A low jitter 100J Xecl excimer laser

To obtain low jitter and high energy ultraviolet laser pulse, the XeCl excimer laser pumped by electron-beam was reported. The construction and the principle of the XeCl excimer laser with electron-beam pump source were described. Experimental study on laser output characteristic of the XeCl excimer laser was carried out, and effects on pressure of mix gas in laser chamber and charge voltage on jitter of laser pulse were showed. When the charge voltage of the laser is 81kV, the output energy of XeCl excimer laser was about 100J, its electric efficiency was about 0.58%, and the laser pulse jitter was less than 20ns.