Structural Changes of Nanoporous Silicon-Based Materials under Low-EnergyIon Impact
Role of porosity and pore size in morphological changes of nanoporous materials during low-energy ion irradiation was studied in terms of crystalline silicon models. Molecular dynamic simulations were implemented to study the destruction of porous structures with different values of porosity and pore size. Obtained dependencies of potential energy and specific surface area on system temperature were used to determine material parameters, which define the process of pore compressing.