12541
Treatment of the silicon base and carbon nanotubes with hydrofluoric acid and a strong oxidizer ( thionyl chloride ) leads to a significant improvement in performance .
 Chemical: silicon; Chemical: carbon; Chemical: hydrofluoric acid; Chemical: thionyl chloride
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
Answer:
 Chemical: silicon; Chemical: carbon; Chemical: hydrofluoric acid; Chemical: thionyl chloride