Improve the efficiency of functional coatings for cutting tools deposited by CIB-MeVVA, by filtering the vapor-ion flow with the aim of separating macro- and micro particles
Methods of overcoming organic defects, typical for processes CIBMeVVA was reviewed. Eliminating witch can significantly improve the performance properties of coatings. Special attention is given to processes and devices for filtering steamion flow with the aim of separating macro and micro particles.