TEM Study of Carbon Nanocrystals Grown in the Process of Low-Temperature CVD Synthesis of Tungsten Carbides
The paper reports on the study of carbon nanocrystals formed in the process of low-temperature CVD synthesis of tungsten carbide coatings in WF6, C3H8, H2 gas reagents. The morphology and structure of observed nanocrystals were studied by the method of transmission electron microscopy. Carbon nanoparticles and nanotubes (sometimes filled by Ni or iron fluorides) were found in deposits formed on Ni or stainless steel substrates. In the latter case nanocrystalline whiskers of cubic carbon (Pm3m) were also observed.