14444
Si nanoscale dots are synthesized on AlN / Si ( 111 ) by molecular beam epitaxy .
 Chemical: Si; Chemical: AlN; Chemical: Si ( 111 )
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
Answer:
 Chemical: Si; Chemical: AlN; Chemical: Si ( 111 )