Al합금에 MO-PACVD법으로 증착시킨 Ti(CN) 코팅 층의 물성에 관한 연구
【A Ti(CN) layer was formed on aluminum alloy by using diethylamino titanium, hydrogen and nitrogen with the pulsed DC PACVD process. Effect of process parameters such as precursor evaporation temperature, duty ratio, frequency, voltage, $H_2$ / $N_2$ gas ratio on the properties of Ti(CN) layer were investigated. The layer thus obtained had high hardness and low friction coefficient. Detailed results on the hardness, surface morphology, XRD, WDS analysis, wear test and scratch test of this layer are presented.】