14760
Various annealing conditions ( environment , temperature , and duration ) are applied to study the nanoscale Kirkendall effect of copper ( Cu ) nanowire ( NW ) arrays on a Si substrate .
 Chemical: copper; Chemical: Cu; Chemical: Si
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
Answer:
 Chemical: copper; Chemical: Cu; Chemical: Si