Research and experiment on control loop system of Source Measure Unit

Aiming at the problem that the capacitive load of the source measure unit (SMU) system affects the stability of the loop control, this paper makes an in-depth theoretical analysis of the loop control system based on the SMU. A theoretical and circuit model is established after the analysis. In the control loop structure, an integrator with proportional amplification serves as an error amplifier for the control loop system to obtain sufficient phase margin at the optimal bandwidth. A phase-lead compensation capacitor scheme is studied and proposed to achieve the maximum tolerance range to achieve the loop stability. The results show that the simulation and experimental results are basically consistent. The results verify the theoretical correctness and practical value of this SMU control loop system, and provide a theoretical basis for the research of the SMU control loop structure of the subsequent SIP process.