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The inter-layer areas were proved to be the weak link in the deposited component by scanning electron microscope ( SEM ) and electron backscatter diffraction ( EBSD ) analysis results , including various phase composition , phase morphology , misorientation angle , grain size , Schmid factor , and texture .
 process parameter: areas; material: be; machine or equipment: component; machine or equipment: scanning electron microscope; process characterization: SEM; process characterization: electron backscatter diffraction; process characterization: EBSD; concept or principle: phase composition; concept or principle: phase morphology; machanical property: grain size; engineering feature: texture
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 process parameter: areas; material: be; machine or equipment: component; machine or equipment: scanning electron microscope; process characterization: SEM; process characterization: electron backscatter diffraction; process characterization: EBSD; concept or principle: phase composition; concept or principle: phase morphology; machanical property: grain size; engineering feature: texture