Vacuum technologies of thin-film resistive-strain sensors production based on samarium sulfide for aerospacecraft
The article describes features of semiconductor rare earth compounds based on samarium sulfide. The article considers the problems of thin films generation in vacuum and dependence of their characteristics on evaporation and condensation technological modes. Different methods of samarium monosulfide evaporation which allow getting of stochiometric composition in thin films are described in the article. Results of researches of experimental thin films produced by different methods are also analyzed.