipping
+Operation
+Intersection radio button
+Only the intersecting areas of two or more elements remain
+when you click Apply.
+Difference radio button
+Activates the Set Minuend button, the Set Subtrahend and
+the Clear button.
+Union radio button
+Merges two or more elements when you click Apply.
+XOR radio button
+Only the not-intersecting areas of two or more elements
+remain when you click Apply.
+-
+Set Difference Base button
+This button is only active if the Difference radio button is
+activated.
+Clear button
+Cancels the current selection.
+Apply button
+Applies the selected clipping method.
+4 User Interface  |  4.5 Control Panel
+134
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+4.5.7 Offset
+4.5.8 Image Capture
+4 User Interface  |  4.5 Control Panel
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+135
+Section
+Control Element
+Description
+Scanning Area
+Resolution: drop-down
+menu
+Allows you to select the number of image pixels per line.
+Aspect: drop-down menu
+Allows you to select the aspect ratio of the image. The format
+of the image in the Working Area changes according to the
+selected value when grabbing an image.
+It also displays the last user defined aspect ratio in the list.
+Size: radio button
+Enables the Width: and Height: input fields and arrow
+buttons. With these control elements, you can set the width
+and height of the image. The lock icon allows changing the
+parameters independently or locked to the given ratio.
+When the lock icon is unlocked, you can set user defined
+aspect ratio. When it is lock again, it will be added to the
+Aspect drop-down list.
+You can enter values manually or use the arrow buttons to
+change the width in increments of 0.1 µm. The height can be
+changed in increments of 1.0 µm.
+Magnification: radio button
+Enables the Magnification: input fields and arrow buttons.
+With these control elements, you can size at the image by
+means of the magnification applied to the microscope. The
+aspect ratio corresponds to the settings made using the
+Aspect: and Size: control elements.
+4 User Interface  |  4.5 Control Panel
+136
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+Section
+Control Element
+Description
+Acquisition
+Dwell time: drop-down
+menu
+Allows you to select from various pre-defined dwell time
+values in µs.
+Area dose: readout
+Displays the current area dose in µC/cm².
+Cycle time: readout
+Displays the current cycle time in seconds.
+Averaging: drop-down
+menu
+Allows you to select the averaging:
+¢
+None: no averaging is applied.
+¢
+Line:
+Each line to be scanned a number of times before the
+scan moves on. The average line signal is stored and
+displayed.
+¢
+Frame:
+Averaging of two or more consecutive frames: Frames
+are scanned continuously and the image is formed as the
+average of a number of successive frames.
+Avg. Num.: slider, input field
+and arrow buttons
+These control elements are only active if you have selected
+line or frame averaging.
+Depending on the selected averaging method, you can set the
+number of times a line or frame is to be averaged for
+displaying the image.
+Scan Speed on panel is:
+drop-down menu
+Allows you to assign the Scan Speed + and Scan Speed -
+buttons on the hardware control panel to either dwell time or
+to the averaging number.
+Probe: drop-down menu
+Allows you to set the probe for imaging.
+4 User Interface  |  4.5 Control Panel
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+137
+Section
+Control Element
+Description
+-
+Stop button
+Immediately stops the scan. This equals Freeze on =
+Command in SmartSEM.
+Capture button
+Captures an image: Continues scanning until the end of the
+frame is reached and then stops it. This equals Freeze on =
+End Frame in SmartSEM.
+¢
+Capture (no Frame averaging): Grabs one frame.
+Freeze on end of frame in SmartSEM.
+¢
+Capture (Frame averaging): Grabs the set of average
+frames.
+Frame integration in SmartSEM.
+¢
+Capture during cycling: Finishes the set of averaged
+frames and stops.
+Freeze on end of frame in SmartSEM.
+Cycle button
+Activates a continous scan according to the setup averaging
+made..
+1, 2, 3 buttons
+¢
+Left click: Allows you to call up three pre-defined image
+capture settings.
+¢
+Right-click: Allows you to save current image capture
+settings as shortcuts.
+4 User Interface  |  4.5 Control Panel
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+4.5.9 Stage
+4 User Interface  |  4.5 Control Panel
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+139
+Section
+Control Element
+Description
+-
+Stage status: readout
+Shows if the stage is currently moving or not.
+System:
+Stage/Sample radio button
+Switches between coordinate systems. It uses either the
+microscope stage system or the virtual sample system.
+Position
+Stage at readout
+Shows the current stage position in the selected coordinate
+system.
+To / Delta radio buttons
+Switches between absolute coordinates and delta values. You
+can apply delta values based on the current stage position.
+Checkboxes, input fields and
+arrow buttons
+If you deactivate a checkbox, this parameter will be ignored
+when clicking Go.
+You can enter values manually or use the arrow buttons to
+change the values. The increments vary depending on the
+selected parameter.
+pick button
+only available when the sample coordinate system is selected.
+Allows you to pick an absolute coordinate value by clicking on
+the image in Live Mode or on the virtual sample in Sample
+Mode.
+Go button
+Moves the stage according to the selected parameters.
+Backlash checkbox
+Activates the backlash function.
+Backlash is employed to take up the necessary mechanical
+play in the stage motors, so that any absolute stage position is
+always approached from the same direction, improving the
+repeatability of motorized stage movement.
+Focus tracking checkbox
+STOP button
+Stops the moving stage
+4 User Interface  |  4.5 Control Panel
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+4.5.10 Exposure
+4 User Interface  |  4.5 Control Panel
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+141
+Section
+Control Element
+Description
+Exposure
+Time estimation:
+readout
+Displays how long it will approximately take to exposure the selected
+element (layout in Live Mode or process in Sample Mode) (only net
+time = sum of all pixel dwell times)..
+Continuous checkbox
+If activated, you can set the number of iterations for the exposure
+process.
+During exposure, the number of iterations is incremented right next
+to the Continous checkbox.
+Iterations text field with arrow buttons:
+¢
+0 = endless
+¢
+1 = once
+¢
+2 = twice
+¢
+and so on.
+Progress is indicated during exposure in the Progress bar.
+Nudge checkbox
+If activated, the Nudge dialog opens when starting the exposure.
+This dialog allows you to manipulate elements during exposure. This
+function is not always available. If it is unavailable, the checkbox is
+greyed out and the reason is displayed next to the checkbox.
+Status: readout
+Displays the current status of the exposure. It showsthe status of the
+exposure that is currently running and if it has finished successfully
+or erroneously.
+System: readout
+For example, this readout shows the currently used gas.
+Progress: bar
+Displays the current progress of a running exposure process.
+Error: readout
+If the exposure process is in an error state, this readout shows the
+category of the error.
+Close button
+Closes the Exposure tab.
+Switching between Live Mode and Sample Mode is not possible
+until the dialog is closed.
+Start button
+Starts an exposure process with the currently selected parameters.
