10646
The stepwise buildup of these multilayers on silicon , ITO , and quartz substrates was monitored by UV - vis absorption spectroscopy , Fourier transform infrared spectroscopy ( FTIR ) , static contact angle measurements , surface plasmon resonance ( SPR ) , atomic force microscopy , ellipsometry , and cyclic voltammetry , which provide evidence for a linear increase in multilayer thickness with the number of deposited bilayers .
 Chemical: silicon; Chemical: ITO; Chemical: quartz
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
Answer:
 Chemical: silicon; Chemical: ITO; Chemical: quartz