THERMISTOR SENSORS MADE OF POLYCRYSTALLINE DIAMOND MATERIALS
The widespread introduction of automation necessitates the improvement of the element base of automatic devices. One of the parameters characterizing the state of automation objects is temperature. It is relevant to measure the temperature of aggressive liquid media. Since diamond is chemically inert to aqueous solutions of acids, alkalis and salts, it can be considered as one of the promising materials for the manufacture of thermometric sensors. The possibility of manufacturing thermometric sensors from polycrystalline diamond materials is being considered. The most suitable materials are polycrystalline diamond films and polycrystalline diamond compacts. It has been established that the electrical properties of polycrystalline diamond materials are determined by dislocation conductivity, which in turn is determined by the structure of diamond materials. The change in temperature coefficient of resistance can be controlled by changing the manufacturing parameters of polycrystalline diamond materials.