The main advantages of excimer lamps over other sources of UV and VUV radiation are as follows:
* high average specific power of UV radiation (up to 1 Watt per cubic centimeter of active medium);
* high energy of an emitted photon (from 3.5 to 11.5 eV);
* quasimonochromatic radiation with the spectral full-width at half maximum from 2 to 15 nm;
* high power spectral density of UV radiation;
* choice of the wavelength of the spectral maximum of UV radiation for specific purposes (see table);
* availability of multi-wave UV radiation owing to simultaneous excitation of several kinds of working excimer molecules;
* absence of visible and IR radiation;
* instant achievement of the operating mode;
* low heating of radiating surface;
* absence of mercury.