6294
This involves scanning the core with a high productivity parameter set using defocus while enabling return to the focused smaller spot size position for hull scanning .
 scanning, core, productivity, parameter, spot size, scanning
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 scanning, core, productivity, parameter, spot size, scanning