NON-DESTRUCTIVE CONTROL OF PVD COATING SURFACE DEFECTS

Nanostructured ZrN coatings were deposited by the vacuum arc method with partial separation of the plasma flow from macroparticles using a curvilinear magnetic filter. With the proposed deposition parameters, a ZrN coating with an fcc lattice and (111) texture is formed. Theoretical studies are carried out to assess the defects of the surface layer in the
presence of an adsorbed impurity of an fcc lattice with the surface orientation plane (111), and the characteristics of surface waves in the ZrN coating are considered. Equations are obtained for the dispersion laws and parameters of the splitting off of the surface wave from the zone of bulk vibrations in the nearest-neighbor approximation.