Raman Spectroscopy of Amorphous Diamondlike Carbon Films Produced with a Mass-Separated Ion Beam and Pulsed Arc Discharge
Raman spectra of amorphous hydrogen-free diamondlike films prepared by two different methods, namely, by using a mass-separated carbon ion beam, and pulsed arc-discharge deposition, were investigated. For the samples prepared with both deposition methods, clear correlation between the carbon deposition energy and such parameters of the Raman spectra as the intensity ratio R=I1500/I1550 and the average slope S=(I1300-I1100)/I1100 was established. Also, the data show a reproducible dependence between the parameters S and R, and the region corresponding to the best diamondlike films is well-defined in the S-R plot. The extremes of the introduced parameters R and S indicate the optimal deposition conditions with respect to the film hardness, electrical resistance, etc. In the case of mass-separated ion-beam deposition, the data obtained provide a straightforward dependence between the sp3 fraction and the introduced numerical parameters.