+Stop button
+Turns to stop during exposure.
+Pause button
+Pauses a running exposure process.
+Continue button
+Turns to continue exposure.
+Start DC button
+Starts a drift correction during the milling process. Only available if
+the drift correction has been configured and an exposure is currently
+active.
+Capture button
+Grabs/refreshes background image.
+4 User Interface  |  4.5 Control Panel
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+Section
+Control Element
+Description
+Exposure
+Properties
+On End Mill: drop-
+down menu
+Allows you to select an action automatically carried out after
+exposure is finished.
+On Start Mill: drop-
+menu
+Allows you to select if SEM imaging is stated during exposure.
+End Msg checkbox
+If unticked, no message appears after an exposure has finished. This
+accelerates the handling necessary for automatic exposure
+processes.
+Move
+(only displayed
+if Nudge is
+checked)
+Shift Arrow buttons
+Allow to shift the momentarily exposed elements.
+Shift Increment text
+fields with arrow
+buttons
+Allows to set the increment for shifting.
+Rotation Arrow
+buttons
+Allow to rotate the momentarily exposed elements.
+Rotation Increment
+text fields with arrow
+buttons
+Allows to set the increment for rotation.
+Shift and Rotation
+readout
+Informs the user about the accumulated shift and rotation.
+Deepen
+(only displayed
+if Nudge is
+checked)
++ / - buttons
+Allows to set the increment for changing the depth.
+Depth Increment text
+fields with arrow
+buttons
+Allows to set the increment for depth changes.
+Change readout
+Informs the user about the accumulated depth changes.
+4 User Interface  |  4.6 Status Bar
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+143
+User Interface  | 
+4.6 Status Bar
+Section
+Tool Tip Text
+Description
+x= and y=
+readouts
+-
+If the magnetic grid is disabled, the readouts show the current
+cursor position.
+If the magnetic grid is enabled, the readouts show the
+rounded position that will be used for operations.
+View grid
+Shows/Hides the orientation grid.
+The grid can be customized by means of the Extra >
+Preferences... menu item.
+Snap to grid
+Activates/Deactivates the magnetic orientation grid.
+The grid can be customized by means of the Extra >
+Preferences... menu item.
+View layout
+Shows/hides the layout.
+Color by exposure parameter
+status
+Activates/Deactivates the color indication of the current
+exposure parameter status.
+If activated, geometric elements can have three different
+colors:
+¢
+Green indicates that an element is ready to be exposed.
+¢
+Yellow indicates that the exposure parameters are
+undefined: neither element nor layer nor position
+parameters are defined.
+¢
+Red indicates that the parameters are erroneous for the
+current device. They may well be complete and also
+correct but, e.g., they may result in dwell times that are
+unsupported by the microscope.
+If deactivated, the layer's color is used.
+Color by z-extent
+Fit image to window
+Centers and maximizes the current image view to the image
+view area.
+Select zoom level
+Defines the zoom factor in the Working Area.
+4 User Interface  |  4.6 Status Bar
+144
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+Section
+Tool Tip Text
+Description
+sample-stage adjustment
+Opens a submenu from which you can start the SmartFIB:
+Sample Adjustment dialog.
+For details, refer to Performing a Sample Adjustment.
+5
+Working with the Software
+5. Working with the Software
+146
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+5 Working with the Software  |  5.1 General Assumptions
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+147
+5 Working with the Software
+Working with the Software  | 
+5.1 General Assumptions
+There are some prerequisites that have to be fulfilled when working with SmartFIB.
+TIP
+To make it easier to fulfill the prerequisites in SmartSEM, refer to the Software
+Manual SmartSEM XB for details.
+¢
+FIB and SEM have to be ready for use
+¢
+FIB gun is on (no error messages)
+¢
+All FIB probe currents to be used have to be defined and aligned (refer to the
+Software Manual SmartSEM XB, "Defining user-specific FIB probe currents")
+¢
+GIS needs to be ready for use (Refer to the GIS Instruction Manual for
+instructions on outgassing, initializing etc.)
+¢
+It is recommended to move the specimen to the coincidence point. When
+working with the GIS, this is mandatory.
+¢
+It is recommended to adjust the eucentricity, especially for automated
+processes.
+Working with the Software  | 
+5.2 General Operation
+In the following two main workflows are illustrated:
+¢
+Performing a Basic Exposure/Milling process [} 148] describes a basic
+procedure that uses Live Mode only. The other procedures are based on this
+section.
+¢
+Performing a Multi-Site Exposure/Milling Workflow [} 153] describes how to
+work with objects that have transferred from Live Mode to Sample Mode.
+5 Working with the Software  |  5.2 General Operation
+148
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+5.2.1 Performing a Basic Exposure/Milling process
+The following section describes a basic exposure/milling process using Live Mode
+only.
+The procedure contains the following steps:
+¢
+Acquiring an Image [} 148]
+¢
+Creating Shapes/Elements to be Exposed/Milled [} 149]
+¢
+Setting the Exposure/Milling Parameters [} 150]
+¢
+Starting the Exposure/Milling Process [} 152]
+5.2.1.1
+Acquiring an Image
+First step of a basic exposure/milling workflow is to acquire a FIB image. This image
+serves as an orientation for placing geometric elements to be exposed/milled at the
+right position.
+You can acquire a FIB image only in Live Mode.
+Procedure
+1
+In SmartSEM, select a proper detector (SESI or InLens).
+2
+Roughly approach the desired position.
+3
+Go to the SmartFIB user interface.
+4
+On the Standard Toolbar, click the Live Mode icon.
+5
+Select the Image Capture tab.
+6
+To start the scan, click Cycle.
+An image appears in the Working Area.
+7
+To optimize the image, adjust the scanning parameters and use a reduced
+raster if necessary.
+5 Working with the Software  |  5.2 General Operation
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+149
+8
+If the image quality is sufficient to position geometric elements with adequate
+accuracy, click Capture.
+5.2.1.2
+Creating Shapes/Elements to be Exposed/Milled
+Once you have acquired a FIB/SEM image in SmartFIB, you can start to create
+elements / shapes by using the drawing tools on the Tools Toolbar.
+Prerequisite
+¢
+You have acquired a FIB/SEM image
+Procedure
+1
+On the Tools Toolbar, select a drawing tool.
+The cursor changes to match the selected shape.
+2
+Move to the desired position.
+Click and hold down the left mouse button while moving the mouse.
+A preview of the selected shape appears.
+3
+Release the mouse button.
+This will create the desired shape (some elements, such as trapezoids, require
+additional steps). The Attributes tab opens in the Control Panel. This tab
+shows element-specific parameters.
+You can change these settings to adjust the properties of the geometric
+element.
+4
+Once you have finished drawing, switch back to the Select tool by clicking the
+ icon.
+This allows you to move, erase change, rotate elements
+5 Working with the Software  |  5.2 General Operation
+150
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+TIP
+You can resize and rotate already drawn shapes/elements.
