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During the deposition process , as the wall height increases , the heat accumulates on the upper layers , which leads to the variation of the layer dimensions .
 deposition process, as, heat, variation, layer, dimensions
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 deposition process, as, heat, variation, layer, dimensions