Besides foundry facilities, Computer-Aided Design (CAD)tools are also required to move microsystems from researchprototypes to an industrial market. Currently available CADtools need extensions before they can be used for theautomated design of micromachined devices.This paper presents a low cost access to microsystemtechnology (MST), applied by the CMP service, and based onthe use of existing microelectronics production lines, withadditional post-processing for microsystem specific 2D and3D structures, and a global CAD approach for the design andsimulation of microsystems applied to currently availablecommercial CAD tools, e.g. Mentor Framework, in order toensure a continuous flow from the design to themanufacturing.
['J.M. Karaml', 'B. Courtoisl', 'H. Boutaminel', 'P. Drake', 'Andras Poppe', 'V. Szekely', 'M. Rencz', 'Klaus Peter Hofmann', 'Manfred Glesner']
CAD and foundries for microsystems