23585
In this study , conductive polydimethylsiloxane ( PDMS ) templates with different micropatterns were fabricated by combining photolithography , silicon wet etching , and PDMS molding techniques .
 Chemical: polydimethylsiloxane; Chemical: PDMS; Chemical: silicon; Chemical: PDMS
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
Answer:
 Chemical: polydimethylsiloxane; Chemical: PDMS; Chemical: silicon; Chemical: PDMS