Corrigendum: Reaction mechanism of atomic layer deposition of zirconium oxide using zirconium precursors bearing amino ligands and water

In the original article, the Supplementary material contained “Data Sheet 1”, which was not intended for publication. The incorrect file has been unpublished, and the remaining file, previously “Data Sheet 2”, has been renamed as “Data Sheet 1”. The authors apologize for this error and state that this does not change the scientific conclusions of the article in any way. The original article has been updated.