Experimental study on step characteristics of inchworm linear micro-actuator

Few studies have quantitatively analyzed the relationship among the step distance, the driving voltage, and driving frequency of the inchworm linear microactuator, which cannot achieve accurate control of the micro-actuator. What’s more, the parameter setting rule is not clear. In this paper, the relationship model among step distance, voltage, and frequency is studied through theoretical derivation and experimental analysis. The parameter setting conditions of the drive signal are analyzed, and the waveform is modified to improve the stability of the micro-actuator. The theoretical model of micro-driver step prediction is established by using the non-linear Support Vector Machine (SVM) regression theory and Gaussian radial basis kernel function and verified by experiments.