14443
Epitaxial silicon dots self - assembled on aluminum nitride / Si ( 111 ) .
 Chemical: silicon; Chemical: aluminum nitride; Chemical: Si ( 111 )
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: Chemical 
Text: {0} 
Answer:
 Chemical: silicon; Chemical: aluminum nitride; Chemical: Si ( 111 )