From a single silicon carbide detector to pixelated structure for radiation imaging camera

In this work, Schottky detectors based on a high-quality 4H-SiC epitaxial layer with a thickness of 50 µm were prepared. The Schottky contact of Ni/Au metallization with a 3 mm diameter was made. Reverse current-voltage characteristics were measured up to a voltage of 300 V with a leakage current of 40 pA at room temperature. Using an α-particle radiation source, the spectrometric characteristics of the 4H-SiC detector were tested. The best energy resolution in the FWHM (Full Width and Half Maximum) about 15 keV for 5.5 MeV α-particles was observed. Furthermore, a 4H-SiC pixel sensor (256 × 256) for the Timepix3 reading chip was prepared. The spectrometric and imaging properties of the new Timepix3 detector based on the 4H-SiC sensor were tested. The results showed high energy resolution and also high-quality X-ray imaging of the biological object.