9047
Multilayer samples were prepared by Pulsed Laser Deposition ( PLD ) on ( 0001 ) Al ( 2 ) O ( 3 ) substrates and characterised by X - Ray Diffraction ( XRD ) , Scanning Electron Microscopy ( HRSEM ) and Time - of - Flight Secondary Ion Mass Spectrometry ( ToF - SIMS ) .
 Chemical: Al ( 2 ) O ( 3 )
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
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Answer:
 Chemical: Al ( 2 ) O ( 3 )