+¢ To toggle between resizing and rotating, click once into the element/shape. 
+The marks around the element/shape change accordingly from 
+ for
+resizing to 
+ for rotating and vice versa.
+¢ Move the cursor above one of the resize/rotate marks. The cursor will
+change accordingly. Then, click and drag with the mouse.
+5.2.1.3
+Setting the Exposure/Milling Parameters
+Now that you have drawn geometric elements on the background image, you have
+to assign scanning and exposure parameters to the created elements.
+In Live Mode, you can choose between setting parameters for the whole layer and
+exclusive parameters for single geometric elements and for multi-selections. If an
+element defines parameters other than none, then the layer parameters are
+overwritten. To be able to understand how these settings interact, refer to section
+Hierarchy of Exposure Parameter Assignment [} 31].
+Prerequisite
+¢
+You have created a background image
+¢
+You have drawn some geometric elements
+Procedure
+1
+Select an element, a group of elements or a layer.
+2
+On the Control Panel, select the Attributes tab > Recipe.
+3
+Choose a recipe from the Material drop-down list.
+For more information refer to Recipe [} 66].
+4
+You can select a different probe from the Probe drop-down list.
+5
+You can set depth by the input field.
+6
+Click Preview.
+The Exposure Preview window opens. The preview shows if there are any
+problems with the chosen settings. This makes it easier to find suitable
+exposure settings and to learn how the various parameters interact. Once
+there are no entries with red text left, you can be sure that the settings will
+result in a working exposure.
+5 Working with the Software  |  5.2 General Operation
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+151
+5.2.1.4
+Using a Drift Correction
+Drift correction is useful over long milling periods so that the effects of stage drift
+or thermal effects do not cause any shift of the milling pattern. Unwanted sample
+damage can be avoided hereby.
+The drift correction settings determine how and how often drift correction is used.
+Procedure
+1
+On the Control Panel, select the Attributes tab > Drift Correction.
+2
+Click Add.
+A moveable and resizeable template appears.
+3
+Set the desired size and position.
+4
+Adjust the desired Mark Preparation settings.
+5
+Make sure a valid recipe file is selected for the exposure of the drift mark.
+6
+Click Mill Mark.
+his mills a mark on the specimen surface.
+7
+To ensure a good signal to noise ratio in the FIB image, adjust the Image
+Acquisition settings, e.g. Dwell Time = 1.60 µs.
+8
+If your milling process involves tilting (e.g. lamella preparation) make sure Auto
+BC and Full Frame Search are checked.
+9
+To obtain a reference image, click Acquire Reference.
+10 Set a suitable time for the correction interval.
+During the milling process an image will be taken after this time interval and
+compared to the reference image. Based on the differences, the drift
+correction will be applied.
+5 Working with the Software  |  5.2 General Operation
+152
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+5.2.1.5
+Starting the Exposure/Milling Process
+You have almost reached your goal: you have created a background, drawn
+geometric elements and assigned exposure parameters.
+Everything that remains to be done is to start the exposure.
+Prerequisite
+¢
+You have created a background image
+¢
+You have drawn some geometric elements
+¢
+You have set the exposure parameters
+Procedure
+1
+On the Standard Toolbar, click the Expose icon.
+On the Control Panel, the Exposure dialog opens.
+2
+Change the desired settings. For a detailed description of each parameter, refer
+to the section Exposure [} 140].
+3
+Select an entry from the On End Mill: drop-down list.
+This enables you to be able to see the result of the exposure process as soon
+as it is finished, or to trigger an operation of the microscope.
+4
+To start the exposure, click Start.
+The process starts and various readouts show the current status of the
+exposure process.
+To make sure that you can observe the exposure/milling process with the SEM,
+the default selection on theOn Start Mill drop-down list is SEM.
+As soon as the exposure process has finished, SmartFIB will switch to the
+defined On End Mill: setting.
+The default setting is SEM. The SEM image is scanning in SmartSEM when the
+exposure/milling process is finished in SmartFIB.
+This concludes the most basic workflow for working with SmartFIB. You can
+now proceed to more complex tasks.
+TIP
+If you experience any issues with blurry edges of exposed elements, you can try
+to select a different scanning setting in the Scanning section of the Recipe tab.
+5 Working with the Software  |  5.2 General Operation
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+153
+Depending on the selected geometric elements and also their orientation, you have
+to consider an appropriate scanning strategy.
+The parameters Delay and Cycle Delay can also be helpful.
+TIP
+The nudge control function allows you to shift and rotate elements during the
+exposure/milling process. You don't have to stop the whole process to do minor
+corrections. This can be especially useful while preparing a TEM lamella.
+¢ To use nudge control, activate the Nudge checkbox in the Exposure dialog
+before you start the exposure.
+5.2.2 Performing a Multi-Site Exposure/Milling Workflow
+Requires the licence AUTOPREP.
+Compared to Performing a Basic Exposure/Milling process [} 148],which only uses
+Live Mode, the following example shows a very simple multi-site exposure/milling
+workflow using both Live Mode and Sample Mode.
+You can expand this principle to more challenging tasks.
+Procedure
+1
+In Live Mode, draw some geometric elements as described in Creating
+Shapes/Elements to be Exposed/Milled [} 149].
+2
+Apply a drift correction as described in Using a Drift Correction [} 151].
+3
+Click the Transfer to sample mode icon. 
+The positions are not being processed but added to the Process list called
+Transferred.
+4
+To switch to Sample Mode, in the Tools Toolbar, click the Sample Mode
+icon 
+.
+5
+In the Tools Toolbar, from the Process List drop-down list, select the desired
+list (e.g. Transferred).
+6
+In the Tools Toolbar, press the Expose icon.
+7
+Set the desired exposure parameters.
+5 Working with the Software  |  5.3 Working in Live Mode
+154
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Working with the Software  | 
+5.3 Working in Live Mode
+Live Mode 
+¢
+Limited to one scanning area
+¢
+The background image obtained with the charged particle beam serves as
+orientation
+Mainly used for
+¢
+Circuit editing or creating recipes
+¢
+Target preparation at a Point Of Interest (POI) / Region Of Interest (ROI) (e.g.
+TEM-lamella preparation at a specific point of the specimen)
+¢
+Analysis of one specific point of the specimen
+5.3.1 Acquiring an Image
+First step of a basic exposure/milling workflow is to acquire a FIB image. This image
+serves as an orientation for placing geometric elements to be exposed/milled at the
+right position.
+You can acquire a FIB image only in Live Mode.
+Procedure
+1
+In SmartSEM, select a proper detector (SESI or InLens).
+2
+Roughly approach the desired position.
+3
+Go to the SmartFIB user interface.
+4
+On the Standard Toolbar, click the Live Mode icon.
+5
+Select the Image Capture tab.
