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Hydrogen gas is used to reduce vapors of zirconium tetrachloride and boron trichloride at substrate temperatures greater than 800 C. Defects and secondary phases in zirconium diboride Zirconium diboride gains its high-temperature mechanical stability from the high atomic defect energies ( i.e. the atoms do not deviate easily from their lattice sites ) .
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Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: location, person, organization 
Text: {0} 
Answer:
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