Parameter Identification of an MEMS Vibratory Gyroscope with Hyperstability Theory
Fabrication defects affects the performance of a vibratory MEMS gyroscope sensor, which makes the serious bias. This paper presents a parameter identifier for an MEMS z-axis vibratory gyroscope with Hyperstability theory, investigating the basic control problem of a vibrating MEMS gyroscope, parameter identification including system parameters and rotation angular rate. The parameter identifier is proposed by introducing a Hurwitz matrix to the MEMS state space model for the demand of system’s strictly positive real, and the so-called passivity condition (Popov integral inequality) is guaranteed with the selected common PI adaptive law. Simulation results show the validity and effectiveness of the online identifier.