8309
We study the growth and misfit stress relaxation mechanism by cutting through the center of the InGaAs / GaAs nanopillars using focused ion beam and inspecting with high - resolution transmission electron microscopy .
 Chemical: InGaAs; Chemical: GaAs
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
Answer:
 Chemical: InGaAs; Chemical: GaAs