14766
It is demonstrated that the transformation from Cu NW arrays into Cu oxide nanotube arrays can be combined with the joining of stacked Si chips in a single - process step with reasonable joint shear strength .
 Chemical: Cu; Chemical: Cu oxide; Chemical: Si
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
Answer:
 Chemical: Cu; Chemical: Cu oxide; Chemical: Si