This structure however requires more complex deposition of the active chalcogenide into a cell pore .
A confined cell structure where the phase change material is formed inside a contact via is expected to be essential for the next generation PCRAM device because it requires lower switching power .
This structure requires more complex deposition of the active chalcogenide into a cell pore .
A confined cell structure where the phase change material is formed inside a contact via is expected to be essential for the next generation PCRAM device because it requires lower switching power .