1066
For similar deposition and heat treatment conditions , an alloy with higher C and Al , and lower Mn contents exhibited a higher number density of > 20 nm TiC particles , higher number density of < 20 nm γ′-Ni3 ( Al , Ti ) particles , and , associated with these , superior hardness , tensile strength , strain hardening rate and toughness .
 concept or principle: deposition; manufacturing process: heat treatment; material: alloy; material: C; material: Al; material: Mn; machanical property: density; concept or principle: particles; machanical property: density; material: Al; material: Ti; concept or principle: particles; machanical property: hardness; machanical property: tensile strength; manufacturing process: strain hardening; machanical property: toughness
Please list all entity words in the text that fit the category.Output format is "type1: word1; type2: word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 concept or principle: deposition; manufacturing process: heat treatment; material: alloy; material: C; material: Al; material: Mn; machanical property: density; concept or principle: particles; machanical property: density; material: Al; material: Ti; concept or principle: particles; machanical property: hardness; machanical property: tensile strength; manufacturing process: strain hardening; machanical property: toughness