High density arrays of artificial hair sensors, bio¬mimicking the extremely sensitive mechanoreceptive filiform hairs found on cerci of crickets have been fabricated successfully. We assess the sensitivity of these artificial sensors and present a scheme for further optimization addressing the deteriorating effects of stress in the structures. We show that, by removing a portion of chromium electrodes close to the torsional beams, the upward lift at the edges of the membrane due to the stress, will decrease hence increase the sensitivity.
['N. Izadi', 'R.K. Jaganatharaja', 'J. Floris', 'G.J.M. Krijnen']
Optimization of Cricket-inspired, Biomimetic Artificial Hair Sensors for Flow Sensing