Two-electron-group model for a capacitively-coupled RF glow discharge with characteristics analogous to a hollow cathode discharge
A two-electron-group model for capacitively coupled radio-frequency (CCRF) glow discharge used to excite ion laser is developed. The model assumes electrons in the discharge zone are classified into two groups, i.e. bulk or plasma electrons and fast or secondary emission electrons. These two groups of electrons are responsible for α and γ processes respectively. Results from the model reveal that plasma parameters change largely at the transition regions between two operating modes. The ionization rates distribution at the high current mode of a narrow electrode gap RF discharge which is analog to a hollow cathode discharge demonstrates the pendulum effect exists in the CCRF discharge.