IR Spectroscopy and Raman Spectroscopy for Controlling and Investigating Thin-Film Coatings
Vibrational spectroscopy is used to characterize inorganic solid, superhard, and anticorrosive thin-film coatings prepared via magnetron sputtering and surface chemical reactions. The most detailed and correct information on the parameters of the dielectric function of coatings can be obtained from the frequency angular spectra of phonon polaritons. Optical characteristics of coatings are considered using examples of SiOxNy and SiOx films grown on steel and silicon substrates.