You are a chemist. Please follow the instructions to convert the structure to the corresponding name.
system
carbamoyl 5-amino-4-(4-fluoro-3-methylphenyl)-2-(methylamino)thieno[2,3-d]pyrimidine-6-carboxylate is the IUPAC name of a molecule. Please give its molecular formula.
user
C16H14FN5O3S
assistant