345
The measurement of substrate temperatures has been used to validate the process simulation , used for obtaining the temperature field of the whole part .
 process characterization: measurement; material: substrate; enabling technology: process simulation; process parameter: temperature
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 process characterization: measurement; material: substrate; enabling technology: process simulation; process parameter: temperature