Integrated active lithium niobate photonic devices


 We report fabrication of integrated active lithium niobate (LN) photonic devices such as waveguide amplifiers and tunable lasers using photolithography assisted chemo-mechanical etching (PLACE) technique. Specifically, a maximum internal net gain exceeding 20 dB is achieved in the LN waveguide amplifier, and an electro-optically tunable single-frequency laser of an ultra-narrow linewidth of 454.7 Hz has been demonstrated in a high Q LN microdisk. An electrically driven micro-ring laser has been demonstrated by monolithic integration of a diode laser with a LN microring resonator. We also realize hybrid integration of passive and active LN microdevices using a continuous lithographic processing approach. The integrated active LN photonic devices have a broad range of applications in light-wave communication, precision sensing and quantum information science.