An off-axis magnetron-sputtering system for in situ studies of artificial superlattices growth by synchrotron radiation scattering.
A sputtering chamber for the growth of artificial superlattices of oxide-based materials is described. The chamber is designed to fit into a standard Huber eight-circle diffractometer. The chamber serves for investigation with synchrotron radiation of growth characteristics of oxide-based artificial superlattices in situ. Two Be windows of large area in the vacuum chamber enable measurement of reflections of X-rays at entrance and exit angles up to approximately 50 degrees . Large perpendicular momentum transfers are practical with this apparatus. The possibility of investigating X-ray scattering in situ is demonstrated by observation of the effects of the modulation length and the stacking period on the growth characteristics of BaTiO(3)/LaNiO(3) artificial superlattices.