Evolution of Phase Composition and Structure in Sapphire Implanted with 64Zn+ Ions and Heat-Treated in Oxygen
Single-crystal Al2O3 substrates are implanted with 64Zn+ ions using doses of 5 × 1016 cm–2 and an energy of 100 keV. The samples are annealed in oxygen with a stepwise increase in temperature from 400 to 1000°C. The changes on the surface and in the bulk of the sample are analyzed via scanning electron microscopy, energy-dispersive analysis, transmission electron microscopy, and Auger electron spectroscopy.