20403
Spectral Phonon Scattering from Sub - 10 nm Surface Roughness Wavelengths in Metal - Assisted Chemically Etched Si Nanowires .
 Chemical: Si
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
Answer:
 Chemical: Si