Simulation of laser spot parameters measured with detector array
The article analyses and simulates the variation of beam energy error,spot centroid error and spot distribution with the detector sensitivity dynamic range, sensitivity difference and space between detectors in laser spot measurement by uniform square detector array. Simulation results show that if detector sensitivity dynamic range is more than 30dB, sensitivity difference is less than 10% and space between contiguous detectors is less than 20% of beam diameter, beam energy error is less than 6%, spot centroid error is less than 2% of beam diameter and the spot distribution imitated is comparatively ideal．