3
Ti alloy was deposited first , and then Al alloy was deposited on the Ti layer .
 material: Ti alloy; material: Al alloy; material: Ti; process parameter: layer
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 material: Ti alloy; material: Al alloy; material: Ti; process parameter: layer