14444
Si nanoscale dots are synthesized on AlN / Si ( 111 ) by molecular beam epitaxy .
 Chemical: Si; Chemical: AlN; Chemical: Si ( 111 )
Given options, please tell me the categories of all the listed entity words.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
 Entities: Si, AlN, Si ( 111 ) 
Answer:
 Chemical: Si; Chemical: AlN; Chemical: Si ( 111 )