+5 Working with the Software  |  5.3 Working in Live Mode
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+155
+6
+To start the scan, click Cycle.
+An image appears in the Working Area.
+7
+To optimize the image, adjust the scanning parameters and use a reduced
+raster if necessary.
+8
+If the image quality is sufficient to position geometric elements with adequate
+accuracy, click Capture.
+5.3.2 Creating Shapes/Elements to be Exposed/Milled
+Once you have acquired a FIB image in SmartFIB, you can start to create elements /
+shapes by using the drawing tools on the Tools Toolbar.
+Prerequisite
+¢
+You have acquired a FIB image
+Procedure
+1
+On the Tools Toolbar, select a drawing tool.
+The cursor changes to match the selected shape.
+2
+Move to the desired position.
+Click and hold down the left mouse button while moving the mouse.
+A preview of the selected shape appears.
+3
+Release the mouse button.
+This will create the desired shape (some elements, such as trapezoids, require
+additional steps).
+The Attributes tab opens in the Control Panel. This tab shows element-
+specific parameters.
+You can change these settings to adjust the properties of the geometric
+element.
+5 Working with the Software  |  5.3 Working in Live Mode
+156
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+4
+Once you have finished drawing, switch back to the Select tool by clicking the
+ icon.
+This allows you to move, erase change, rotate elements
+TIP
+You can resize and rotate already drawn shapes/elements.
+¢ To toggle between resizing and rotating, click once into the element/shape. 
+The marks around the element/shape change accordingly from 
+ for
+resizing to 
+ for rotating and vice versa.
+¢ Move the cursor above one of the resize/rotate marks. The cursor will
+change accordingly. Then, click and drag with the mouse.
+5.3.3 Importing Layouts
+To import a layout:
+Procedure
+1
+In the Control Panel, select the Import tab.
+2
+Use the Volume drop-down list and the Folder list to navigate to a folder that
+contains an *.ely file.
+3
+Choose an *.ely file.
+4
+Open the tree structure to the layer.
+5
+Select a layer entry.
+6
+To import, click replace or use drag&drop.
+You have successfully imported a layout.
+Note that ASP elements cannot be imported in SEM mode.
+5.3.4 Saving Images and Layouts
+To save images and layouts:
+Procedure
+1
+Select File > Save As.
+2
+Confirm the selected file name or enter a new one.
+The specified file extension defines what kind of data (image or layout) will be
+saved.
+When saving layouts, choose the file type *.ely or explicitly add the filename
+extension.
+To save an image chosse the corresponding file extension.
+You have successfully saved an image or a layout.
+5 Working with the Software  |  5.3 Working in Live Mode
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+157
+5.3.5 Using the Edge Tool
+Procedure
+1
+On the Tools Toolbar, click the Edge Select icon.
+2
+Move the mouse over the edge that you want to mark.
+If close enough, the vertices defining the respective edge will be highlighted.
+3
+Left-click to mark/unmark the edge.
+If marked, the edge will be highlighted in blue (black in Designer).
+4
+On the Control Panel, select the Attributes tab.
+5
+Select the Scanning tab.
+6
+The scanning angles will be computed automatically such that scanning
+terminates at the marked edge.
+If you select a different edge, you will notice that the scanning angles change
+accordingly.
+7
+To display the scan direction, in the Control Panel, select the Attributes tab.
+8
+Select the tab of the respective element type, for example Rectangle and go
+the the Angles section..
+TIP
+If the Scanning tab disappears while changing the edge,
+¢ Mark edges by clicking the edge with the mouse cursor being inside the
+polygon as otherwise the click may be interpreted as "discard selection" or
+"select layer" (which is the reason for the Scanning tab's disappearance).
+5 Working with the Software  |  5.3 Working in Live Mode
+158
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+TIP
+Edges can also be marked via the edge spinbutton.
+¢ Select manual scan angle mode or unmark the edge to explicitly define scan
+angles.
+5.3.6 Using the Image Tool
+Procedure
+1
+On the Tools Toolbar, click the Image icon.
+2
+Move cursor to insert position and click with the left mouse button.
+The Designer: Load image file dialog opens.
+3
+Select the desired file and click Open.
+The image will be inserted and its origin marked. It can be moved, scaled, and
+rotated like any other geometrical element. The initial pixel spacing is assumed
+to be 0.1 µm.
+4
+Select the Attributes tab.
+5
+Go to the Recipe tab.
+6
+From the Material: drop-down list, select Exclusive.
+7
+From the Purpose drop-down list, select a purpose.
+8
+From the Probe drop-down list, select a probe.
+9
+Activate the Exclusive radio button.
+10 In the Details section, set the Dose: value.
+11 Select the Image tab.
+12 Configure the image and scanning settings.
+13 To start the exposure, click the Exposure icon on the Standard Toolbar icon.
+5.3.7 Using the Select-by-ID Feature
+Elements defining patterning structures often lie on top of each other. Some
+elements may be obscured and cannot be picked. Therefore, SmartFIB offers the
+possibility to select elements by ID.
+Procedure
+1
+On the Control Panel, select the Attributes tab.
+2
+To step through the elements of a layer, click the arrow buttons 
+ or
+enter a value in the In-Layer Id: field.
+The attributes of each drawn element will be displayed.
+5 Working with the Software  |  5.4 Working in Sample Mode
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+159
+5.3.8 Transferring Layouts to Sample Mode
+Requires the licence AUTOPREP.
+One of the key operations in SmartFIB is to transfer layouts from Live Mode to
+Sample Mode. This allows you to arrange scanning areas and to perform other
+tasks that are only available in Sample Mode.
+Prerequisite
+¢
+You have drawn some geometric elements
+¢
+Live Mode is active
+Procedure
+1
+On the Standard Toolbar, click the Tranfer to Sample Mode 
+icon.
+The transferred positions and dwell times are indicated in the Standard Toolbar
+next to the Tranfer to Sample Mode icon.
+2
+Verify that the geometric elements have successfully been transferred to
+Sample Mode: You can find the transferred structure layer in the Process List
+tab > Transferred.
+3
+To start the exposure of the transferred layouts, switch to sample mode 
+.
+Working with the Software  | 
+5.4 Working in Sample Mode
+Sample Mode 
+¢
+Allows you to process multiple scanning areas e.g. of different size and to
+position them on the specimen
+¢
+The focus is on the layout-oriented approach
+Mainly used for
+¢
+Recurring/automated workflows
+¢
+Combination of different structuring processes: If the specimen has been
+modified before, there is also information given (e.g. Lithography)
+¢
+CAD layout navigation
+¢
+Documentation of processes and specimens (which steps were carried out?
+Repeatability)
+Simulation of complex processes also possible in offline mode
+5 Working with the Software  |  5.4 Working in Sample Mode
+160
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+5.4.1 Performing a Sample Adjustment
+After loading a specimen into the specimen chamber, the absolute position and the
+angle between sample coordinate system and stage system are defined.
