23383
Two monomers that undergo different click reactions , pentafluorophenyl acrylate ( PFPA ) and 4 - ( trimethylsilyl ) ethynylstyrene ( TMSES ) , were sequentially polymerized from a silicon surface in the presence of a shadowmask with UV light , generating 12 . 5 and 62 mu m pitch patterns .
 Chemical: pentafluorophenyl acrylate; Chemical: PFPA; Chemical: 4 - ( trimethylsilyl ) ethynylstyrene; Chemical: TMSES; Chemical: silicon
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
Answer:
 Chemical: pentafluorophenyl acrylate; Chemical: PFPA; Chemical: 4 - ( trimethylsilyl ) ethynylstyrene; Chemical: TMSES; Chemical: silicon