20407
Additionally , the linear dynamic range of the devices on SiO2 / Si and PET substrates are 97 . 7 dB and 78 . 73 dB , respectively .
 SiO2, Si, PET
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: Chemical 
Text: {0} 
Answer:
 SiO2, Si, PET