Structural, Surface and Optical Characterization of ZnO Thin Films Deposited by SILAR and Spin-Coating Methods

In this study, ZnO thin films were deposited on (1 1 1) oriented n-type and (1 0 0) oriented p-type Si substrates using SILAR and spin-coating methods, respectively. The XRD, SEM, and PL measurements of the samples were performed. The XRD results showed the presence of ZnO peaks. The SEM results showed that the surfaces were homogeneous in both methods, and nanorods were present in the samples grown by the SILAR method. The PL results showed that the samples emitted light at different wavelengths. The PL results under different powers were interpreted from the samples, and it was determined that this sample reached a higher emission intensity with increasing excitation power.