Equiprobability-based Local Response Surface Method for High-Sigma Yield Estimation with Both High Accuracy and Efficiency

— With the ever-increasing transistor density and memory capability in integrated circuits, the high-sigma yield estimation has become a growing concern. This work presents an equiprobability-based local response surface method (ELRS) that can perform high-sigma yield estimation with both high accuracy and efficiency. Demonstrating with 6T-SRAM, the proposed method exhibits more than 10 times improvement in accuracy when comparing with the state-of-the-art while maintaining the efficiency to the best record in literature.