Single-shot measurement of soft X-ray Mo/Si multi-layer mirror reflectance
A new method of single shot measurement of normal incidence soft X ray Mo/Si multilayer mirror's reflectance was proposed. Experiment were performed using laser produced plasma X ray source, flat field grating spectrometer and soft X ray CCD. Grazing incident mirror was employed to eliminate high order contribution. Wavelength was accurately determined by the 17.04nm L edge of Al filter. Measurements of Mo/Si multilayer mirror showed a peak reflectance of 35% at 14nm with a 0.5nm bandwidth.