+The adjustment procedure makes it possible for the program to calculate the
+coordinate transformation from the stage system to the sample system.
+The Sample Adjustment dialog provides a comfortable way to acquire the real
+adjustment. After this procedure, you can work with sample coordinates and you
+will not have to mind any translation problems, for example when moving the
+stage.
+If you do not apply any sample adjustment, the first writing position will be
+connected with the current stage position, the angle will be implicitly set to 0.00°.
+Procedure
+1
+Focus a point (A) at the bottom edge of the specimen.
+2
+On the Menu Bar, select Sample > Adjustment... .
+3
+Click 
+(south) and insert the correct Y value (e.g. 0.00) in the Y: input field.
+4
+Click Add.
+The point is added to the Positions list. All entries in this list are used for the
+calculation.
+5
+Proceed the same way with another point (B) at the bottom edge of the
+specimen.
+Now the system is able to calculate the stage angle correction. The result is
+displayed in the list at the bottom of the Sample Adjustment dialog.
+5 Working with the Software  |  5.4 Working in Sample Mode
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+161
+6
+Choose a point (C) on a neighbouring edge and click 
+(west). Insert the
+correct X value (e.g. 0.00) in the X: input field.
+7
+Click Add.
+Now, the system can calculate absolute positions. The Sample-stage system:
+readout changes from 
+ not connected to 
+ connected.
+For multi-site processes with different stage rotation or stage tilt the
+adjustment is always in an indifferent state indicated by 
+ indifferent.
+This was just a simple example to show how the Sample Adjustment dialog is
+working. There are a lot of variations and the Sample Adjustment dialog is aimed
+at attaining as much information as possible of your chosen set of adjustment
+points and avoiding overdetermination.
+5.4.2 Using the Process List
+SmartFIB offers a process list. This list helps you to keep track of any steps you
+made during your work with SmartFIB. This allows you to backtrack your steps
+easily and to increase repeatability.
+TIP
+To be able to use the full functionality of the process list, the licence AUTOPREP
+is required.
+It allows you to transfer shapes/elements to Sample Mode and to return to
+previously processed steps and positions.
+TIP
+You can start the exposure of the created process list without switching to
+sample mode.
+¢ Therefore just open the Process List tab, select Transferred and click
+Expose.
+TIP
+You can add different layouts at completely different stage positions to the
+Process List. While this list is is executed SmartFIB will move the stage to the
+according position.
+¢
+5 Working with the Software  |  5.5 Task-Oriented Workflows
+162
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Prerequisite
+¢
+You have already created some shapes as described in Creating Shapes/
+Elements to be Exposed/Milled [} 149]
+Procedure
+u
+On the Control Panel, select the Process List tab.
+* Prozessliste: Alle Positionen und Parameter werden gespeichert. Ohne Drift-
+Korrektur. Über die Prozessliste im Live Mode kann man die Positionen nicht
+anfahren. Das geht aber im Sample Mode * Prozessliste auch in Live Mode
+verfügbar. * Prozessliste verwenden. Man kann einzelne Schritte raussuchen und
+durch Go to die Position erneut anfahren. * Nur n Sample Mode: Prozessliste
+nochmal grafisch dargestellt: Positionen die vorher im Live Mode angefahren
+wurden und bei denen mal Exposure gedrückt wurde. * Man kann einzelne
+Structure Layer anwählen und mit der Maus auf der Probe verschieben. * Beim
+Klick auf Goto wird die Position angefahren. * Screenshot * Normalerweise
+verschiebt man die Layer nicht. Hier nur als Beispiel für die verschiedenen Structure
+Layer. * Wenn man mehr Prozesse machen möchte, ohne diese zu starten, geht
+man in den Live Mode und
+Working with the Software  | 
+5.5 Task-Oriented Workflows
+5.5.1 Creating a Simple Cross Section
+Prerequisite
+¢
+Electron beam has been switched on
+¢
+Ion beam has been switched on
+¢
+Specimen has been moved to the coincidence point, tilted to 54°
+¢
+FIB probe currents have been adjusted
+¢
+Settings in SmartSEM: FIB mode active, 30 kV FIB, 5 kV SEM, WD at the
+coincidence point
+¢
+The area of interest has been selected
+Difference to Cross Section:
+¢
+Deposition is not possible.
+¢
+Just one milling step.
+¢
+Automatic proximity.
+Procedure
+1
+Switch to Live mode and capture an image, see Acquiring an Image [} 154].
+2
+On the Tools Toolbar, click the Simple Cross section 
+ icon.
+3
+Move the cursor to the intended location of the cross section to be prepared.
+5 Working with the Software  |  5.5 Task-Oriented Workflows
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+163
+4
+To create a line, click and drag with the mouse. This defines the width and
+orientation of the cross section.
+A preview of the cross section appears.
+5
+Select the Attributes tab > Simple Cross Section tab.
+6
+Change geometry parameters if you want.
+7
+Define Milling parameters.
+1
+Go to the Milling Steps section.
+2
+Select a recipe from the Material: drop-down list.
+3
+Select the FIB Probe for the different milling steps.
+4
+Adjust the other parameters as required.
+8
+On the Standard Toolbar, click the Exposure icon.
+The Exposure dialog opens.
+The estimated exposure time will be computed based on beam current.
+9
+Click Start.
+Exposed elements will be shown normally. Elements awaiting exposure are
+shown stippled. The end of exposure is indicated by a pop-up message.
+10 To check the milling, change between FIB mode and SEM mode in SmartSEM
+at specimen tilt 0°.
+5 Working with the Software  |  5.5 Task-Oriented Workflows
+164
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+5.5.2 Creating a Cross Section
+Prerequisite
+¢
+Electron beam has been switched on
+¢
+Ion beam has been switched on
+¢
+Specimen has been moved to the coincidence point, tilted to 54°
+¢
+Tilt eucentricity has been adjusted
+¢
+Platinum precursor has been outgassed
+¢
+FIB probe currents have been adjusted
+¢
+Settings in SmartSEM: FIB mode active, 30 kV FIB, 5 kV SEM, WD at the
+coincidence point
+¢
+The area of interest has been selected
+Procedure
+1
+Switch to Live mode and capture an image, see Acquiring an Image [} 154].
+2
+On the Tools Toolbar, click the Cross section icon.
+3
+Move the cursor to the intended location of the cross section to be prepared.
+4
+To create a line, click and drag with the mouse. This defines the width of the
+cross section (cannot be rotated).
+A preview of the cross section appears.
+5
+Select the Attributes tab > Cross Section tab.
+6
+Change Geometry parameters if you like (e.g. depth).
+7
+Define Deposition parameters.
+1
+Expand the Deposition section.
+2
+Select Platinum from the Material: drop-down list.
