5167
It is found that epitaxial columnar grain growth occurs from the substrate or previously deposited layer to the curved top surface of the deposit .
 epitaxial columnar grain, substrate, deposited layer, surface
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 epitaxial columnar grain, substrate, deposited layer, surface