Determination of Electromagnetic Parameters of Metallic Conductors Based on Performed Accelerated Testing
A new method for determining the electromigration parameters - the activation energy and the current density exponent has been proposed. The multilayer conductors TiN/Al-Si(1%)/TiN for the tests with SiO 2 passivation layer have been used. The method permits to accelerate and to reduce the price of electromigration tests due to the lack of need for packing the samples and for using the high temperature climatic chambers.