Master-Slave Synchronous Control of Dual-Drive Gantry Stage With Cogging Force Compensation

Dual-drive gantry stage has been widely applied to various industrial manufacturing fields with its unique structural advantages, and the synchronous control accuracy of the platform is crucial to the performance of the whole motion system. Therefore, an adaptive robust synchronous control scheme based on an improved master-slave structure is proposed, which is not only simple in structure but also easy to implement in engineering. The error dynamics model established in this article makes up for the lag of response of traditional master-slave control and improves the stability of closed-loop system. Online parameter adaptive algorithms deal with parameter uncertainties in the system, while robust control deals with unmodeled dynamics and external disturbances. In addition, nonlinear cogging force compensation is applied to the gantry biaxial system to further improve the control accuracy of tracking and synchronization. Finally, a dual-drive gantry stage system with good tracking and synchronization performance is obtained. The effectiveness and superiority of the proposed control strategy are verified by the comparison of several groups of experiments.