13496
The use of ( 4 . 8 ( 2 ) ) and ( 6 ( 3 ) ) tilings as nanolithographic masks to transfer square and triangular hole arrays into the substrate is also demonstrated .
 None
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: Chemical 
Text: {0} 
Answer:
 None