CONTROL OF ELECTROPHYSICAL CHARACTERISTICS OF MATERIALS OF MICROELECTRONIC SENSORS
Materials, their properties and capabilities, are the main and most important indicators in all branches of science, technology, construction of various objects. The properties of materials are of particular importance in microelectronics and instrument making. This is primarily due to the fact that the materials in them determine the basic electrophysical properties of the products they produce. In these industries, materials of the highest purity and chemical resistance are required. In a multistage technological process of manufacturing microcircuits and semiconductor devices, the materials used should not degrade in their properties and characteristics. In the process of carrying out operations to form the structure of semiconductor elements and units of microdevices, various different-scale technological operations and transitions are used. These include the operations of spraying nanostructured metal films from highly conductive and resistive alloys, the formation of insulating and protective non-metallic films, operations of anisotropic and isotropic etching, modification of materials using ion doping and other operations. The article describes the options for modifying the materials of microelectronic sensors in order to expand their metrological characteristics: expanding the temperature range, increasing the resource, etc. In addition, methods are given that have been implemented in existing technologies and designs that have met the stated requirements.