Plasma parameters investigation of the RF inductive plasma source with diameter 46 cm. Part III. Power absorption efficiency
The measurement results of the equivalent resistance, which is a measure of the ability to absorb RF power by plasma, are represented in this paper. The inductive RF discharge in inert gases in the range of pressure 1 mTorr - 10 Torr was examined. It is shown that the equivalent resistance values of the various gases “lay” on the same curve within the experiment error if the elastic collision frequency does not exceed 3∙10 7 s -1. The capacitive component of the discharge makes significant contribution if the collision frequency is greater than 3∙10 7 s -1.