+3
+The protection layer should be 0.5-1.0 μm thick. Enter the desired value in
+the Depo Thickness: input field or set it with the arrow buttons.
+5 Working with the Software  |  5.5 Task-Oriented Workflows
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+165
+8
+Define Milling parameters.
+1
+Expand the Milling Steps section.
+2
+Select a recipe from the Material: drop-down list.
+3
+Select the FIB Probe for the different milling steps.
+4
+If necessary, adjust the Polishing Tilt.
+The polishing tilt is only applied for the last milling step.
+5
+Adjust the other parameters as required.
+If polishing tilt and milling steps are selected, a drift correction is required,
+refer to Using a Drift Correction [} 151].
+9
+On the Standard Toolbar, click the Exposure icon.
+The Exposure dialog opens.
+The estimated exposure time will be computed based on beam current.
+10 Click Start.
+Exposed elements will be shown normally. Elements awaiting exposure are
+shown stippled. The end of exposure is indicated by a pop-up message.
+11 To check the milling, change between FIB mode and SEM mode in SmartSEM
+at specimen tilt 0°.
+5.5.3 Creating a TEM Lamella
+Prerequisite
+¢
+Electron beam has been switched on
+¢
+Ion beam has been switched on
+¢
+Specimen has been moved to the coincidence point, tilted to 54°
+¢
+Tilt eucentricity has been adjusted
+¢
+Platinum precursor has been outgassed
+¢
+FIB probe currents have been adjusted
+¢
+Settings in SmartSEM: FIB mode active, 30 kV FIB, 5 kV SEM, WD at the
+coincidence point
+¢
+The area of interest has been selected
+Procedure
+1
+Switch to Live mode and capture a FIB image, see Acquiring an Image [} 154].
+2
+On the Tools Toolbar, click the Lamella icon.
+3
+Move the cursor to the intended location of the TEM lamella to be prepared.
+4
+To create a line, click and drag with the mouse.
+This defines the lamella's width.
+5 Working with the Software  |  5.5 Task-Oriented Workflows
+166
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+A preview of the lamella appears.
+5
+Select the Attributes tab > Lamella tab.
+6
+Change Geometry parameters if you like (e.g. depth).
+7
+Define Deposition parameters.
+1
+Expand the Deposition section.
+2
+Select Platinum from the Material: drop-down list.
+3
+The protection layer should be 0.5-1.0 μm thick. Enter the desired value in
+the Depo Thickness: input field or set it with the arrow buttons.
+5 Working with the Software  |  5.5 Task-Oriented Workflows
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+167
+8
+Define Milling parameters.
+1
+Expand the Milling Steps section.
+2
+Select a recipe from the Material: drop-down list.
+3
+Select the FIB Probe for the different milling steps.
+4
+If necessary, adjust the Polishing Tilt.
+The polishing tilt is only applied for the last milling step.
+5
+Adjust the other parameters as required.
+For more information refer to Lamella [} 99].
+If polishing tilt and milling steps are selected, a drift correction is required,
+refer to Using a Drift Correction [} 151].
+9
+Define Cut Out parameters.
+1
+Expand the Cut Out section.
+2
+Select a probe from the Probe: drop-down list.
+The probe that has been used during the last session is set by default.
+3
+Adjust the Depth Tuning Factor.
+4
+Choose a link position.
+5
+Adjust the other parameters as required.
+For more information refer to Lamella [} 99].
+10 To save the settings, click Export .
+11 On the Standard Toolbar, click the Exposure icon.
+The Exposure dialog opens.
+The estimated exposure time will be computed based on beam current.
+12 Click Start.
+Exposed elements will be shown normally. Elements awaiting exposure are
+shown stippled. The end of exposure is indicated by a pop-up message.
+5 Working with the Software  |  5.5 Task-Oriented Workflows
+168
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+13 To check the milling result, change between FIB mode and SEM mode in
+SmartSEM.
+14 Lift out procedure:
+The following steps depend on the type of micromanipulator you use. For
+details refer to the instructions given by the micromanipulator manufacturer.
+1
+Lift out the TEM lamella.
+2
+Attach the TEM lamella to the TEM specimen grid.
+15 Do the final polishing until the desired lamella thickness is obtained.
+5.5.4 Obtaining Serial Section Images
+Serial section images are a basic functionality for generating 3D datasets.
+Afterwards, the data can be compiled to a 3D image using specific software (e.g.
+ORS ).
+SSI is a scanning mode also, which will not deliver nice depositions.
+TIP
+The process is based on an alternating sequence. The milling is started in SmartFIB
+and repeatedly paused for image acquisition in SmartSEM.
+Procedure
+1
+Prepare an edge from which you want to start using the cross-section Cycle
+mode in Live Mode.
+2
+Prepare a U-shaped area around the element.
+This ensures that there is no material around the element. This minimizes
+shadowing effects and redeposition.
+5 Working with the Software  |  5.5 Task-Oriented Workflows
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+169
+Fig. 36: Volume of interest inside the U-Shape
+3
+Draw rectangle ( or trapezoid) and place on region of interest.
+4
+Before milling the object itself, in the Recipe tab, go to the Scanning section
+and select serial-section cycle mode.
+5
+Set the exposure parameters. Pay attention on the scan direction: It has to
+scan from bottom to top in the FIB image. 
+6
+Switch to the SmartSEM user interface.
+7
+To obtain an image, use any suitable detector. You can also use dual channel
+or mix detector signals.
+8
+To check the image save path, from the Menu bar, select Settings >
+Preferences > Tools.
+9
+Save the image.
+10 Switch back to SmartFIB and click the Expose icon. 
+For best results, we recommend to apply a drift correction [} 151].
+TIP
+Note that the DC correction interval does now mean SEM images instead of
+seconds.
+SmartFIB uses the path given in the Preferences to save the current SSI images. To
+provide a better overview, a folder is created containing date and time.
+5 Working with the Software  |  5.6 Working with the Gas Injection System
+170
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+5.5.5 Creating a Text
+Procedure
+1
+On the Tools Toolbar, click the Text 
+ icon.
+2
+Position the cursor to the intended location and click.
+The Text Tool dialog opens.
+3
+Type your text into the text field.
+4
+Adjust text height and font.
+5
+Select the Attributes tab > Text tab.
+6
+Set text parameters as required.
+7
+Go to the Recipe tab and setup milling parameters.
+Working with the Software  | 
+5.6 Working with the Gas Injection System
+The gas injection system is mainly maintained via SmartSEM but fully controlled via
+SmartFIB. In SmartFIB, you can decide wether you want to use the gas injection
+system and if so which gas you want to use.
+TIP
+To make it easier to perform the necessary steps in SmartSEM, refer to the
+Software Manual SmartSEM XB "Working with the Gas Injection System (GIS,
+optional)" for details.
