2636
The chemical composition of the samples is analyzed using EDX attached to an SEM , and the crystal structures are determined by X-ray diffraction .
 chemical composition, samples, EDX, SEM, crystal structures, X-ray diffraction
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 chemical composition, samples, EDX, SEM, crystal structures, X-ray diffraction