Development of X-ray supermirrors used in Kirkpatrick-Baez microscope
Design and fabrication of the X-ray supermirror used as reflective optical element in Kirkpatrick-Baez(KB) microscope were proposed.W/B_4C was selected as coating materials pair.Design method and optimization of X-ray supermirrors were discussed.The designed multilayer structure was deposited on the Si wafer substrate using magnetron-sputtering system.The reflectivities of W/B_4C supermirrors were measured by X-ray diffraction instrument(8 keV).The reflectivities of supermirrors are 20% at 1.052° and 1.143° designed grazing incident angles.The bandwidth of reflective plateau reaches 0.3°,which can fulfill the requirements of KB microscope.