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The X-ray diffraction and microstructure analysis indicate that the TiB and β-Ti phase appears for parts obtained with a low scanning speed of the laser beam .
 X-ray diffraction, microstructure, phase, scanning speed, laser beam
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 X-ray diffraction, microstructure, phase, scanning speed, laser beam