10610
CAMCS chips were fabricated using a standard complementary - metal - oxide - semiconductor ( CMOS ) process to demonstrate a 1250 - fold enhancement in the sensitivity of surface stress to bioanalyte adsorption using a piezoresistive sensing method .
 metal - oxide
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: Chemical 
Text: {0} 
Answer:
 metal - oxide