Electron Microscopy Observations on the Crystallization of Thin Films of Tantalum Oxide
The structure of Ta2O5 has been described in the literature in several different crystallographic forms with varying unit cell lattice parameters as is indicated in Table I. Two aspects of the lattice parameter values in Table I are evident: (a) That a number of the more recent identifications of the structure of Ta2O5 involve unit cells which are large in one dimension; and (b) that there is a definite distinction between the structure ascertained for Ta2O5 in the form of anodic films and Ta2O5in the form of “bulk” crystals.