Polynomial Model of Chemical-Mechanical Planarization in Production of Sub-Micrometer VLSIC
Peculiarities of the technological operation of chemical-mechanical planarization during the formation of interlayer insulation in VLSIC are considered. The model of chemical-mechanical planarization based on the transformed Preston equation and the model taking into account the time dependence of the planarization rate are analyzed. A polynomial model of chemical-mechanical planarization is offered. The results of simulations using the models under consideration are compared. Refs. 9. Figs. 9.