Thats a unique idea.You should consider the following idea to enhance your idea so that it would impact uniquely: ,  investigate routing restrictions that enable the generation of "correct by construction" layouts for Dark Field AltPSM. Existing routers produce designs in which coloring errors are numerous, and up to 15% of the pin locations in macros may cause unavoidable coloring errors.  identify routing restrictions which produce 100% phase-correct results, and quantify the impact on wire-lengths and via counts.
['Kevin W. McCullen']
I am writing a research paper on a idea Phase correct routing for alternating phase shift masks
[{"from": "human", "value": "I am writing a research paper on a idea Phase correct routing for alternating phase shift masks"}, {"from": "gpt", "value": "Thats a unique idea.You should consider the following idea to enhance your idea so that it would impact uniquely: ,  investigate routing restrictions that enable the generation of \"correct by construction\" layouts for Dark Field AltPSM. Existing routers produce designs in which coloring errors are numerous, and up to 15% of the pin locations in macros may cause unavoidable coloring errors.  identify routing restrictions which produce 100% phase-correct results, and quantify the impact on wire-lengths and via counts."}]