Piezo-Impact-Driven X-Y Stage and Precise Sample Holder for Accurate Microlens Alignment
['Yuuka Irie', 'Hisayuki Aoyama', 'Junichi Kubo', 'Takahiro Fujioka', 'Takashi Usuda']
Piezo-Impact-Driven X-Y Stage and Precise Sample Holder for Accurate Microlens Alignment