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Meanwhile , the evolution of nanoprecipitation behavior under various scan speeds is revealed and TEM analysis of precipitates shows that a small amount of spherical nanoprecipitates Al3 ( Sc , Zr ) were embedded at the bottom of the molten pool using a low scan speed .
 evolution, scan speeds, TEM, precipitates, spherical, Zr, molten pool, scan speed
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 evolution, scan speeds, TEM, precipitates, spherical, Zr, molten pool, scan speed