+5.6.1 Gas-Assisted Deposition
+There are different applications or processes that require a deposition of a metal or
+an insulator:
+¢
+Surface protection layer for cross sections or TEM lamella preparation
+¢
+Circuit modification
+Deposited Material
+Precursor
+Tungsten, W
+W(CO)6
+Tungsten hexacarbonyl
+Platinum, Pt
+C9H16Pt
+Methyl
+cyclopentadienyl(trimethyl)platinum
+5 Working with the Software  |  5.6 Working with the Gas Injection System
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+171
+Deposited Material
+Precursor
+Insulator, SiO2
+PMCPS, C5H20O6Si5
+2,4,6,8,10-
+Pentamethylcyclopentasiloxane
+The ion beam is required to start and maintain the chemical deposition process. On
+the other hand, deposition only occurs when more material is deposited than
+sputtered by the ion beam.
+Fig. 37: Gas assisted deposition example
+5.6.1.1
+Performing Gas Assisted Deposition
+This procedure involves prerequisites that have to be checked in SmartSEM.
+TIP
+To make it easier to fulfill the prerequisites in SmartSEM, refer to the Software
+Manual SmartSEM XB "Selecting deposition conditions" for details.
+NOTICE
+Risk of damaging the GIS micro stage or specimen
+If the specimen surface is not at the coincidence point before starting the ion or
+electron beam deposition or etching process, there is a risk of collision between
+the GIS needle and the specimen
+u Move the specimen surface to the coincidence point before starting the
+deposition or etching process.
+5 Working with the Software  |  5.6 Working with the Gas Injection System
+172
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Prerequisite
+¢
+Electron beam is switched on
+¢
+FIB gun pressure is better than the threshold
+¢
+Wanted precursor gases are outgased.
+¢
+Ion beam is switched on
+Procedure
+1
+Draw or select a geometric element [} 149].
+2
+On the Control Panel, select the Recipe tab.
+3
+Select Exclusive from the drop-down list.
+4
+From the Purpose drop-down list, select FIB Deposition.
+5
+Select a probe.
+6
+Go to the Details section and specify a dose.
+7
+Go to the GIS section, enable the Use Gas: checkbox.
+8
+Select Gas from the Gas drop-down list.
+9
+To automatically move the GIS micro stage back to the safe park position after
+the deposition process, tick the Auto park checkbox.
+10 If you want a pop-up message before the GIS movement, enable the
+Acknowledge: checkbox.
+11 Continue with Starting the Exposure/Milling Process [} 152].
+5.6.2 Gas-Assisted Etching
+Gas assisted etching (GAE) allows you to selectively increase etching rates
+comparing to etching with the ion beam or the electron beam alone.
+Etching Reagent
+Selectively Etches
+Xenondifluoride, XeF2
+Si, SiO2
+Water (reactive products)
+Carbon, organic materials
+Milling Objects
+Etching is done by processing a milling object, usually with the specimen stage at
+54°.
+There are different etching types:
+¢
+Physical etching: only the ion beam is used to remove material
+¢
+Chemical etching: the ion beam and precursor gases are used to remove
+material
+5 Working with the Software  |  5.6 Working with the Gas Injection System
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+173
+Fig. 38: Comparison between silicon etching (without gas) and gas assisted
+etching (with fluorine)
+Types of Etching
+Physical etching
+Ion milling
+Physical etching means that only the ion beam is used to
+remove material within a selected area (1). The removed
+material is re-deposited (2) at the side walls faster than it can
+be pumped away. Therefore, the side walls are uneven and
+the ability to mill deep holes is limited.
+Chemical etching
+Gas assisted
+etching (GAE)
+GAE means that the ion beam hits a selected area (3) on the
+specimen surface and interacts with a precursor. The precursor
+is split up into a volatile, inactive substance and a volatile
+active substance. The inactive substance is pumped away. The
+volatile active substance reacts with the substrate and
+becomes a volatile compound which removes the substrate.
+Using GAE improves the aspect ratio of the milled holes and
+enhances the removal rate. Thus, the sidewall angles come
+closer to 90° (4).
+Selective etching
+GAE is also material-selective, because etching reagents etch
+different materials (5,6) at different rates.
+5 Working with the Software  |  5.6 Working with the Gas Injection System
+174
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+5.6.2.1
+Performing Gas Assisted Etching
+TIP
+To make it easier to perform the necessary steps in SmartSEM, refer to the
+Software Manual SmartSEM XB "Selecting etching conditions" for details.
+This procedure involves prerequisites that have to be checked in SmartSEM. Refer
+to the Software Manual SmartSEM XB "Selecting Etching Conditions" for details.
+NOTICE
+Risk of damaging the GIS micro stage or specimen
+If the specimen surface is not at the coincidence point before starting the
+electron beam deposition or etching process, there is a risk of collision between
+the GIS needle and the specimen
+u Move the specimen surface to the coincidence point before starting the
+deposition or etching process.
+Prerequisite
+¢
+Electron beam is switched on
+¢
+FIB gun pressure is better than the threshold
+¢
+Wanted precursor gases are outgased.
+¢
+Ion beam is switched on
+Procedure
+1
+Draw or select a geometric element [} 149].
+2
+On the Control Panel, select the Recipe tab.
+3
+Select Exclusive from the drop-down list.
+4
+From the Purpose drop-down list, select FIB Deposition.
+5
+Select a probe.
+6
+Go to the Details section and specify a dose.
+7
+Go to the GIS section, enable the Use Gas: checkbox.
+8
+Select Gas from the Gas drop-down list.
+9
+To automatically move the GIS micro stage back to the safe park position after
+the deposition process, tick the Auto park checkbox.
+10 If you want a pop-up message before the GIS movement, enable the
+Acknowledge: checkbox.
+11 Continue with Starting the Exposure/Milling Process [} 152].
+5 Working with the Software  |  5.6 Working with the Gas Injection System
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+175
+5.6.3 Electron Beam Deposition
+Depositing and etching with the electron beam is a suitable method for materials
+that cannot be processed with the focused ion beam.
+Another advantage is that there is no impairment of surfaces (e.g. no generation of
+amorphous layers).
+Precursor/gas
+Application
+Insulator, SiO2
+Deposition
+Platinum, Pt
+Deposition
+Water (reactive products)
+Etching of materials that contain
+carbon e.g. diamond like carbon
+layers (DLC)
+Fluorine, XeF2
+Etching of Si-containing materials
+Tungsten, W
+Deposition
+5.6.3.1
+Performing Electron Beam Deposition
+NOTICE
+Risk of damaging the GIS micro stage or specimen
+If the specimen surface is not at the coincidence point before starting the ion or
+electron beam deposition or etching process, there is a risk of collision between
+the GIS needle and the specimen
+u Move the specimen surface to the coincidence point before starting the
+deposition or etching process.
+Procedure
+1
+In the Tools Toolbar, select SEM from the Microscope Control drop-down
+list.
