1570
Disadvantages of this methods are high price of set-up due to integration of vacuum with the machine for good thermal and impurity free environment , X-rays are formed during the process which is detrimental to human health .
 machine or equipment: machine; machanical property: impurity; concept or principle: X-rays; concept or principle: process
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 machine or equipment: machine; machanical property: impurity; concept or principle: X-rays; concept or principle: process