Mechanistic insights into low-temperature epitaxial growth of aluminum nitride films on layered transition metal dichalcogenides

It has been demonstrated that the WS2 monolayer is an excellent template for AlN epitaxy at 400 °C low temperature. Low-temperature AlN thin films exhibit much superior crystalline quality than those grown directly on sapphire substrates. In addition to the small lattice mismatch between AlN and WS2 monolayer, we proposed a growth mechanism to explain the excellent van der Waal epitaxy by looking at the initial growth. This growth model reveals that transition metal dichalcogenides (TMDCs) are promising buffer layers for the deposition of III-nitrides but also suggests the novel combination of AlN and TMDCs in the research of future 2D field-effect transistors due to the extremely low leakage current of high-quality AlN films.