Experimental setup for direct laser microand nanostructuring of solid surface
Xperimental setup based on ArF-laser (λ = 193 nm) and Nd:YAG (λ = 532 nm and λ = 355 nm) laser is developed for micro- and nanostructuring of the solid surfaces. Its operational scheme and main parameters are described. We have shown experimentally the possibility of structure formation on zirconium dioxide and titanium surfaces at nanosecond laser pulses irradiation. The structures have quasi-periodic properties with submicron and micron dimensions. Microphotos of surface structures on zirconium dioxide and titanium pieces are shown.