MOEM resonator of fiber reflection interferometer
The aim of the paper is to design the tunable cavity for fiber Reflection Interferometer (RI) based on Micro-Opto-Electro-Mechanical Structure (MEMS). The scheme of novel fiber RI with cavity based on MOEMS-mirror is described. The main electromechanical properties of the elastic beam, which is used as back mirror if the RI, are calculated. The advantage of the proposed RI design over the MOEMS Fabry-Perot interferometers is in the significant simplification of the cavity production technique, because the back mirror can be non-transparent and made of metal beam. The experimental investigations show, that MOEMS elements suit for obtaining high frequency of resonance wavelength tuning over the free spectrum range.