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The results of the laser processing were investigated and quantified through mechanical hardness testing , optical and scanning electron microscopy , X-ray fluorescence spectroscopy , thermo-gravimetric analysis , spectrometry , and finally X-ray diffraction.The research resulted in the identification of a range of process parameters that resulted in the successful manufacture of three-dimensional components from Lunar and Martian ceramic multicomponent simulant materials .
 laser processing, mechanical, hardness, optical, scanning electron microscopy, X-ray, fluorescence, X-ray, research, range, process parameters, manufacture, three-dimensional, components, ceramic, materials
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 laser processing, mechanical, hardness, optical, scanning electron microscopy, X-ray, fluorescence, X-ray, research, range, process parameters, manufacture, three-dimensional, components, ceramic, materials