The Use of an Energy Dispersive X-Ray Analyzer in Scanning Electron Microscopy
The application of a high resolution semiconductor energy dispersive x-ray analyzer in scanning electron microscopy is described. Optimum specifications of an x-ray spectrometer for such application are outlined and various problems related to detection of low energy x-rays are discussed. Characteristic x-rays of elements down to oxygen were detected with the described system, making it useful for a variety of industrial and research applications.