Influence of the temperature of The Evaporated Material On The Plasma Flow Parameters And Coating Properties
The influence of the cathode temperature of the vacuum arc evaporator on the structure and operational properties of coatings is analyzed. As the cathode thickness decreases, even with stabilized discharge parameters, a significant change in the properties of the plasma flow can occur. It is proposed to change the arc discharge current in time during the cathode evaporation process in order to maintain the cathode temperature at a given level. Mathematical expressions are obtained for calculating the time dependence of the arc discharge current and calculating cathode erosion over time.