text: This work deals with the design and topology optimization of micro-electromechanical systems (MEMS) acting as filters by employing structural dynamics concepts.
  In the wireless communication field, the integration of filters in the electronic circuit plays a major role in the construction of modern, high performance transceivers. Filters are one of the most important elements in frequency selective circuits. The advance in micromachining manufacturing processes has enabled the integration of micromechanical filters made of silicon in these circuits. MEMS has the potential to replace signal processing circuits that require narrow band-width (high-Q), good signal to noise ratio, and stable temperature and aging characteristics. Recently MEMS filters have been shown to be superior to conventional electrical component in terms of signal quality and energy consumption and size.
  It has been shown that the design topology of basic two-port network with lossless mechanical system and modeling approach of electrical models in electrical terms, mechanical models in mechanical terms seems to capture the best of the two 'worlds'. This modeling is in contradiction to the usual modeling in terms of an electrical circuit via the exploitation of mechanical-electrical analogies and conveniently implemented in a circuit simulator.