Thats a unique idea.You should consider the following idea to enhance your idea so that it would impact uniquely: For electrostatically actuated parallel-plate tunable Microelectromechanical System (MEMS) capacitors in traditional theory, pull-in occurs when the deflection of the movable plate is one-third of the original air gap. ,  fabricated the parallel-plate tunable MEMS capacitors and used WYKO NT1100 optical surface profiler to measure the displacement related with deformation. The results show that only the center of the movable plate nearly fully reached their maximum displacement when pull-in effect occurs, that is, the electrostatic force is nonlinear. The theoretical deviations of the capacitance and pull-in voltage in traditional theory and in this work are more than 2.6% and 1.3%.
['Dongming Fang', 'Haixia Zhang', 'Xiaolin Zhao']
I am writing a research paper on a idea Tunable MEMS capacitors considering deformation factor
[{"from": "human", "value": "I am writing a research paper on a idea Tunable MEMS capacitors considering deformation factor"}, {"from": "gpt", "value": "Thats a unique idea.You should consider the following idea to enhance your idea so that it would impact uniquely: For electrostatically actuated parallel-plate tunable Microelectromechanical System (MEMS) capacitors in traditional theory, pull-in occurs when the deflection of the movable plate is one-third of the original air gap. ,  fabricated the parallel-plate tunable MEMS capacitors and used WYKO NT1100 optical surface profiler to measure the displacement related with deformation. The results show that only the center of the movable plate nearly fully reached their maximum displacement when pull-in effect occurs, that is, the electrostatic force is nonlinear. The theoretical deviations of the capacitance and pull-in voltage in traditional theory and in this work are more than 2.6% and 1.3%."}]