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Ultrasonic data collected at different spatial resolutions were used to characterize a part ’ s surface flatness , internal defects , and fusion conditions ; and to measure the physical dimensions of intended features .
 data, s, flatness, defects, fusion, dimensions
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 data, s, flatness, defects, fusion, dimensions