708
Also , these probes were able to overcome the limitations caused by the surface roughness of the samples and the high temperatures involved in the deposition process .
 probes, surface roughness, samples, temperatures, deposition process
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 probes, surface roughness, samples, temperatures, deposition process