Development and Research of a Micromechanical Rotation Sensor

The description of the developed design of the sensitive element of the micromechanical rotation sensor is given, the simulation results are presented. The results of experimental studies are presented, showing the efficiency of the developed design. As a result of the study of the Bosch process using methods for planning multifactor experiments, the modes of deep etching of silicon were optimized. Prototypes of sensitive element MEMS accelerometers have been produced.