16976
Finally , based on a REM process , the PEG - dot array on gold substrate is used to fabricate a second - generation PDMS stamp with microcavity array , and the second - generation PDMS stamp is used to generate third - generation PDMS stamp with microbump array .
 Chemical: PEG; Chemical: PDMS; Chemical: PDMS; Chemical: PDMS
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
Answer:
 Chemical: PEG; Chemical: PDMS; Chemical: PDMS; Chemical: PDMS