Modification of the structure and properties of tin-fullerite films irradiated by boron ions
By SEM, AFM, electric force microscopy, and X-ray diffraction methods, the structure, phase composition, and local electrical properties of Sn-fullerite films implanted with B + ions (Е=80 keV, F=5·10 17 cm -2) have been investigated. Ion mixing and solid- phase interaction of Sn and fullerite layers are found to be occurred under ion implantation, and heterophase structure with not uniform local electrical properties is formed at the same time.