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This approach could open a new avenue for microelectromechanical systems ( MEMS ) applications , which would significantly benefit from the concept that electrochemically active components be directly engineered and fabricated as an integral part of the integrated circuit ( IC ) .
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Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
Answer:
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