3322
As the number of deposition layers increases , the position of maximum tensile stress moves from the substrate to the deposited layers .
 As, deposition layers, tensile stress, substrate, deposited layers
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 As, deposition layers, tensile stress, substrate, deposited layers