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Submicron resolution of the x–y–z translation stages and the fine UV beam spot enable precise fabrication of real 3D complex microstructures .
 process parameter: Submicron resolution; concept or principle: UV beam; manufacturing process: precise fabrication; concept or principle: 3D; material: microstructures
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 process parameter: Submicron resolution; concept or principle: UV beam; manufacturing process: precise fabrication; concept or principle: 3D; material: microstructures