MANUFACTURING OF GRIDS AND SCALES FOR OPTICAL DEVICES BY THE LASER CONTROLLED THERMOCRACK METHOD
In work the results of researches of new technology of manufacturing of optical grids and scales with use of the method laser controlled thermocracking (LCT) are given. The opportunity of manufacturing of grids and scales in a wide range of the sizes of their width is shown: from tens nm up to tens μm, and also efficiency of their illumination in various optical ranges.