25755
Through metal assisted chemical etching ( MaCE ) , superior purification of dirty Si was observed , from 99 . 74 to 99 . 9884 % for metallurgical Si and from 99 . 999772 to 99 . 999899 % for upgraded metallurgical Si .
 Chemical: Si; Chemical: Si; Chemical: Si
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
Answer:
 Chemical: Si; Chemical: Si; Chemical: Si