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Surface modification or activation of Ti surface can be achieved by various techniques such as plasma spray , physical or chemical vapour deposition , ion implantation , electrochemical oxidation , acidic or alkali etching , solheat-treatment , and surface machining or grinding .
 manufacturing process: Surface modification; material: Ti; concept or principle: surface; material: be; material: as; process characterization: vapour deposition; concept or principle: ion implantation; concept or principle: electrochemical oxidation; manufacturing process: etching; concept or principle: surface; manufacturing process: machining; manufacturing process: grinding
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 manufacturing process: Surface modification; material: Ti; concept or principle: surface; material: be; material: as; process characterization: vapour deposition; concept or principle: ion implantation; concept or principle: electrochemical oxidation; manufacturing process: etching; concept or principle: surface; manufacturing process: machining; manufacturing process: grinding