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The devices are fabricated with a single electron - beam - resist poly ( methyl methacrylate ) process that minimizes both the fabrication steps and the number of ( aggressive ) chemicals used , greatly reducing contamination and increasing the yield of high - quality , mechanically stable devices .
 Chemical: poly ( methyl methacrylate )
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
Answer:
 Chemical: poly ( methyl methacrylate )