The high-purity silicone coating compounds for application in microelectronics
Coating silicone compounds on the basis of cleared rubber are developed, the contents of ionic impurities not exceeding 5·10-5 %, that corresponds to a level of the best foreign analogues. The coverings have high electrical insulation properties, complete absence of corrosion action in relations with Al and Cu, moisture resistance, excellent adhesivity to Si, Al and Cu. Compounds were applied in production of some high voltage semi-conductor devices.