20407
By reducing etch rates down to 0 . 5 nm / s from the typical > 100 nm / s , we report controllable roughening of nanowire surfaces and selectively focus on moderate roughness scales rather than the extreme scales investigated previously .
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Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
Answer:
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