Surface morphology, phase and elemental composition of molecular sputter-deposited oxide coatings
In this paper, molecular sputter-deposited oxide coatings (M-coatings) on various samples obtained by ion-plasma sputtering from a target of triple carbonate of alkaline-earth metals were investigated by X-ray diffraction analysis. The substrate temperature during deposition of coatings was 150...230 °C. The emission characteristics of sputter-deposited oxide cathodes are given. Surface morphology and phase composition of coatings were investigated by SEM, energy-dispersive X-ray microanalysis, AFM methods.