Spatial variation of the electron energy in a H. F. ring discharge
The electron temperature has been measured in inductively coupled high frequency gas discharges in Ar, Kr and Xe with the aid of Langmuir probes. The measured temperature shows a rather low radial space dependence up to values ofpR ≈ 30 Torr cm (p=gas pressure,R=radius of the discharge vessel). This behaviour is explained on the basis of the local energy balance of the electrons as a consequence of the energy transport by thermal conduction in the electron gas.