Investigation Ne ions scattering from the stepped InP(001) surface

We present in this paper possibility of using glancing incidence ions scattering process for the determination of surface atomic step. We study the grazing scattering of Ne+ stepped InP(001) surface in small angle of incidence ions. Additionally, we elaborate on the spectra of energy some intensive maximums formed by ions scattered from the monoatomic surface steps. Based on concrete examples, we also observe the effect of the atomic mass of the stepped atoms on the process of ion scattering. We study the trajectories of ions which scattered from stepped InP(001) surface and found that the track of scattered ions have a zig-zag shape. An ion Ne trapped in a channel formed by an atomic step, after passing some distances, dechannels due to a hard collision of one of the atoms forming the basis of the channel. The physical settings of dechannelized Ne ions were analyzed and calculated, and this calculation makes it possible to understand the mechanism of ion dechanneling.