197087
SEMATECH was funded over 5 years by public subsidies coming from the U.S. Department of Defense via the Defense Advanced Research Projects Agency ( DARPA ) for a total of $ 500 million .
 SEMATECH, U.S. Department of Defense, Defense Advanced Research Projects Agency
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: location, person, organization 
Text: {0} 
Answer:
 SEMATECH, U.S. Department of Defense, Defense Advanced Research Projects Agency