Design and analysis of Double-cavity micropump of flexible valve

Piezoelectric micropump and surface tension micropump are generally favored in industrial applications, but these two micropumps have obvious defects through industrial practice. Due to the presence of a piezoelectric oscillator, it is difficult to reduce the volume by optimization further, and the oscillator will be damaged to a certain extent after use for a long time. Based on electric wetting on dielectric (EWOD), a new, efficient EWOD-driven flexible valve micropump is designed using EWOD and flexible valves to replace the conical tube, and a dual microchannel structure is proposed to reduce flow fluctuations at the outlet. The working principle of the EWOD flexible valve micro-pump is deeply discussed. The micropump design is optimized by the finite element method, and its performance is analyzed. The numerical analysis results show that: (1) When the flexible valve structure is adopted, the micropump outlet flow increases significantly. (2) When using the double microchannel, the outlet flow fluctuation of the micropump is significantly reduced. (3) Using the structure of the double microchannel, the micropump has two internal rings, and the direction of the inner ring is related to the direction of the vibration droplet. The EWOD micropump structure is designed to solve the reflux phenomenon in the current micropump pumping process