An interface for MEMS gyroscope is implemented in 0.18µm HVCMOS technology, and achieves a low noise floor of 1m°/sec/√Hz over 200Hz BW. Electromechanical ΣΔ force-feedback and self-clocking scheme based on gyro resonance are implemented. The interface includes on-chip reference generation, decimation, and temperature compensation.
['A. Elsayed', 'A. Elshennawy', 'A. Elmallah', 'A. Shaban', 'B. George', 'Mostafa Elmala', 'A. Ismail', 'A. Wassal', 'M. Sakr', 'A. Mokhtar', 'M. Hafez', 'A. Hamed', 'M. Saeed', 'M. Samir', 'M. Hammad', 'M. Elkhouly', 'A. Kamal', 'M. Rabieah', 'A. Elghufaili', 'Saami J. Shaibani', 'I. Hakami', 'T. Alanazi']
A self-clocked ASIC interface for MEMS gyroscope with 1m°/s/√Hz noise floor