18550
The technology of using nitrogen as a protecting gas to stretch monocrystalline silicon , which won the national important invention award , has been transformed by the Semiconductor Factory of Zhejiang University in this zone into an outstanding one among domestic and foreign products of the same class .
 the Semiconductor Factory, Zhejiang University
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: date, organization, person, geographical social political, national religious political, facility, cardinal, location, work of art, law, event, product, ordinal, percent, time, quantity, money, language 
Text: {0} 
Answer:
 the Semiconductor Factory, Zhejiang University