In order to efficiently design complex microelectromechanicalsystems (MEMS) having large numbers of multi-domain components,a hierarchically structured design approach that iscompatible with standard IC design is needed. A graphical-basedschematic, or structural, view is presented as a geometrically intuitiveway to represent MEMS as a set of interconnected lumped-parameterelements. An initial library focuses on suspended-MEMStechnology from which inertial sensors and other mechanicalmechanisms can be designed. The schematic representationhas a simulation interface enabling the designer to simulate thedesign at the component level. Synthesis of MEMS cells for commontopologies provides the system designer with rapid, optimizedcomponent layout and associated macro-models. Asynthesis module is developed for the popular folded-flexuremicromechanical resonator topology. The algorithm minimizes acombination of total layout area and voltage applied to the electromechanicalactuators. Synthesis results clearly show the designlimits of behavioral parameters such as resonant frequency for afixed process technology.
['Tamal Mukherjee', 'Gary K. Fedder']
Structured design of microelectromechanical systems