2-DOF MIMO decoupling control of the gantry high performance motion system

The gantry high performance motion system is widely used in many high-precision servo motion scenarios. In this paper, a two-degree-of-freedom MIMO decoupling control strategy is proposed. In this strategy, a MIMO decoupling matrix is designed in a targeted manner, and a two-degree-of-freedom control structure composed of acceleration feedforward and closed-loop feedback control is used to suppress various disturbances, and then the motion coordination control of the motion stage is carried out from a global perspective. Finally, the effectiveness of the control strategy is verified by the actual test of the fourth order setpoint trajectory tracking, and the performance is compared with the general cross-coupling control strategy. The results show that the root mean square value of the tracking error and the maximum absolute value of the tracking error in the combined test of the X, Y direction and the YX axis of the gantry high performance motion system have been effectively improved.