LOW TEMPERATURE MAGNETRON DEPOSITION OF THE Ni-C NANOSTRUCTURAL FILMS: SYNTHESIS, STRUCTURE AND MAGNETIC PROPERTIES
Three groups of films with the ratio of C/Ni (vol.%) = 30/70; 40/60; 60/40 have been grown up by means of magnetron sputtering of the composite Ni-C target. The cluster nature of film deposition onto a substrate surface has been established by method of atomic force microscopy (AFM). X-ray analysis of three groups of films has allowed investigating influence of substrate temperature on the structure and the size of the nickel nanocrystallites with a carbon shell that form a film. Saturation magnetization 4πMS of nickel nanoparticles was measured by inductive-frequency method and its dependence on the substrate temperature was studied. It is shown, that the films with the minimum concentration of carbon have ferromagnetism at deposition onto a cold substrate already. The films with the increased concentration of carbon demonstrate the magnetism at deposition only onto hot substrates.