Simulation and development of a prototype for high precision surface metrology

Optical techniques are used in many applications in the metrology field, namely for high accuracy surface profiling. Although there many techniques are available, a specific measurement methodology must be correctly chosen according to the specifications of the range of measurement, field, and surface characteristics. In this work we simulate and develop a small prototype capable of measuring surfaces of circa 10 by 10 cm with an uncertainty of 20 µm in all directions, using the astigmatic method as baseline. The aim of this paper is then to show a dedicated and optimized optical setup that allow the surface characterization of a sample surface.