1954
The values of selected parameters per ISO 25178-2 are reported , including Sa , the arithmetic mean height , for which the values from the Nikon MCT 225 metrology CT measurements were all within 0.5 % of the mean reference focus variation measurement .
 parameters, ISO 25178-2, arithmetic mean, metrology, CT, variation, measurement
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 parameters, ISO 25178-2, arithmetic mean, metrology, CT, variation, measurement