1664
Since this means very large thermal gradients , it is normal to connect the parts to a solid substrate in a similar way to processes that require support structures .
 process parameter: thermal gradients; machine or equipment: solid substrate; concept or principle: processes; engineering feature: support structures
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 process parameter: thermal gradients; machine or equipment: solid substrate; concept or principle: processes; engineering feature: support structures