110979
" Combustion chemical vapor deposition " ( CCVD ) is a chemical process by which thin-film coatings are deposited onto substrates in the open atmosphere .
 substrates
Please list all entity words in the text that fit the category. Output format is "word1, word2". 
Option: media, plant, vehicle, astronomical object, time, disease, animal, location, person, organization, mythical figure, food, biology, geographical phenomenon, instrument, event 
Text: {0} 
Answer:
 substrates