Spatially resolved photoluminescence is used as a nondestructive tool to characterize semiconductor epitaxial wafers with a resolution better than the device dimensions. In this paper, we describe a novel photoluminescence measurement setup using fiber optic techniques for luminescence excitation and detection in a very simple confocal arrangement. A final spatial resolution as small as 5 /spl mu/m/spl plusmn/0.5 /spl mu/m together with the compact design makes it very attractive.
['S. Banerjee', 'Chung-En Zah', 'Rajaram Bhat', 'C. Caneau']
Fiber optic photoluminescence setup for spatially resolved measurements