Morphology and structure of Ti-rich alloy thin film
The morphology and structure of the SMA thin film of Ti 43.27% Ni formed by HCD sputter deposition on glass substrates were studied. The results showed that when the temperature of the substrate is sufficiently high in the process of sputter depositing film,the thin film is bassically crystallized and its morphology is polycrystal consisting of martensite, R, Ti 2 Ni and parent phase. Because the relative quantity of parent phase increases and that of martensite decreases after heat treatment, M s temperature drops,the using temperature range of SMA thin film is expanded. Observed in situ from room temperature up to 110 ℃,the martensite in the polymorphy is reduced continuously until it disappears, and all transformated into R,Ti 2 Ni and parent phase in the end, which means the martensite shows thermoelasticity.