6222
The experiments on fabrication of 2D and 2.5D structures have shown the benefit of the proposed configuration for the substrate/photoresin interface localization as well as for the distortion-free fabrication .
 fabrication, 2D, configuration, interface, as, as, fabrication
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: manufacturing standard, machanical property, manufacturing process, material, engineering feature, process parameter, machine or equipment, application, process characterization, enabling technology, biomedical, concept or principle 
Text: {0} 
Answer:
 fabrication, 2D, configuration, interface, as, as, fabrication