Multiscale modeling of femtosecond laser processing quartz crystal

This study optimizes the distribution function of laser light intensity inside the material, based on the interaction between a femtosecond laser of 800 nm wavelength and quartz crystal, comprehensively considering the changes in absorption coefficient and reflectivity caused by material anisotropy. Throughout the simulation of multi-pulse machining, the influence of processing parameters such as the number of pulses and pulse energy on the hole depth, hole taper, and cross-sectional topography was investigated. Finally, the three-dimensional topography processed at various scanning rates was researched, and the correlation between the spot overlap ratio and the bottom surface topography was examined.