+2
+Switch to Live mode and capture a FIB image, see Acquiring an Image [} 154].
+3
+To perform SEM Beam current adjustment, in the toolbar, click the Measure
+beam current icon.
+The Measure Beam Current window opens.
+4
+Type in the beam current you have selected in SmartSEM. If necassary measure
+it by using a Faraday Cup.
+5
+Draw or select a geometric element [} 149].
+6
+On the Control Panel, select the Recipe tab.
+7
+From the Materials: drop-down list, select Exclusive.
+5 Working with the Software  |  5.7 Working with Recipes
+176
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+8
+From the Purpose drop-down list, select SEM Deposition.
+9
+Select a probe.
+10 Go to the Details section and specify a dose.
+11 Go to the GIS section, enable the Use Gas: checkbox.
+12 Select Gas from the Gas drop-down list.
+13 To automatically move the GIS micro stage back to the safe park position after
+the deposition process, tick the Auto park checkbox.
+14 If you want a pop-up message before the GIS movement, enable the
+Acknowledge: checkbox.
+15 Continue with Starting the Exposure/Milling Process [} 152].
+Working with the Software  | 
+5.7 Working with Recipes
+Recipes allow the user to run SmartFIB with preferred operating parameters.
+5.7.1 Using Existing Recipes
+Procedure
+1
+Switch to Live mode and capture a FIB image, see Acquiring an Image [} 154].
+2
+Draw or select a geometric element [} 149].
+3
+If desired, change the probe.
+4
+If the recipe is gauged, enter a target depth.
+5
+Alternatively you can change the dose factor to use a fraction or multiple of
+the reference dose.
+6
+On the Control Panel, select the Attributes tab > Recipe Tab.
+7
+From the Material drop-down list, select an existing recipe.
+5.7.2 Creating/Editing Recipes
+Procedure
+1
+Draw or select a geometric element [} 149].
+2
+On the Control Panel, select the Attributes tab > Recipe Tab.
+3
+From the Material drop-down list, select an existing recipe.
+4
+To edit the assigned recipe, press the Edit button 
+It then changes to the Save button.
+The input fields in the Details section become editable.
+5
+Set the parameters as required.
+5 Working with the Software  |  5.7 Working with Recipes
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+177
+6
+To replace the existing recipe, press the Save button 
+, keep the same file
+name and click OK.
+To create a new recipe, press the Save button 
+, type a new file name and
+click on OK.
+The new/edited recipe should be available from the Materials: drop-down list.
+5.7.3 Creating a Recipe with Exclusive Function
+The exclusive function is used to create new recipes by using default parameter
+values.
+Procedure
+1
+Draw or select a geometric element [} 149].
+2
+On the Control Panel, select the Attributes tab > Recipe Tab.
+3
+From the Material drop-down list, select Exclusive.
+The parameter values are predefined.
+4
+To save these parameters as a new recipe, set the parameters as required and
+press 
+.
+5 Working with the Software  |  5.7 Working with Recipes
+178
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Index
+Index
+180
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+Index
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+181
+Numerics
+1
+Fast Scanning Mode     57
+2
+Medium Scanning Mode     57
+3
+Image Scanning Mode     57
+A
+About the Software     21
+Arc Tool     40
+Attributes tab     65, 129
+Arc     116
+Circle     112
+Cross Section     94
+Ellipse     114
+Image     127
+Lamella     99
+Line     105
+Parallelogramm     123
+Point     104
+Polygon     118
+Polyline     107
+Rectangle     110
+Simple Cross Section     92
+Spiral     108
+Text     125
+Trapezoid     121
+C
+Center Stage     56
+Circle Tool     40
+Color by Exposure Parameter     143
+Color by z-extent     143
+Common     90
+Control Panel     58
+Copy     56
+Create Outline Elements     40
+Create Solid Elements     40
+Creating a simple cross section     162
+Cross Section Tool     39
+Cut     56
+D
+Drift Correction     87
+E
+Edge Select Tool     39
+Edge Tool     157
+Edit menu     43
+Edit/Copy     56
+Edit/Cut     56
+Edit/Paste     56
+Edit/Redo     56
+Edit/Undo     56
+Ellipse Tool     40
+Exposure Parameter Hierarchy     31
+Exposure preview     72
+Exposure tab     141
+F
+File menu     43
+Fit image to window     143
+G
+Gas assisted deposition     170
+Gas assisted etching     172
+H
+Help menu     55
+I
+Image menu     50
+Image Mode     56
+Image Tool     40
+Import     156
+Introduction     21
+L
+Lamella Tool     39
+Line Tool     39
+Lines Tool     39
+M
+Manual     120
+Measuring Tool     39
+Move tab     130
+Multi Session Selection     56
+Multi-site Exposure     153
+Index
+182
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+O
+Order Tool     38
+P
+Pan Tool     39
+Parallelogram Tool     40
+Paste     56
+Point Tool     39
+Polygon Tool     40
+Preferences dialog     51
+Process List     61, 161
+Process List Selection     56
+Process Readout     56
+R
+Recipe tab     66
+Common section     67
+Description section     74
+Details section     75
+GIS section     84, 85
+Precision section     86
+Scanning section     81
+Recipe types     69
+Rectangle Tool     40
+Redo     56
+Reduce Raster     56
+Resizing and Rotating Elements     150
+, 156
+S
+Sample Adjustment     47
+Sample Focus Plane     49
+Sample Menu     45
+Sample Mode     57
+Sample Settings     46
+Sample/Expose     56
+Select Tool     38
+Select-by-ID     158
+Settings menu     50
+Simple Cross Section     92, 162
+Simple Cross Section Tool     39
+Snap To Grid     143
+Spiral Tool     39
+Stage Control Tab     139
+Status Bar     143
+T
+Terms     27
+Text Tool     40
+Traffic Light     143
+Transfer To Sample Mode     57
+Trapezoid Tool     40
+U
+Undo     56
+V
+Vertex Tool     39
+View Grid     143
+View Layout     143
+View menu     44
+W
+Working Area     41
+Z
+Zoom     143
+Zoom Tool     38
+Index
+Software Manual SmartFIB  |  en1.2  |  346000-8083-000
+183
+Carl Zeiss Microscopy GmbH
+Carl-Zeiss-Promenade 10
+07745 Jena
+Germany
+microscopy@zeiss.com
+Carl Zeiss Microscopy Ltd.
+509 Coldhams Lane
+Cambridge
+Cambridgeshire
+CB1 3JS
+UK
+microscopy@zeiss.com
+Carl Zeiss Microscopy, LLC
+One Zeiss Drive
+Thornwood, NY 10594
+USA
+microscopy@zeiss.com
+Plus a worldwide network of distributors
+www.zeiss.com/microscopy
+Due to a policy of continuous development, 
+we reserve the right to change specifications 
+without notice.
+© Carl Zeiss Microscopy GmbH