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This circumstance requires the application of techniques to determine the reliability of the results in the deposition of layers in order to have a good accuracy .
 process characterization: reliability; concept or principle: deposition; process characterization: accuracy
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 process characterization: reliability; concept or principle: deposition; process characterization: accuracy