Investigation of stepped InP(001)<110> surface by the method of low energy ion scattering

5 keV - energy Ne+ ions are scattered from stepped InP(001)<110> surfaces in grazing incidence. The study of a stepped surface using the ion scattering method is of great interest, since ions are scattered at large angles. For the stepped surface calculated the simple trajectories channeled ions using binary collision approximation method. Calculated energy and angle of ions, which exits from this surface channel. It indicates that at the energy distribution observe intensively peaks, which corresponded to the ions leaved surface channels formed, stepped atoms.