4940
Utilizing the DAD process , a very heterogeneous mixture of silicate and titanate mineral phases was transformed in a single step to a fully dense , nano-grained coating with spatially homogeneous composition at the micro-scale .
 process, heterogeneous, silicate, step, fully dense, coating, homogeneous composition, micro-scale
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 process, heterogeneous, silicate, step, fully dense, coating, homogeneous composition, micro-scale