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The microstructure of the IMC layer was composed of a nanosized granular Ti7Al5Si12 phase and serrated Ti ( Al , Si ) 3 phase .
 concept or principle: microstructure; process parameter: layer; material: Ti7Al5Si12; concept or principle: phase; material: Ti; material: Al; material: Si; concept or principle: phase
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 concept or principle: microstructure; process parameter: layer; material: Ti7Al5Si12; concept or principle: phase; material: Ti; material: Al; material: Si; concept or principle: phase