Thin-film yttria-stabilized tetragonal zirconia
Abstract Yttria-stabilized zirconia thin films deposited by radio-frequency sputtering from a 3 mol% Y 2 O 3 ZrO 2 target show primarily tetragonal orientation. Annealing in air further reduces the fraction of monoclinic phase and enhances the crystallinity of the tetragonal phase. Films annealed at 700 °C for 2 h showed a phase composition which was greater than 95% tetragonal.