Power feeding technology of RF ion source based on FM resonance matching

The impedance of RF ion source changes during the generation of plasma, and its characteristics are not easy to calculate and measure. In order to feed the power efficiently into the ion source to excite the plasma, this paper proposes a power feeding technique based on FM resonance matching, using multiple sets of RF full-bridge inverter that are easy to quickly adjust the frequency in parallel to improve the power capacity, and using the phase-locked loop to track and correct the voltage and current phase of the power source in real time, so that the circuit can quickly enter the resonant state to achieve impedance matching. Simulation results in PSIM show that the regulation time for the circuit to re-enter the resonant state is about 100us when the impedance of the plasma impedance changes.