Uncooled matrix IR detector based on optoacoustic cells and optoelectronic reading system
The matrix structure 200×200 of optoacoustic cells (OAC) for uncooled IR detector with optoelectronic reading system is fabricated and investigated at the first time. Cells 100 μm in diameter shaped on ZnSe window and filled by xenon. Photosensitive layer consisted of SiO2 film with adsorption range 8-14 μm. Flexible membrane 0.15 μm of thick consisted of SiO2 and Al films. Radiation temperature sensitivity and noise equivalent power with optics f/1 were 0.15 K/Hz1/2 and 10 nW/Hz1/2, respectively, and the thermal response time was below 30 ms.