1461
The microstructure of the resulting material was examined using electron back-scattered diffraction , scanning transmission electron microscopy , and X-ray diffraction .
 microstructure, material, diffraction, scanning transmission electron microscopy, X-ray diffraction
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 microstructure, material, diffraction, scanning transmission electron microscopy, X-ray diffraction