Exergetic Analysis of Air Exchange System of Clean Rooms
The air removal system significantly determines the ecological efficiency of the entire life-support providing clean rooms. In the work as a scientific basis for decision-making on the structure and configuration of the air removal system, the exergetic approach of thermographic analysis and as the criterion of environmental impact the value of the specific exergy of the emission have been proposed. A structural-functional scheme of the system has been proposed, on the basis of which the exergy balances have been complied, the losses of specific exergy and the efficiencies in its main elements under various emission control schemes have been determined. It has been determined that the direct air removal with a thermodynamic advantage over the air removal system with additional purification is less favorable for the environment due to a significant level of exergy of emissions as a factor, determining the possibility of physical and chemical processes in the environment leading to the environment damage. The legitimacy of using the exergy as an objective and universal single indicator, linking the thermodynamic and the environmental quality of the system has been shown. The practical significance of this approach is to establish the important relationships between various aspects of the design and operation of the life-support systems for clean microelectronics and to develop measures to reduce the environmental pollution by reducing exergy of emissions.